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Teledyne HPM-2002-OBE manuel d'utilisation

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Table des matières du manuel d’utilisation

  • Page 1

    INSTRUCTION MANUAL HPM-2002-OBE VACUUM GAUGE TELEDYNE HASTINGS INSTRUMENTS ISO 9001 CER TIFIED[...]

  • Page 2

    HPM-2002-OBEVacuum Gauge Page 2 of 39 Manual Print History The print history shown below lists the printing dates of all revisions and addenda created for this manual. The revision level letter increases al phabetically as the manual undergoes subsequent updates. Addenda, which are released between revisions, contain important ch ange information t[...]

  • Page 3

    HPM-2002-OBEVacuum Gauge Page 3 of 39 Table of Contents 1. GENERAL INFOR M AT ION ........................................................................................................ .................................... 5 1.1. F EATURES : ...........................................................................................................[...]

  • Page 4

    HPM-2002-OBEVacuum Gauge Page 4 of 39 4.4. D UAL S ENSOR O PERATION .............................................................................................................................. .... 30 5. TROUBLESHOOT ING ............................................................................................................... ...............[...]

  • Page 5

    HPM-2002-OBEVacuum Gauge Page 5 of 39 1. General Information The Hastings HPM-2002-OBE is a small, low co st electronics module which provides the user with accurate vacuum measurements over a wide range of pressure. The HPM-2002-OBE uses the same rugged HPM-2002s transducer tube as the HPM -2002 bench top instr ument. This tube features two sensor[...]

  • Page 6

    HPM-2002-OBEVacuum Gauge Page 6 of 39 1.5. HPM-2002-OBE RS232/485 Output Module The RS232/485 module consists of a power conversion/sensor transducer board, micropro cessor board and a user interface option board. Se rial communication is conducted via an RJ-11 type connector. With RS 232 option (EIA-232 Rev. E) communication can easily be esta bli[...]

  • Page 7

    HPM-2002-OBEVacuum Gauge Page 7 of 39 2. Inst allation This section is designed to assist in getting a new pr essure gauge into operation as quickly and easily as possible. Please read the following inst ructions thoroughly before inst alling the instrument. 2.1. Receiving Inspection Carefully unpack the Hastings Model HPM-2002-O BE Instrument (par[...]

  • Page 8

    HPM-2002-OBEVacuum Gauge Page 8 of 39 • Maximum relative humidity: 80% for temperatures up to 31°C decreasing linearl y to 50% relative humidity at 40°C. • Installation category II HPM-2002-OBE CABLE PINOUT Analog Ouput Analog Ouput Digital Output Pin No. 0-10 Vo lt 4-20 mA RS232/485 1 High Setpoint Output High Setpoint Output High Setpoint O[...]

  • Page 9

    HPM-2002-OBEVacuum Gauge Page 9 of 39 3. Operating Information This section contains information on operating the HPM-2002-OBE in any of its various configurations. Refer to the approp riate section for information on the mode in use . 3.1. Analog Output (0-10V) 3.1.1. Overall Functional Description The status bar gives information about the condit[...]

  • Page 10

    HPM-2002-OBEVacuum Gauge Page 10 of 39 3.1.3. Run Mode The HPM-2002-OBE will automatically e nter the Run mode upon start-up . This is the mode for normal operation and the mode in which the instrument will sp end most of its time. In the Run mode the HPM-2002- OBE will continuously moni tor the pressure, update th e alarm conditions, and upda te t[...]

  • Page 11

    HPM-2002-OBEVacuum Gauge Page 11 of 39 coefficient, place the HPM-2002-OBE in the Cal mode using the SELECT button. Then turn the ADJUST rotary encoder. The Cal light will begin to flash during ad justment and will continue to flash until the Cal mod e is exited using the SELECT button. To perform a full calibration o n the HPM-2002-OBE, first use [...]

  • Page 12

    HPM-2002-OBEVacuum Gauge Page 12 of 39[...]

  • Page 13

    HPM-2002-OBEVacuum Gauge Page 13 of 39 3.2. Analog Output (4-20mA) The HPM-2002-OBE with analog outp ut and display is shown in the figure below. The user interface consists of a status bar, a mode bar, and setpoint test jacks. 3.2.1. Overall Functional Description The status bar gives information about the conditi on of the HPM-2002-O BE . High an[...]

  • Page 14

    HPM-2002-OBEVacuum Gauge Page 14 of 39 OBE will continuously moni tor the pressure, update th e alarm conditions, and update both analog output channels about ten times a second. 3.2.4. Cal Mode Optimal performance of the HPM-2002-OBE is achieve d by performing in situ adjustments to the calibration coefficients in the Cal mo de. There are three ca[...]

  • Page 15

    HPM-2002-OBEVacuum Gauge Page 15 of 39 To perform a full calibration o n the HPM-2002-OBE, first use the Zero Coeff icient Adjustment Procedure. Followed by the Midrange Coeff icient Adjustment Proc edure, and finally perform the Atmosphere Coefficient Adjustment Procedure. Sensor Coefficients are sto re d in the Sensor’s EEPROM upon exiting the [...]

  • Page 16

    HPM-2002-OBEVacuum Gauge Page 16 of 39[...]

  • Page 17

    HPM-2002-OBEVacuum Gauge Page 17 of 39 3.3. RS232/485 With Display The HPM-2002 -OBE with RS232/ 485 outp ut and display is sh own in the figure below. The user interface consists of 4-digit LED display, a status bar, and a mode bar. 3.3.1. Overall Functional Description The status bar gives information about the conditi on of the HPM-2002-O BE . H[...]

  • Page 18

    HPM-2002-OBEVacuum Gauge Page 18 of 39 The characters within wavy brackets { } cont ain choices for the appropriate command. The characters within the symbols < > ar e the common abbreviations for the one digit ASCII control codes which they represent, (e.g. <CR> represents carriage r eturn). When entering more than one command in the s[...]

  • Page 19

    HPM-2002-OBEVacuum Gauge Page 19 of 39 The setpoints may also be entered as a decimal number, e.g. [H=7 60.99<CR>] will be same as entering [H=7.6099E+ 2<CR>] . When inputting setpoint data, it should be entered in the same Units of Pressur e as the presently selected Units of Measurement (i.e. Torr, mbar or Pascal). The data is only ch[...]

  • Page 20

    HPM-2002-OBEVacuum Gauge Page 20 of 39 Restore Factory Defaults /#< CR> Restore Calibration Register Default Values Set Zero /0 <CR> Store Present Pressure as Instrument ZERO (if Piezo <32 Torr & Pirani <50 mTorr) Force Zero /!<CR> Override Limit Checks and Store Present P r e s s u r e a s I n s t r u m e n t Z E R O 3.[...]

  • Page 21

    HPM-2002-OBEVacuum Gauge Page 21 of 39 3.3.9. Modular Connector P inout (R2-232) RJ-1 1 connector on left side. Pin #1 .............................................................................. Ready to receive (output signal from OBE) Pin #2 .......................................................................................................[...]

  • Page 22

    HPM-2002-OBEVacuum Gauge Page 22 of 39 During normal operation the alarm light will illuminate a nd the TTL output (pin # 2) will go high (+5V) if the pressure becomes less than the set point. To view the setpoint using the serial connection, send “L<CR>”. The set points can be adjusted using either the controls on the gauge or the serial[...]

  • Page 23

    HPM-2002-OBEVacuum Gauge Page 23 of 39 3.4. DeviceNet TM The HPM-2002-OBE with DeviceNet option is shown in figure belo w. 3.4.1. Overall Functional Description The DeviceNet module consists of a power conversion /sensor transducer board, m icroprocessor board and a user interface option board. All communication is conducted via a 5-pi n “Micro?[...]

  • Page 24

    HPM-2002-OBEVacuum Gauge Page 24 of 39 3.5. Calibration of the HPM-2002-OBE 3.5.1. Zero Coefficient Adjustment The zero coefficient corrects for the constant power leve l which is present over the entire pressure range. Typically, this adjustment corrects fo r low pressure errors. The instrument will need to be re-zero ed often if measurements are [...]

  • Page 25

    HPM-2002-OBEVacuum Gauge Page 25 of 39 4. Theory of Operation The 2002s transducer tube is comprised o f two very different sensors which provide a span of me asurement extending from 1000 Torr down to less than 1 × 10 -4 Torr. The piezoresistive dev ice is a direct force sensor which provides pressure indication from 1000 Torr down to less than 1[...]

  • Page 26

    HPM-2002-OBEVacuum Gauge Page 26 of 39 4.2. Piezoresistive Sensor Figure 4.2 shows a typical schematic of a Boron io n implanted Wheatstone bridge network in a Si diaphragm inverted box type geom etry. The inside of the box is evacuated during anodic bonding to a Pyrex substrate. The membrane has maximu m deflection at atmosphere (or higher pressur[...]

  • Page 27

    HPM-2002-OBEVacuum Gauge Page 27 of 39 Figure 4.2[...]

  • Page 28

    HPM-2002-OBEVacuum Gauge Page 28 of 39 4.3. Pirani Sensor Figure 4.3a shows a thin metal film resistive element on a one micron thick Si 3 N 4 continuous membrane surrounded by a thin film reference resi stor on a Si substrate. The membrane is heated to a constant 8 °C above ambient temperature that is monitore d by the substrate resistor. The mem[...]

  • Page 29

    HPM-2002-OBEVacuum Gauge Page 29 of 39 This radiation loss is also independent of the thermal conductivity of the gas. It is somewhat dependent upon the absolute temperature of R s and the ambient temperature, but since ∆ T is kept to less than 20 °C, this Figure 4.3b Figure 4.3a[...]

  • Page 30

    HPM-2002-OBEVacuum Gauge Page 30 of 39 loss is only approximately 10% of E s . If ambient changes are small compared to the absolute values of the temperature this loss can approximated as a constant with temperature. Since the first two losses are essentially constant at high vacuum for a given sensor, we can measure these losses and subtract them[...]

  • Page 31

    HPM-2002-OBEVacuum Gauge Page 31 of 39 Figure 4.4[...]

  • Page 32

    HPM-2002-OBEVacuum Gauge Page 32 of 39 5. T r oubleshooting 5.1. Advanced Setup Guide The HPM-2002-OBE has several setup and control commands which can be accessed by using the ADJUST rotary encoder and SELECT pushbutton and at the same time viewin g the display. Note that most of the commands, which are described below, can be accessed using equiv[...]

  • Page 33

    HPM-2002-OBEVacuum Gauge Page 33 of 39 Baud Rate B_2.4 B_2.4, B_4 .8, B_9.6, B_19 .2, B_38.4, B_57 .6, B_125, B_250 , B_500 The baud rate is given in kbaud. For ex ample, B_9.6 c orresponds to a 9600 baud. Note: There is no equi valent RS232/485 comm and. Data Bits/Parity Bits/Stop Bits P8n1 8n1, 8n2, 7n2, 7E1, 7E2, 7o1, 7o2, 7 01, 702, 711,71 2 Th[...]

  • Page 34

    HPM-2002-OBEVacuum Gauge Page 34 of 39 Restore Calibrat ion r_CL Restore Calibration transfers the calibration fr om the HPM-2002s tube EE PROM into the HPM-2002- OBE’s CPU. EEI<CR> Restor e Factory Def ault s r_Fd The Restore Factory Default command is used to place calibration parameters into the CPU. From this point the gauge can be cali[...]

  • Page 35

    HPM-2002-OBEVacuum Gauge Page 35 of 39 communications program (e.g. Windows Ô Hyperterminal) which can be used to communicate with RS232 versions of the HPM-2002 -OBE. The Transmit De vice Status (“S<CR>”) command will retrieve the HPM-2002-OBE’s status register. A successful read of the status register will clear the “Err4” condit[...]

  • Page 36

    HPM-2002-OBEVacuum Gauge Page 36 of 39 6. W ARRANTY 6.1. Warranty Repair Policy Hastings Instruments warrants this produc t for a period of one ye ar from the date of shipment to be free from defects in material and work manship. This warrant y does not appl y to defects or failures re sulting from unauthorized modification, misuse or mishandling o[...]

  • Page 37

    HPM-2002-OBEVacuum Gauge Page 37 of 39 7. Diagrams and Drawings[...]

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    HPM-2002-OBEVacuum Gauge Page 38 of 39[...]

  • Page 39

    HPM-2002-OBEVacuum Gauge Page 39 of 39[...]