Sierra 820 Bedienungsanleitung

Series 820 Instruction Manual Table of Contents IM-82-C 0-1 Sierra 820 Series Top- Trak ª Mass Flow Meters Instruction Manual Part Number IM-82 Revision C 06-99 5 Harris Court, Building L Monterey, CA 93940 (831) 373-0200 (800) 866-0200 Fax (831) 373-4402 http://www.sierrainstruments.com Sierra Instruments b.v. Bolstoen 30A 1046 AV Amsterdam The N[...]

Table of Contents Series 820 Instruction Manual 0-2 IM-82-C Customer Notice Sierra Instruments, Inc. is not liable for any damage or personal injury, whatsoever, resulting from the use of Sierra Instruments standard mass flow meters o r control- lers for oxygen gas. You are responsible for determining i f t his mass flow meter or controller i s app[...]

Series 820 Instruction Manual Table of Contents IM-82-C 0-3 Table of Contents Chapter 1 Introduction Introduction .............................................................1 - 1 Using this Manual .................................................1 - 1 Safety Information .................................................1 - 2 Receipt of System Comp[...]

Table of Contents Series 820 Instruction Manual 0-4 IM-82-C Appendix A Conversion Formulas and Gas Tables Appendix B Production Specifications List of Figures 1-1. Top-Trak Features (Typical) ..................................1 - 3 1-2. Flow Paths through the Transducer ..........................1 - 4 1-3. Flow Measuring Principle .................[...]

Series 820 Instruction Manual Table of Contents IM-82-C 0-5 Cautions Caution! Only qualified personnel should install the transducer. Caution! Do not supply +DC power at the D-connector while using a power supply at the power jack. Both supplies may be damaged. Caution! Operating a 12 VDC transducer at 24 VDC will cause equipment damage. Caution! O[...]

Table of Contents Series 820 Instruction Manual 0-6 IM-82-C[...]

Series 820 Instruction Manual Chapter 1 Introduction IM-82-C 1-1 Chapter 1 Introduction This instruction manual covers the installation, operation and main- tenance of SierraÕs 820 Series product line including the following Top-Trak ª Models: · 822 Mass Flow Meter with display (nylon flow body) · 824 Mass Flow Meter without display (nylon flow[...]

Chapter 1 Introduction Series 820 Instruction Manual 1-2 IM-82-C Safety Information Caution and warning statements are used throughout this book to draw your attention to important information. Warning! Caution! This statement appears with information that is important to protect people and equipment from damage. Pay very close attention to all war[...]

Series 820 Instruction Manual Chapter 1 Introduction IM-82-C 1-3 Top- Trak Features Standard Top-Trak Mass Flow Meters require a 12 to 15 VDC exter- nal power source (24 VDC input power optional). The transducerÕs 0 to 5 VDC output signal allows for flow recording, data-logging or control. A 4 to 20 mA output signal is optionally available. Input [...]

Chapter 1 Introduction Series 820 Instruction Manual 1-4 IM-82-C The 820 Series Flow Sensing Pri ncipl e The operating principle of Top-Trak transducers is based on heat transfer and the first law of thermodynamics. During operation process gas enters the instrumentÕs flow body and divides into two flow paths, one through the sensor tube, the othe[...]

Series 820 Instruction Manual Chapter 2 Installation IM-82-C 2-1 Chapter 2 Installation Installation Overview To ensure a successful installation, inlet and outlet tubing should be clean and free from burrs or rims caused by cutting prior to plumb- ing the transducer into the system. The protective caps covering the inlet/outlet fittings should not[...]

Chapter 2 Installation Series 820 Instruction Manual 2-2 IM-82-C Installing the Transducer Follow the installation instructions that apply to your transducer’s process connection. For all 1/2-inch size process connections, observe the piping recommendations given on page 2-3. Before operation, all plumbing should be checked carefully for leaks an[...]

Series 820 Instruction Manual Chapter 2 Installation IM-82-C 2-3 1/4 Inch Female NPT (standard on nylon flow bodies) 1. Position the transducer with the flow direction arrow pointing downstream in the direction of flow. 2. Use a good quality paste pipe thread sealant. Apply to the pipe threads. 3. Tighten the pipe no more than 1 turn past hand-tigh[...]

Chapter 2 Installation Series 820 Instruction Manual 2-4 IM-82-C Wiring the Transducer Standard Top-Trak ™ transducers require a 12 to 18 VDC power supply (15 VDC nominal, 100 mA maximum). 24 VDC input power is optional. Transducers are connected to the power supply through either the dedicated DC power jack or through the 9-pin D-connector locat[...]

Series 820 Instruction Manual Chapter 2 Installation IM-82-C 2-5 Standard 0-5 VDC Output Signal Wiring The standard 0-5 VDC output signal flows from Pin 3 (0-5 VDC Out) through the load (1K Ohm minimum) to Pin 7 (Power Com- mon). The figure below is a typical example of input power and output signal connections. Figure 2-3. Standard 0-5 VDC Output [...]

Chapter 2 Installation Series 820 Instruction Manual 2-6 IM-82-C Figure 2-5. Multiple Transducer Current Loop Connections Remote Display Installation Mount the remote display at a convenient location within reach of the supplied interface cable. The maximum cable length is 100 feet (30 m). Figure 2-6. Mounting the Remote Display[...]

Series 820 Instruction Manual Chapter 3 Operation IM-82-C 3-1 Chapter 3 Operation The output signal of the transducer is either 0-5 VDC (standard) or 4-20 mA (optional). The output signal is linear and proportional to the gas mass flow rate. For example, for a 0-5 VDC output signal, 5.00 VDC is the output signal for the full scale listed on the tra[...]

Chapter 3 Operation Series 820 Instruction Manual 3-2 IM-82-C Referencing the Transducer to Non-Standard Conditions The gas flow rate output of your transducer is referenced to “standard” conditions of 21°C (70°F) and 760 mm of mercury (1 atmosphere) unless otherwise specified on the certificate of calibration. Check the stated reference cond[...]

Series 820 Instruction Manual Chapter 3 Operation IM-82-C 3-3 Zero and Span Adjustments The zero and span potentiometers are accessed through the ports marked on the side of the transducer. Normally, span adjustments are not made unless you are calibrating the transducer. The span adjustment should not be used unless you have a known, precise non- [...]

Chapter 3 Operation Series 820 Instruction Manual 3-4 IM-82-C[...]

Series 820 Instruction Manual Chapter 4 Maintenance & Repair IM-82-C 4-1 Chapter 4 Maintenance and Repair Top-Trak ™ transducers essentially require no scheduled maintenance other than periodic flow path cleaning if the gas is dirty. If an in-line filter is used, the filtering element should be periodically replaced or ultrasonically cleaned.[...]

Chapter 4 Maintenance & Repair Series 820 Instruction Manual 4-2 IM-82-C Flow Path Cleaning Model 822/824 Figure 4-1. Model 822/824 Flow Components Inlet and Outlet Screens 1. Remove the transducer from the system. 1. Remove inlet and outlet fittings. 2. Pull out the laminar flow element (LFE) holddowns. 3. Replace or clean the inlet and outlet[...]

Series 820 Instruction Manual Chapter 4 Maintenance & Repair IM-82-C 4-3 Laminar Flow Element The laminar flow element (LFE) is a precision flow divider which diverts a preset amount of flow through the sensor tube. The LFE is made of precision machined 316 stainless steel. The particular LFE used depends on the gas and flow range of the instru[...]

Chapter 4 Maintenance & Repair Series 820 Instruction Manual 4-4 IM-82-C Flow Path Cleaning Model 826/827 Laminar Flow Element The laminar flow element (LFE) is a precision flow divider which diverts a preset amount of flow through the sensor tube. The par- ticular LFE used depends on the gas and flow range of the instru- ment. To clean or insp[...]

Series 820 Instruction Manual Chapter 4 Maintenance & Repair IM-82-C 4-5 Flow Path Cleaning Model 822-S/824-S Laminar Flow Element The laminar flow element (LFE) is a precision flow divider which diverts a preset amount of flow through the sensor tube. The LFE is made of precision machined 316 stainless steel. The particular LFE used depends on[...]

Chapter 4 Maintenance & Repair Series 820 Instruction Manual 4-6 IM-82-C Figure 4-5. Medium Flow Transducer LFE Cleaning Medium Flow Transducers: In the medium flow body, the LFE assembly consists of the honey- comb laminar flow element, inlet screen, 0.63 inch long standoff, two ranging washers, 2-1⁄4 inch long 4-40 screw and 4-40 nut. Range[...]

Series 820 Instruction Manual Chapter 4 Maintenance & Repair IM-82-C 4-7 Figure 4-6. High Flow Transducer LFE Cleaning High Flow Transducers: The high flow LFE is similar to the honeycomb element used in the medium flow body but larger in diameter. The high flow body consists of four parts: inlet tube, inlet cap, main flow body and end cap. The[...]

Chapter 4 Maintenance & Repair Series 820 Instruction Manual 4-8 IM-82-C Sensor Cleaning and Inspection Due to sensor design variations, the following sensor cleaning in- structions are for Model 822-S/824-S only . All other transducer models must be returned to the factory. Sensor cleaning is accomplished by simply rodding out the sensor with [...]

Series 820 Instruction Manual Chapter 4 Maintenance & Repair IM-82-C 4-9 Transducer Calibration Calibration of Sierra’s flow meters requires a calibration standard of at least four times the accuracy of the transducer. Sierra’s Cal-Bench Automated Primary Calibration System is the preferred method of calibration and is used at the factory f[...]

Chapter 4 Maintenance & Repair Series 820 Instruction Manual 4-10 IM-82-C Step 4. Adjusting Linearity First gain access to the printed circuit board inside the enclosure: 1. For units with the digital display, carefully rotate the display un- til it hits the top plate. Slide the display’s two side panels up and remove. Move the display aside [...]

Series 820 Instruction Manual Chapter 4 Maintenance & Repair IM-82-C 4-11 Transducer Troubleshooting When you suspect that the transducer is not operating correctly, there are a few simple checks that can be made before taking the unit out of service: 1. Make certain that there are no leaks in the gas line. 2. Check that all cables are connecte[...]

Chapter 4 Maintenance & Repair Series 820 Instruction Manual 4-12 IM-82-C Returning Equipment to the Factory Factory Calibration—All Models Sierra Instruments maintains a fully-equipped calibration laboratory. All measuring and test equipment used in the calibration of Sierra transducers are traceable to NIST Standards. Sierra is ISO-9001 reg[...]

Series 820 Instruction Manual Chapter 4 Maintenance & Repair IM-82-C 4-13 RETURN ADDRESS: Sierra Instruments, Inc. Attention: Factory Service Center 5 Harris Court, Building L Monterey, CA 93940 USA CUSTOMER SERVICE AND SUPPORT INFORMATION: Email Technical Support: service@sierrainstruments.com Email Sales: sales@sierrainstruments.com FACTORY U[...]

Series 820 Instruction Manual Appendix A IM-82-C A-1 Appendix A Conversion Formulas and Gas Tables Conversion of Flow Rate to Other T and P Conditions The flow rate of your transducer is referenced to certain ÒstandardÓ conditions of temperature and pressure. Unless otherwise specified in your order, these standard conditions are 21 ° C (70 ° F[...]

Appendix A Series 820 Instruction Manual A-2 IM-82-C Calculating For a Single Gas The following tables provide K-factors and thermodynamic proper- ties of gases commonly used with mass flow meters and controllers. The purpose of these tables is two-fold: 1 . Calibrating an ÒactualÓ gas with a reference gas. This is particu- larly useful if the ac[...]

Series 820 Instruction Manual Appendix A IM-82-C A-3 Where: H = The constant amount of heat applied to the sensor tube, m = The mass flow rate of the gas (gm/min) ¥ C r = The coefficient of specific heat of the gas (Cal/gm); C r is given in the Table (at 0 ° C), D T = The temperature difference between the downstream and upstream coils, and N = A[...]

Appendix A Series 820 Instruction Manual A-4 IM-82-C For our purposes, we want the ratio of the flow rate, Q 1 , for an ac- tual gas to the flow rate of a reference gas, Q 2 , which will produce the same output voltage in a particular mass flow meter or controller. We get this by combining equations (1) and (5): Q 1 /Q 2 = K 1 /K 2 = (N 1 / r 1 C p[...]

Series 820 Instruction Manual Appendix A IM-82-C A-5 Calculating Dual Gas Mixtures Equation (6) is used for gas mixtures, but we must calculate N/ r C p for the mixture. The equivalent values of r , C p , and N for a dual gas mixture are given as follows: The equivalent gas density is: m ¥ r = ( / ) + ( / ) m ¥ 1T r 1 m ¥ 2 m ¥ T r 2 Where: ¥ [...]

Appendix A Series 820 Instruction Manual A-6 IM-82-C Gas Tables and K-factors Actual Gas Chemical Symbol K-factor Relative N2 Cp (Cal/g) Density (g/l) @ 0 ° C Elastomer O-ring* Acetylene C 2 H 2 .58 .4036 1.162 Ai r 1.00 .240 1.293 Allene (Propadiene) C 3 H 4 .4 3 .352 1.787 Ammonia NH 3 . 73 .492 .760 NEO Argon Ar 1.45 .1244 1.782 Arsine AsH 3 .6[...]

Series 820 Instruction Manual Appendix A IM-82-C A-7 Actual Gas Chemical Symbol K-factor Relative N2 Cp (Cal/g) Density (g/l) @ 0 ° C Elastomer O-ring* Dichloromethylsilane (CH 3 ) 2 SiCl 2 .25 .1882 5.758 Dichlorosilane SiH 2 Cl 2 .40 .150 4.506 Dichlorotetrafluoroethane (Freon-114) C 2 Cl 2 F 4 .22 .1604 7.626 1,1-Difluoroethylene (Freon-1132A) [...]

Appendix A Series 820 Instruction Manual A-8 IM-82-C Actual Gas Chemical Symbol K-factor Relative N2 Cp (Cal/g) Density (g/l) @ 0 ° C Elastomer O-ring* Methyl Mercaptan CH 3 S H .52 .2459 2.146 Methyl Trichlorosilane (C H 3 ) SiCl 3 .25 .164 6.669 Molybdenum Hexafluoride MoF 6 . 21 .1373 9.366 Monoethylamine C 2 H 5 NH 2 . 35 .387 2.011 Monomethyl[...]

Series 820 Instruction Manual Appendix B Specifications IM-82-C B-1 Appendix B Product Specifications Operating Specifications Gases Most gases; check compatibility with wetted materials; specify when ordering Mass Flow Rates Models 822/824: 0 to 10 sccm to 0 to 50 slpm; Models 826/827: 0 to 75 slpm to 0 to 175 slpm; Models 822-S/824-S: 0 to 10 scc[...]

Appendix B Specifications Series 820 Instruction Manual B-2 IM-82-C Performance Specifications Accuracy ±1.5% of full scale including linearity over 15 to 25°C and 5 to 60 psia (0.3 to 4 bara) Repeatability ±0.5% of full scale Temperature Coefficient 0.08% of full scale per °F (0.15% of full scale per °C), or better Pressure Coefficient 0.01% [...]

Series 820 Instruction Manual Appendix B Specificat i ons IM-82-C B-3[...]

Appendix B Specifications Series 820 Instruction Manual B-4 IM-82-C[...]