Apex Digital 16 series Bedienungsanleitung

16 Series Mass and V olumetric Flow Meters Precision Gas Flow Meter Operating Manual[...]

10/24/06 Rev . 0 DOC-APEXMAN16 Notice: The manufacturer reserves the right to make any changes and improvements to the products described in this manual at any time and without notice. This manual is copyrighted. This document may not, in whole or in part, be copied, reproduced, translated, or converted to any electronic medium or machine readable [...]

T able of Contents Page Installation 5 Plumbing 5 Mounting 5 Application 5 Power and Signal Connections 6 RS-232 Digital Output Signal 7 Standard V oltage (0-5 Vdc) Output Signal 7 Optional 0-10 Vdc Output Signal 7 Optional Current (4-20 mA) Output Signal 7 Optional 2nd Analog Output Signal 7 M Series Mass Flow Meter Operation 10 Main Mode 10 T are[...]

T able of Contents Page Collecting Data 19 Data Format 19 Sending a Simple Script File to HyperT erminal® 20 Operating Principle 21 Gas Viscosity 21 Other Gases 22 V olume Flow vs. Mass Flow 23 V olumetric Flow and Mass Flow Conversion 23 Compressibility 23 Standard Gas Data T ables 24 Gas Viscosities and Densities T able 25 V olumetric Flow Meter[...]

5 Thank you for purchasing an Apex Gas Flow Meter . Please take the time to nd and read the information contained in this manual. This will help to ensure that you get the best possible service from your instrument. This manual covers the following Apex instruments: M Series 16 Bit Mass Gas Flow Meters V Series 16 Bit V olumetric Gas Flow Meters[...]

6 Power and Signal Connections Power can be supplied to your M or V Series meter through either the power jack or the 8 pin Mini-DIN connector as shown in Figure 1. An AC to DC adapter which converts line AC power to DC voltage between 7 and 30 volts is required to use the power jack. The adapter current should be at least 100mA. The power jack acc[...]

7 RS-232 Digital Output Signal If you will be using the RS-232 output signal, it is necessary to connect the RS-232 Output Signal (Pin 5), the RS-232 Input Signal (Pin 3), and Ground (Pin 8) to your computer serial port as shown in Figure 2. Adapter cables are available from the manufacturer or they can be constructed in the eld with parts from [...]

8 7 4 6 2 1 D B -9 S e r ia l P o rt 5 5 - -- - -- - -- - G r o u n d - - -- - -- -- - -- - -- - -- -- - -- - -- - -- -- - -- - -- - G r o u n d - - -- - -- -- - 8 3 - -- - -- - -- - T ra n s m it -- - -- - -- - -- -- - -- - -- - -- -- - -- - -- - -- -- - R e c e ive - -- - -- - -- 3 2 - -- - -- - -- - R e c e i ve - -- - -- -- - -- - -- - -- -- - [...]

9 An optional industrial connector is also available: 1 6 5 4 3 2 Pin Function Cable Color 1 Power In ( + ) Red 2 RS-232 Output Blue 3 RS-232 Input Signal White 4 Remote T are (Ground to T are) Green 5 Ground (commom for power , communications and signals) Black 6 Signal Out (V oltage or Current as ordered) Brown Figure 4. Optional Industrial Conne[...]

10 M Series Mass Flow Meter Operation The M Series Mass Flow Meter provides a multitude of useful ow data in one simple, rugged device. The M Series can have several display “modes” depending on how the device is ordered. All M Series meters have a default Main Mode, Select Menu Mode, a Gas Select Mode (the Gas Select Mode may not be availab[...]

1 1 Gas Absolute Pressure: The M Series ow meters utilize an absolute pressure sensor to measure the line pressure of the gas ow being monitored. This sensor references hard vacuum and accurately reads line pressure both above and below local atmospheric pressure. This parameter is located in the upper left corner of the display under the dyn[...]

12 Select Menu Mode Pushing “Mode” once will bring up the “Select Menu” display . Push the button nearest your selection to go to the corresponding display . Push “Mode” again to return to the Main Mode display . ( Note: If your meter was ordered with T otalizing Mode option (page 36), pushing the “Mode” button once will bring up th[...]

13 Communication Select Mode The Communication Select mode is accessed by pressing the button below “Comm. RS-232” on the Select Menu display . The screen will appear as shown in Figure 9 below . Select Main > Unit ID ( A ) .....A Baud ( 19200 ) ....19200 Data Rate......Fast Comm. UP DOWN RS-232 Figure 9. Communication Select Display Unit ID[...]

14 Manufacturer Data “Manufacturer Data” is accessed by pressing the “Mfg. Data” button on the Select Menu display (Figure 7). The “Mfg 1” display shows the name and telephone number of the manufacturer . The“Mfg 2” display shows important information about your ow meter including the model number , serial number , and date of ma[...]

15 V Series V olumetric Flow Meter Operation The V Series can have several display “modes” depending on how the device is ordered. All V Series meters have a default Main Mode,a Select Menu Mode, a Gas Select Mode (the Gas Select Mode may not be available on meters calibrated for a custom gas or blend), a Communication Select Mode and a Manufac[...]

16 Flashing Error Message: Our volumetric ow meters and controllers display an error message (VOV = volumetric overrange) when a measured parameter exceeds the range of the sensors in the device. When any item ashes on the display , the ashing parameter is not accurate. Reducing the value of the ashing parameter to within specied lim[...]

17 to the screen, hit the “Enter” key several times to clear any extraneous information. T ype “*@=@” followed by “Enter” (or using the RS-232 communcation select menu, select @ as identier and exit the screen). If data still does not appear , check all the connections and com port assignments. Changing From Streaming to Polling Mode[...]

18 Gas Select – The selected gas can be changed via RS-232 input. T o change the selected gas, enter the following commands: In Streaming Mode: $$#<Enter> In Polling Mode: Address$$#<Enter> (e.g. B$$#<Enter>) Where # is the number of the gas selected from the table below . Note that this also corresponds to the gas select menu o[...]

19 Collecting Data: The RS-232 output updates to the screen many times per second. V ery short-term events can be captured simply by disconnecting (there are two telephone symbol icons at the top of the HyperT erminal® screen for disconnecting and connecting) immediately after the event in question. The scroll bar can be driven up to the event and[...]

20 Sending a Simple Script File to HyperT erminal® It is sometimes desirable to capture data for an extended period of time. Standard streaming mode information is useful for short term events, however , when capturing data for an extended period of time, the amount of data and thus the le size can become too large very quickly . Without any sp[...]

21 Operating Principle All M or V Series Gas Flow Meters are based on the accurate measurement of volumetric ow . The volumetric ow rate is determined by creating a pressure drop across a unique internal restriction, known as a Laminar Flow Element (LFE), and measuring differential pressure across it. The restriction is designed so that the g[...]

22 Other Gases: M Series Flow Meters can easily be used to measure the ow rate of gases other than those listed as long as “non-corrosive” gas compatibility is observed. For example, a ow meter that has been set for air can be used to measure the ow of argon. The conversion factor needed for measuring the ow of different gases is li[...]

23 Once the corrected mass ow rate at standard conditions has been determined and the density at standard conditions is known (see the density table at the back of this manual), a true mass ow can be calculated as detailed in the following example: Mass Flow Meter Reading = 250 SCCM (Standard Cubic Centimeters/Minute) Gas: Helium Gas Density [...]

24 This reduces to: P a V a / Z a T a = P s V s / Z s T s , eliminating R and n. Our mass ow meters model gas ows based upon the non-ideal gas characteristics of the calibrated gas. The ow corrections are normally made to 25 C and 14.696 PSIA and the compressibility factor of the gas under those conditions. This allows the user to multiply[...]

25 Gas Number Short Form Long Form Viscosity* 25 deg C 14.696 PSIA Density** 25 deg C 14.696 PSIA Compressibility 25 deg C 14.696 PSIA 0 Air Air 184.918 1.1840 0.9997 1 Ar Argon 225.593 1.6339 0.9994 2 CH4 Methane 1 1 1.852 0.6569 0.9982 3 CO Carbon Monoxide 176.473 1.1453 0.9997 4 CO2 Carbon Dioxide 149.332 1.8080 0.9949 5 C2H6 Ethane 93.540 1.238[...]

26 Gas Number Short Form Long Form Viscosity* 0 deg C 14.696 PSIA Density** 0 deg C 14.696 PSIA Compressibility 0 deg C 14.696 PSIA 0 Air Air 172.588 1.2927 0.9994 1 Ar Argon 209.566 1.7840 0.9991 2 CH4 Methane 103.657 0.7175 0.9976 3 CO Carbon Monoxide 165.130 1.2505 0.9994 4 CO2 Carbon Dioxide 137.129 1.9768 0.9933 5 C2H6 Ethane 86.127 1.3551 0.9[...]

27 V olumetric Flow Meters Under Pressure V Series V olumetric Flow Meters are intended for use in low pressure applications. This is because an accurate measurement of the volumetric ow rate by means of dif ferential pressure requires the ow at the differential pressure sensor to be in a laminar state. The state of the ow is quantied b[...]

28 TROUBLESHOOTING Display does not come on or is weak. Check power and ground connections. Flow reading is approximately xed either near zero or near full scale regardless of actual line ow . Differential pressure sensor may be damaged. A void installations that can subject sensor to pressure drops in excess of 10 PSID. A common cause of thi[...]

29 Slower response than specied. M or V Series meters feature an RS-232 programmable Geometric Running Average (GRA). Depending on the full scale range of the meter , it may have the GRA set to enhance the stability/readability of the display , which would result in slower perceived response time. If you require the fastest possible response tim[...]

30 Specication Mass Meter V olumetric Meter Description Accuracy ± 0.8% of Reading ±0.2% of Full Scale At calibration conditions after tare High Accuracy Option ± 0.4% of Reading ±0.2% of Full Scale At calibration conditions after tare Repeatability ± 0.2% Full Scale Operating Range 1% to 100% Full Scale Measure T ypical Response Time 10 Mi[...]

31 Specication Mass Meter V olumetric Meter Description Accuracy ± 0.8% of Reading ±0.2% of Full Scale At calibration conditions after tare High Accuracy Option ± 0.4% of Reading ±0.2% of Full Scale At calibration conditions after tare Repeatability ± 0.2% Full Scale Operating Range 1% to 100% Full Scale Measure T ypical Response Time 10 Mi[...]

32 T echnical Data for Moderate Flow Mass & V olumetric Flow Meters >20SLPM Full Scale up to 0-250SLPM Full Scale Specication Mass Meter V olumetric Meter Description Accuracy ± 0.8% of Reading ±0.2% of Full Scale At calibration conditions after tare High Accuracy Option ± 0.4% of Reading ±0.2% of Full Scale At calibration conditions [...]

33 Specication Mass Meter V olumetric Meter Description Accuracy ± 0.8% of Reading ±0.2% of Full Scale At calibration conditions after tare High Accuracy Option ± 0.4% of Reading ±0.2% of Full Scale At calibration conditions after tare Repeatability ± 0.2% Full Scale Operating Range 1% to 100% Full Scale Measure T ypical Response Time 10 Mi[...]

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37 Option: T otalizing Mode M or V Series Flow Meters and Controllers can be purchased with the T otalizing Mode option. This option adds an additional mode screen that displays the total ow (normally in the units of the main ow screen) that has passed through the meter or controller since the last time the totalizer was cleared. The T otaliz[...]

38 Option: 9 V olt Battery Pack A Battery Pack that uses a common 9 V olt battery can be mounted to the top of your M or V Series Flow Meter . Power is passed from the battery to the ow meter through the 8 pin Mini-DIN connector . Output signals from the ow meter or pressure guage are passed through the male connector on the bottom of the bat[...]

39 Wrench Access Hole Wrench Access Hole 3/32 Hex Wrench T rapped Mounting Screw T rapped Mounting Screw 8 Pin Mini DIN Plug 9 volt battery Back of Meter Battery Pack Installation/Removal Battery Pack Installation and Removal: The battery must be removed before the battery pack can be installed or removed. Remove the back cover of the battery pack [...]

40 CCM CCH LPM LPH CFM CFH CFH 0.0021 0.00003 2.1 189 0.035 60.0 1.0 CFM 0.000035 0.0000005 0.035 0.00059 1.0 0.0166 LPH 0.06 0.001 60.0 1.0 1699.0 28.316 LPM 0.001 0.000017 1.0 0.0166 28.316 0.4719 CCH 60.0 1.0 60000.0 1000.0 169901 1.0 28317.0 CCM 1.0 0.0167 1000.0 16.667 28317.0 471.947 Flow Conversion T able: Accessories Battery Pack Muti-Drop [...]

41 Serial Number: ____________________________ Model Number: ____________________________ Calibration Certicate (Store device calibration certicate in the pocket below .)[...]