Agilent Technologies Agilent E5250A manuale d’uso

Agilent T echnologies Agilent E5250A Low Leakage Switch Mainframe User’ s Guide[...]

Notices © Agilent T e chnologies 1995 - 200 8 No part of this manu al may be r eproduced in any form or by any means (including elec- tronic storage and retrieval or translation into a foreign language) without p rior agree- ment and written consent from Agilent T echno logies, Inc. as governed by Unite d States and international copyright laws. M[...]

DECLARATION OF CONFORMITY According to ISO/IEC Guide 22 and CEN/CENELEC EN 45014 Manufacturer’s Name: Agilent Technologies International sarl Manufacturer’s Address: Supplier’s Address: Rue de la Gare 29 CH - 1110 Morges Switzerland Declares under sole responsibility that the product as originally delivered Product Name: Low Leakage Switch Ma[...]

• Herstellerbescheinigung GEÄUSCHEMISSION Lpa < 70 dB am Arbeitsplatz normaler Betrieb nach DIN 4 5635 T . 19 • Manufacturer’ s Declaration ACOUSTIC NOISE E MISSION Lpa < 70 dB operator position normal operation per ISO 77 79 NOTE This ISM device complies with Canadian ICES-001. Cet appar eil ISM est co nforme ?Hla norme NMB-001 du Can[...]

Safety S ummary The following gen eral safety precautions mus t be observed du ring all phases of operation, service, and repair of this instrument. Failure to comply with these precautions or with specific war nings else where in this manu al may impair the prot e ctio ns pr ovi ded by the equi pmen t. In addi tion , it vi ola t es sa fet y stan d[...]

• DO NOT SU BSTITUTE P ARTS OR MO DIFY INSTR UMENT Because of the danger of introducin g additional hazards, do not install su bstitute parts or perform an y unauthorized modification to the instrument. Return the instrument to a Agilent T echnologies Sa les and Service Off ice for services and repair to ensure th at safety features are maintaine[...]

Safety S ymbols The g ener al d e fini t ion s of s a fet y s ymb ols us ed o n equ ipme nt or in ma nu a ls ar e listed below . Instruction manual symbo l: the product will be marked with this s ymbol when it is necessary for the user to refer to the instruction manual in order to pro tect against damage to the instrument. Indicates dangerous vol [...]

In This Manual This manual is a user’s guide for Agilent E5250A, and consists of the following chapters: • Intro duc tion Provides an overview of the E5250A Low Leakage Switch Mainframe, E5252A 10 × 12 Matrix Sw itch, and E 5255A 24 (8 × 3) Channel Multiplexer . • Installation Describes requirements to install the E5250A and tasks for inst [...]

• Specifications Lists specifications, typical d ata, supplem ental data, and reference data for the E5250A , E5252A, and E5255A. • Error Messages Lists a nd des c ribes the er ror m e ssages f or the E525 0A. • SCPI C ommand Su mmary This is a quick ref erence for the SCPI sub system commands available for the E5250A . T ext C o nven t ions [...]

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Contents Agilent E525 0A User ’ s G uide, Editio n 9 Contents - 1 1. Intr oduction Agilent E5250A Prod uct Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3 Front Panel T our . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4 Rear Panel T our . . . . . . . . . . . [...]

Contents - 2 Agilent E5250 A User ’s Guide, Ed ition 9 Contents Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18 Performance V erification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18 Cleaning . . . . . . . . . . . . . . . . . . . . [...]

Contents Agilent E525 0A User ’ s G uide, Editio n 9 Contents - 3 T o Connect the E5252A Outp ut . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20 T o Connect the E5255A Outp ut . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-22 Measurement Cab le Length . . . . . . . . . . . . . . . . . . . . . . [...]

Contents - 4 Agilent E5250 A User ’s Guide, Ed ition 9 Contents Controlling E5250 A by Using HP BASIC . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5 Creating a Co ntrol Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6 Defining Channel Co nfiguration Mode . . . . . . . . . . . . . . . . . .[...]

Contents Agilent E525 0A User ’ s G uide, Editio n 9 Contents - 5 Status Reporting S tructure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-48 Status Reporting S tructure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-48 Status Byte Register . . . . . . . . . . . . . . . . .[...]

Contents - 6 Agilent E5250 A User ’s Guide, Ed ition 9 Contents 12. SCPI Comma nd Summa ry[...]

1 Intr oduction[...]

1- 2 Agilent E 5250A User ’ s G uide, Ed ition 9 Introductio n This chapter gi ves an overview of Agilen t E5250A, E5252A, and E5255A. • “Agilen t E5250A P roduct Des cription” • “Agilen t E5252A P roduct Des cription” • “Agilen t E5255A P roduct Des cription” • “Options and Accessories”[...]

Agilent E5250A Us er ’s Guide, Edition 9 1- 3 Introductio n Agilent E5250A Pro duct Desc ript ion Agilent E5250A Product Description Agilent E 5250A Low Leakage Switch Main frame is a compu ter- controlle d switching matrix main frame designed for semiconductor dc char acteristics measurement ap plications. The E5250A h as four slots f or install[...]

1- 4 Agilent E 5250A User ’ s G uide, Ed ition 9 Introductio n Agilent E5250A Produc t Descr iption Front Panel T our The E5250A h as 2 hard k eys and 4 LED i ndicators o n the front panel as shown in Figur e 1-1. LINE k e y Used to turn the E5250A on or o ff. Line LE D T urns on when the E52 50A is turned on. Local/Self T est key If "Remote[...]

Agilent E5250A Us er ’s Guide, Edition 9 1- 5 Introductio n Agilent E5250A Pro duct Desc ript ion AUX INPUT AUX INPUT connectors are for C-V measurements, pulse input, and so on. The E5250A has 4 AUX INPUT ports: HF1, HF2, CV1, CV2. These are BNC type connectors. The AUX INPUT conn ectors are used only with the E 5252A and are not u sed with the [...]

1- 6 Agilent E 5250A User ’ s G uide, Ed ition 9 Introductio n Agilent E5252A Produc t Descr iption Agilent E5252A Product Description The E5252A 1 0 × 12 Matrix Switch is a 10-input to 12-output switch ing matrix card for the E5250A. The E5 252A is desi gned for se miconducto r dc parametr ic measurement applications that need to switch some in[...]

Agilent E5250A Us er ’s Guide, Edition 9 1- 7 Introductio n Agilent E5252A Pro duct Desc ript ion Input P ort s The E5252A has 10 in put ports via the E52 50A. Input paths for SMU1 and SMU2 are desig ned for low current measurement. There are actually only six inp ut paths, so two of the input paths are shared by th ree ports each as follo ws: ?[...]

1- 8 Agilent E 5250A User ’ s G uide, Ed ition 9 Introductio n Agilent E5255A Produc t Descr iption Agilent E5255A Product Description The E5255A 2 4 (8 × 3) Channel Multiplexer is a 2-input to 24-output multiplexer card for t he E525 0A. The E5 255A cons ists of 3 blocks ( three 2 × 8 m ultiplexers). So, one E5255 A can be configur ed as a 2 ?[...]

Agilent E5250A Us er ’s Guide, Edition 9 1- 9 Introductio n Agilent E5255A Pro duct Desc ript ion Resi stors Resistors con nected between BIAS path an d IV path are for protecting D UT from el ectrical damage. Wh en shipped f rom factory , 0 Ω resistance is used in the E 5255A. Y ou can easily replace with desired res istors. R efer to Chapter 2[...]

1- 10 Agilent E5250 A User ’s Guide, Edit ion 9 Introductio n Agilent E5255A Produc t Descr iption Figur e 1-5 E525 5A Block Diagram BI AS I n p ut 1 Out pu t Re s i st or IV Inp u t 1 BL OCK 1 1 2 34 56 7 8 BI AS I np ut 3 Out put Re s i st or IV In p u t 3 BLO C K 3 17 18 19 20 21 22 23 24 BI AS I n p ut 2 Out pu t Re s i st or IV Inp u t 2 BL [...]

Agilent E5250A Us er ’s Guide, Edition 9 1- 1 1 Introductio n Agilent E5255A Pro duct Desc ript ion T able 1-2 E5 255A Input /Output Conn ectors Figur e 1-6 E5255A B IAS INPUT Con nectors and OU TPUT Connectors W ARNING Do not touch the force and guard terminals of the OUTPUT connectors while the E5250A i s turned on. Danger ous voltages up to th[...]

1- 12 Agilent E5250 A User ’s Guide, Edit ion 9 Introductio n Options an d Acces sories Options and Accessories This section list s the options and accessories available for the E5 250A. T able 1-3 lists the options available for th e E5250A. T able 1 -3 Opti ons Model Number Optio n Item Desc r ip t i o n E5250A Low Leakage Switch Mainframe E525[...]

Agilent E5250A Us er ’s Guide, Edition 9 1- 1 3 Introductio n Opti ons and Ac cessor ies T able 1-4 lists accessories fu rnished with the E5250 A, E5252A, and E5255A. T able 1-4 Furnished Accessories Model Number Part Number Description Qty . E5250A E5250-900 00 Agilen t E5250A Us er's Guide 1 E525 0- 1700 1 E5250A VXI Plug& Play Driver [...]

1- 14 Agilent E5250 A User ’s Guide, Edit ion 9 Introductio n Options an d Acces sories Contents o f the E5250A Program Disk: Vi r t ua l F r o n t Panel Utility In teractive control program for the E5250A. Runs on Agilent 4155/4156's built-in IBASIC controller . Refer to Chapter 5. VFP Data Upload Librar y Subprogram l ibrary used for up lo[...]

Agilent E5250A Us er ’s Guide, Edition 9 1- 1 5 Introductio n Opti ons and Ac cessor ies T able 1-5 lists accessories available for the E5250A. T able 1-5 A vailable Acces sories Model Number Option Item Descript ion E5252A 10 × 12 M a tr ix Switc h E5255A 24 (8 × 3) Channel Multiplexe r 16494A T riaxial Cable 16494A-0 01 1.5 m leng th 16494A-0[...]

1- 16 Agilent E5250 A User ’s Guide, Edit ion 9 Introductio n Options an d Acces sories[...]

2 Installatio n[...]

2- 2 Agilent E 5250A User ’ s G uide, Ed ition 9 Installation This chapter describes requirements to install Agilent E5250A and the tasks for installation, and is organized into the following three sections: • “T o Inspect the E525 0A and Accesso ries ” describes how to inspect the E5250A when you rec eive it. • “Requir ements” explai[...]

Agilent E5250A Us er ’s Guide, Edition 9 2- 3 Installatio n T o Ins pect the E 5250A an d Accesso ries T o Inspect the E5250A and A ccessories When you receive an d open the box that contains the E525 0A, check the following : • Before unp acking any comp onents, inspect all box es for any signs of damage that might h ave occurred during sh ipm[...]

2- 4 Agilent E 5250A User ’ s G uide, Ed ition 9 Installation Requirem ents Requir ements This secti on describes the followi ng requir ements for the E5 250A. • “Power Requirements” •“ P o w e r C a b l e ” • “Operating En vironment” • “St orage and Shi pping Envi ronment ” Power Requir ements CAUTION Before app lyi ng ac[...]

Agilent E5250A Us er ’s Guide, Edition 9 2- 5 Installatio n Requirem ents • Plug : BS 1363/A, 250 V , 10 A • Cabl e : 8120-4 420, 8120- 1351 • Plug: AS 3112, 250 V , 10 A • Cabl e : 8120- 4 41 9, 8120- 1369 • Plug: CEE 7 sh eet VII, 250 V , 10 A • Cable: 81 20- 45 19, 8120-1 689 • Plug: NEMA 5-15P , 125 V , 10 A • Cable : 8120-6 8[...]

2- 6 Agilent E 5250A User ’ s G uide, Ed ition 9 Installation Requirem ents W ARNING For protection fr om electrical shock, the power cable gr ound must not be defeated. Operating En vir onment The E5250A m ust be operated within the f ollowing enviro nmental cond itions: • T emperature: 5 ° C to 40 ° C (41 ° F to 104 ° F) • Humidi ty: 5 [...]

Agilent E5250A Us er ’s Guide, Edition 9 2- 7 Installatio n Installing the E52 50A Installing the E5250A This section describes ho w to instal l the E5250A. • “T o Install Plug-in Card” • “T o Install Blank Panel” • “T o C onfi gure E52 5 5A” • “E5255 A Configurat ion Example s” • “T o Set GPIB Address” • “T o Co[...]

2- 8 Agilent E 5250A User ’ s G uide, Ed ition 9 Installation Installing t he E5250A T o Install Plu g-in Card The E5252As and E5255As are plug-i n cards (modules ). Y ou install thes e cards in card slots 1 to 4 of the E5250 A. The following procedur e explains the card installation and removal: 1. T urn off the E5 250A, then w ait at least 10 s[...]

Agilent E5250A Us er ’s Guide, Edition 9 2- 9 Installatio n Installing the E52 50A Figur e 2-1 Module E xtractor an d Location of the Scr ew Hole T o Install Blank Panel CAUTION T o prevent thermal damage to the E52 50A cards, be s ure that blan k panels (Agi lent part nu mber E5250-6 0003) are ins talled in all u nused slots. If the blank panel [...]

2- 10 Agilent E5250 A User ’s Guide, Edit ion 9 Installation Installing t he E5250A T o Configure E5255A The Agilent E5255A has three 2-input 8- output mu ltiplexers. Y ou can conf igure several multiplexers b y modifying some internal co nnections. Compone nt locations on the E 5255A are sho wn in Fig ure 2-2, and the relationshi p of the mu lti[...]

Agilent E5250A Us er ’s Guide, Edition 9 2- 1 1 Installatio n Installing the E52 50A Figur e 2-2 Agilen t E5255A C omponent Lo cations T o M odify B IAS In put Each multiplexer block has an independent BIAS input. Y ou can change the BIAS input internally using the BIASin/BIASou t termin als shown in Figure 2-2, or externally using the BIAS INPUT[...]

2- 12 Agilent E5250 A User ’s Guide, Edit ion 9 Installation Installing t he E5250A For example, if a m ainframe installs four E5255As which the IV in1 cable is connected to the SMU1 input connector and the IV in2 and IV in3 cables are not connected, the E5250A configures a 32-output multiplexer that uses the SMU INPUT 1 connector as the IV input[...]

Agilent E5250A Us er ’s Guide, Edition 9 2- 1 3 Installatio n Installing the E52 50A E5255A Co nfiguration Examples The following exa mple configurations are described: • “24-output multiplexer (3-BIAS inputs, 1-IV i nput, 1 module)” • “24-output multiplexer (1-BIAS input, 1-IV input, 1 module)” • “96-output multiplexer (1-BIAS in[...]

2- 14 Agilent E5250 A User ’s Guide, Edit ion 9 Installation Installing t he E5250A 4. Set bit 1 to ON (1) and bit 2 thru 4 to OFF (0) for DIP SW1 to SW3. 5. Install the module into the slot 1 of the mainframe. For installing module, see “T o Install Plu g-in Card” on page 2-8. 24-output multiplexer (1-BIAS input, 1-IV input, 1 module) T o ma[...]

Agilent E5250A Us er ’s Guide, Edition 9 2- 1 5 Installatio n Installing the E52 50A 5. Connect wires bet ween BIASo ut1 and BIAS in2, also bet ween BIAS out 2 and BIASin3 . 6. Install the module into the slot 1 of the mainframe. For installing module, see “T o Install Plu g-in Card” on page 2-8. 7. Connect BN C open caps to B IAS INPUT 52 an[...]

2- 16 Agilent E5250 A User ’s Guide, Edit ion 9 Installation Installing t he E5250A 96-output multiplexer (1-BIAS input, 1-IV input, 4 modules) T o make this mul tiplexer , you need fo ur E5255As, eight wires (furn ished), fi ve BNC open caps (furnished), and three BN C cables. The example u ses the SMU INPUT 1 connector as the IV input, and uses[...]

Agilent E5250A Us er ’s Guide, Edition 9 2- 1 7 Installatio n Installing the E52 50A T o Set GPIB Address Every devi ce on the GPIB bu s must have a unique addres s. If you ne ed to change the GPIB address of t he E5250A, make sure the E525 0A is turned off. W ith a small flatblade screwdriver, set the GPIB ADDRESS switch on the rear panel to th [...]

2- 18 Agilent E5250 A User ’s Guide, Edit ion 9 Installation Maintenan ce Maintenance Maintenance s hould be perf ormed peri odically to keep the E5250A in good condition. Perfor mance V erificati on Performan ce verification mu st be perf ormed periodi cally so that the instrument s satisfy the specifications, and keep a good condition. It is re[...]

3 Executing Self-T est and Leak T e st[...]

3- 2 Agilent E 5250A User ’ s G uide, Ed ition 9 Executi ng Se lf-T est and Le ak T e st This chapter descr ibes how to execute the Self-T est and the Leak T es t. The Self-T est consists o f three tests that check the op eration of Agilent E52 50A firmware, LEDs, an d key that are on the E5 250A front panel, and the relays on the cards instal le[...]

Agilent E5250A Us er ’s Guide, Edition 9 3- 3 Execu ting S elf-T es t and L eak T est Exec utin g Self -T est Executing Sel f-T est The Self-T est of the E5250A consists of the following three tests: T able 3-1 E5250A Self-T est Items T est Item D escription Executed by R efer to Contr oller Te s t Checks the operation of the E 5 250 A fi rmw are[...]

3- 4 Agilent E 5250A User ’ s G uide, Ed ition 9 Executi ng Se lf-T est and Le ak T e st Executi ng Se lf-T est T o Execute Self-T est (S tandalone) Control ler T est is executed au tomatically when yo u turn on t he E5250A. Y ou execute the Relay T est by press ing the Local/Self T est key on th e E5250A fron t pane l. Exec uting th e Contr olle[...]

Agilent E5250A Us er ’s Guide, Edition 9 3- 5 Execu ting S elf-T es t and L eak T est Exec utin g Self -T est NOTE If Fail LED is ON after Relay T est After executing the relay test, if the Fail LED turns on, the cause is one of the following: • The Relay T est Adapter is not conn ected or a cable is still connected to input connector . • Out[...]

3- 6 Agilent E 5250A User ’ s G uide, Ed ition 9 Executi ng Se lf-T est and Le ak T e st Executi ng Se lf-T est T o Execute Self-T est using External Contr oller Y ou can execute Self-T est from an ex ternal controller by u sing SCPI comman ds in a progr am. This section describes the requirements, SCPI commands , and a sample program for Self-T [...]

Agilent E5250A Us er ’s Guide, Edition 9 3- 7 Execu ting S elf-T es t and L eak T est Exec utin g Self -T est T able 3-2 SCPI Commands for Self-T est NOTE Front Pa nel Interface T est After the :DIAG:TEST :FRAM:EXEC? FP AN command is executed, the Remote, System Fai l, Fail, and L ocal/Self T est LEDs on the E5250A fro nt panel bli nk for about 1[...]

3- 8 Agilent E 5250A User ’ s G uide, Ed ition 9 Executi ng Se lf-T est and Le ak T e st Executi ng Se lf-T est Self-T est Programming Example This sample program is effective for an E5250 A that has four cards installed. If your E5250A does not have fo ur cards ins talled, delete t he Relay T est progr am lines for the empty card slots. The prog[...]

Agilent E5250A Us er ’s Guide, Edition 9 3- 9 Execu ting S elf-T es t and L eak T est Exec utin g Self -T est 430 ENTE R @H p525 0;A 440 IF A=0 TH EN GOTO 470 450 DISP "C ard 3 failed. Pr ess Cont inue to te st Card 4" 460 GOTO 480 470 DISP "C ard 3 passed. Pr ess Cont inue to te st Card 4" 480 PAUS E 490 O UTPUT @Hp525 0;&quo[...]

3- 10 Agilent E5250 A User ’s Guide, Edit ion 9 Executi ng Se lf-T est and Le ak T e st Usin g the S elf-T est Util ity Using the Self-T est U tility The Self-T est Utilit y is a Self-T est program for the E5250A, and runs on the Agilent 4155/4156's built-in IB ASIC con troller . Self-T est Uti lity can execute all Self-T es t items listed i[...]

Agilent E5250A Us er ’s Guide, Edition 9 3- 1 1 Execu ting S elf-T es t and L eak T est Using th e Self-T est Ut ility T o S tart the Self-T est Utility 1. Before tur ning on the 415 5/ 41 56 and E5250 A, conn ect the GPIB cabl e betw een the E525 0A and the 415 5/4156. 2. T urn on the 415 5/4156 and E 5250A. 3. Set the 4155/415 6 to "SYSTEM[...]

3- 12 Agilent E5250 A User ’s Guide, Edit ion 9 Executi ng Se lf-T est and Le ak T e st Usin g the S elf-T est Util ity T o Execute Self-T est On the MAIN MENU of the E5250A Self-T est Utility , select the SELF TEST softke y to displ ay the E5250A SELF TEST MENU and followin g softkeys: Also, the most recent Self- T es t result (P/F/N ) is displa[...]

Agilent E5250A Us er ’s Guide, Edition 9 3- 1 3 Execu ting S elf-T es t and L eak T est Using th e Self-T est Ut ility Exec uting th e Contr oller T est T o execute the controller test, pre ss the CONTROLLER so ftkey . If [F] result is displayed after the test, the E5250A is defective. Contact your nearest Agilent T echnologies Service Center . E[...]

3- 14 Agilent E5250 A User ’s Guide, Edit ion 9 Executi ng Se lf-T est and Le ak T e st Usin g the S elf-T est Util ity Executing the Relay T est T o execute the Relay T est, do the following: 1. Press the CARDn R ELA Y softkey ( n =1 to 4). The following message is display ed on the 4155 /4156 sc reen depending on card: • Message fo r the E525[...]

Agilent E5250A Us er ’s Guide, Edition 9 3- 1 5 Execu ting S elf-T es t and L eak T est Using th e Self-T est Ut ility T o Execute Leak T est NOTE Leak T est is for checking leakage current of the E5250A with plug- in cards installed. If leak test result is too large for your application, contact nearest Agilent T echnologies Service Center . Lea[...]

3- 16 Agilent E5250 A User ’s Guide, Edit ion 9 Executi ng Se lf-T est and Le ak T e st Usin g the S elf-T est Util ity T o execute the Leak T e st, do the following: 1. On MAIN MENU of the E5250A Self-T est Utility , select LEAK TEST softkey . The follo wing message is displayed: Input Ag il en t 41 55 /4 15 6 GP IB add re ss (de fa ul t 81 7) :[...]

Agilent E5250A Us er ’s Guide, Edition 9 3- 1 7 Execu ting S elf-T es t and L eak T est Using th e Self-T est Ut ility 4. Select des ired IVn softk ey ( n =1 to 6) f o r input port you want to test. If the E5252A is installed in your E5250A, and the 4 156 is used for the Relay T est, th en wh en you pr ess I V 1, IV 3 , or I V5 s of tke y , the f[...]

3- 18 Agilent E5250 A User ’s Guide, Edit ion 9 Executi ng Se lf-T est and Le ak T e st Usin g the S elf-T est Util ity 5. Sel ect th e des ired SM Um s oftk e y ( m =1 to 6). Foll owing message is displayed dependi ng on the connect ion type: • Message for Kelvin co nnection: Discon nect Kel vin ca ble from IVn t ermi nal. And di scon nect all[...]

Agilent E5250A Us er ’s Guide, Edition 9 3- 1 9 Execu ting S elf-T es t and L eak T est Using th e Self-T est Ut ility 8. Connect the cable from the 4155/415 6 SMU port specified by the SMUm softke y ( m =1 to 6) in step 5 to th e E5250A in put port specified by the IVn softke y ( n =1 to 6) in step 4. • Use Kelvin triaxial cable for Kelvin con[...]

3- 20 Agilent E5250 A User ’s Guide, Edit ion 9 Executi ng Se lf-T est and Le ak T e st Usin g the S elf-T est Util ity[...]

4 Setting up Measur e ment Envir onment[...]

4- 2 Agilent E 5250A User ’ s G uide, Ed ition 9 Sett ing up Measu remen t Enviro nment This chapter explains how to connect your instruments to Agilent E5250A input, and how t o connect the E52 50A output to your wafe r prober or test fixture. Y ou can connect the E525 0A output ( E5252A or E5255A) to yo ur prober o r fixture in the f ollo wing [...]

Agilent E5250A Us er ’s Guide, Edition 9 4- 3 Setting u p Measur ement Env ironmen t Connecto r Plates Connector Plates A connector plate is the inter face to connect the E52 50A to your p rober or test fixture. The fo llowing connector plates are available for the E525 0A. T o install the connector pl ate, refer to Agilent 16495 Installation Gui[...]

4- 4 Agilent E 5250A User ’ s G uide, Ed ition 9 Sett ing up Measu remen t Enviro nment Connector P lates Blank Plate 16495E Half size blank plate. This plate is us ed to cover o penings when you made too big openings for mounting the connector plate. Y ou will use this plate to cover op enings if you mou nt the half size connector plate in openi[...]

Agilent E5250A Us er ’s Guide, Edition 9 4- 5 Setting u p Measur ement Env ironmen t Conn ecting 8- Channe l Shield ed Coax ial Ca ble Connecting 8-Channel Shielded C oaxial Cab le This secti on introduces Agilent 16494 E wide temperat ure 8-channel s hielded coaxial cable, and ex plains how to connect the 16494E to the Devic e Under T est (DUT).[...]

4- 6 Agilent E 5250A User ’ s G uide, Ed ition 9 Sett ing up Measu remen t Enviro nment Mounting Conn ec tors Dir ectl y Mounting Connectors Dir ectly Previous sections descr ibed the informatio n to use the av ailable accessories, also the 16495 Ins tal l ation Gu i de provides the information how to install connector plates on th e shielding b [...]

Agilent E5250A Us er ’s Guide, Edition 9 4- 7 Setting u p Measur ement Env ironmen t Mounting Co nnecto rs Direc tly T able 4-1 Recommended Parts T able 4-2 Dimensions of Connector Holes Usage Agilent Part No. Description Maki ng i n terl ock circuit 1252- 1419C Interlock Connector (6 pin, female ) 3101- 0302 or 3101- 3241 Switch 1450-064 1 LED ([...]

4- 8 Agilent E 5250A User ’ s G uide, Ed ition 9 Sett ing up Measu remen t Enviro nment Mounting Conn ec tors Dir ectl y T o Make Interlock Circu it The interlock circuit is to prevent el ectric shock when touching measure ment terminals. Y ou must install an int erl ock circu it on sh ield ing box to prev ent dang erou s voltages when door o f t[...]

Agilent E5250A Us er ’s Guide, Edition 9 4- 9 Setting u p Measur ement Env ironmen t Mounting Co nnecto rs Direc tly Figur e 4-3 Dimens ions of In terlock Swit ch (Agilent part number 3101-03 02) Figur e 4-4 Dimens ions of In terlock Swit ch (Agilent part number 3101-32 41)[...]

4- 10 Agilent E5250 A User ’s Guide, Edit ion 9 Sett ing up Measu remen t Enviro nment Mounting Conn ec tors Dir ectl y T o Install LED Cir cuit The 4155/41 56 semicondu ctor parameter analyzer's I ntlk connector pr ovides the interloc k signal and a LED drive sig nal. If a LED is con nected between pin 4 and p i n 5 (or 6) o f the interl oc[...]

Agilent E5250A Us er ’s Guide, Edition 9 4- 1 1 Setting u p Measur ement Env ironmen t Mounting Co nnecto rs Direc tly T o Conn ect Inte rlock Circuit to Instrument Before beginning the measurement, connect the interlock circuit to the interlock connector of the instrument as follows . • For Agi lent 4155/4 156 semicond uctor parameter analyzer[...]

4- 12 Agilent E5250 A User ’s Guide, Edit ion 9 Sett ing up Measu remen t Enviro nment Mounting Conn ec tors Dir ectl y NOTE T o Check Interlock Circuit If you u se the 4155/41 56, you can easily check th e interlock ci rcuit as follo ws: 1. Connect t he Intlk connector of the 4155/ 4156 to y our interlock circuit. 2. Pr ess S ystem front-panel k[...]

Agilent E5250A Us er ’s Guide, Edition 9 4- 1 3 Setting u p Measur ement Env ironmen t Mounting Co nnecto rs Direc tly T o Connect Connectors to DUT Following figure shows a connection ex ample fr om the connector to DUT . Use low-nois e coaxial cabl e (Agilent part number: 812 1-1 191). CAUTION Never connect the guard terminal to any ou tput, in[...]

4- 14 Agilent E5250 A User ’s Guide, Edit ion 9 Sett ing up Measu remen t Enviro nment Mounting Conn ec tors Dir ectl y For highly accur ate current forcing and m easurements while m inimizing leakage, surroun d all force and sense lines fr om SMU by a guard as far as po ssible, and make cables st able by taping . For reducing cap acitance measur[...]

Agilent E5250A Us er ’s Guide, Edition 9 4- 1 5 Setting u p Measur ement Env ironmen t Connectin g the E 5250A Inpu t Connecting the E5250A Input This secti on explains how to connect i nstruments to the E5250A . • “T o Connect Instruments to Inpu t Connectors” • “T o Connect Bias Source to the E5255A Bias Inp ut” • “T o Connect G[...]

4- 16 Agilent E5250 A User ’s Guide, Edit ion 9 Sett ing up Measu remen t Enviro nment Connectin g the E 5250A Inpu t T able 4-3 E5 2 50A Input Co nnections Application Inst rumen t E5250A Input Connector Cable Required Agilent Model No . Outpu t Connector DC Measurement 4155 MPSMU SMU1 to 6 16494A-0 03 T riaxial cable VSU A UX1 to 4 BNC cabl e V[...]

Agilent E5250A Us er ’s Guide, Edition 9 4- 1 7 Setting u p Measur ement Env ironmen t Connectin g the E 5250A Inpu t In the table abov e, • AUX means CV1, CV2, HF1, or HF2 connector . • The E5250A does not have input conn ectors for the in terlock. Con nect directly from in strument to the connector plat e which has an i nterlock c onnector [...]

4- 18 Agilent E5250 A User ’s Guide, Edit ion 9 Sett ing up Measu remen t Enviro nment Connectin g the E 5250A Inpu t T o Connect Bias Source to the E5255A Bias Input The E5255A BIAS INPUT con nector is a BNC-type connecto r . Use BNC cable to conn ect the bias source to th e BIAS INPUT of the E5255A. If output terminal of the bias sour ce is a b[...]

Agilent E5250A Us er ’s Guide, Edition 9 4- 1 9 Setting u p Measur ement Env ironmen t Connectin g the E 5250A Inpu t Figu re 4-7 Connec tio n of T r iax -Dua l T riax A d ap te r By this connection, in p ut signal for SMU INPUT connectors is as follo ws: If you mak e non-Kelvi n connecti on for the E52 50A output s, use the od d input port only [...]

4- 20 Agilent E5250 A User ’s Guide, Edit ion 9 Sett ing up Measu remen t Enviro nment Connectin g the E 5250A Ou tput Connecting the E5250A Output This secti on des cri bes h ow t o conn ect the E525 2A an d E 525 5A o utput to co nnector plate, you r test fixt ure, and so on. • “T o Connect the E525 2A Output” • “T o Connect the E525 [...]

Agilent E5250A Us er ’s Guide, Edition 9 4- 2 1 Setting u p Measur ement Env ironmen t Connecti ng the E52 50A Outpu t For Kelvin connection, use Kelvin triaxial cable liste d in T able 4-4. T o make a Kelvin ou t put port (1, 3, 5 , 7 , 9 an d 1 1), coupl e t wo E 5252A output po rts as follow s: Figure 4- 9 shows the 1 6494B Kel vin triaxial ca[...]

4- 22 Agilent E5250 A User ’s Guide, Edit ion 9 Sett ing up Measu remen t Enviro nment Connectin g the E 5250A Ou tput T o Connect the E5 255A Output The E5255A output conn ector is show n in Figur e 4-10. The E5 250A SMU I NPUT signal or the E5255A BIAS INPU T sign al appears at the E5255A output connector as shown in Figure 4-1 0 when inp ut-ou[...]

Agilent E5250A Us er ’s Guide, Edition 9 4- 2 3 Setting u p Measur ement Env ironmen t Measur em ent Cable Lengt h Measur ement Cable Length This section describes how to calculate the tota l guard capacitance when using a Source Moni tor Unit (SMU), such as in Ag ilent 4155/41 56 Semico nductor Parameter Analyzer , Agilent 4142B Mo dul ar DC Sou[...]

4- 24 Agilent E5250 A User ’s Guide, Edit ion 9 Sett ing up Measu remen t Enviro nment Measuremen t Cable Length T able 4-6 Guard Capacitances of E52 50A M easur ement Enviro nment (T ypical) Connection Agilent Model/Part No. Cabl e Lengt h Guard Capacitance from SMU to E5250A 1 6494A-003 ( for non-Kelvin) 80 cm 75 pF 16494B- 003 (for K elvin) 80[...]

5 Contr olling the E5250A[...]

5- 2 Agilent E 5250A User ’ s G uide, Ed ition 9 Controll ing the E5250 A This chapter explains how to control Agilent E5250A. • “Methods for Controlling the E5250A” introduces several methods for controlling the E5250A. • “Switch Cont ro l Basi cs” intr odu ces bas ic infor mati on for contro l lin g the relay switches on the E5252A [...]

Agilent E5250A Us er ’s Guide, Edition 9 5- 3 Control ling the E52 50A Methods fo r Control ling the E5250A Methods fo r Contr olling the E 5250A This section introduces several methods for controlling the E5250A. T able 5-1 lists the E5250A co ntrol methods, and th e operating systems on which each control method c an be used. T able 5-1 Summary[...]

5- 4 Agilent E 5250A User ’ s G uide, Ed ition 9 Controll ing the E5250 A Method s for Cont roll ing the E5 250A VFP Data Upload Library This subp r ogr a m li br ary i s us ed to c onv ert the control data created by the V irtual Front Panel (VFP) Utility to data that can be used with your program runs on HP BASIC. T o use this library , link it[...]

Agilent E5250A Us er ’s Guide, Edition 9 5- 5 Control ling the E52 50A Switch Con trol Basics Switch Control Basics This section introduces basic information for controlling the relay switches on the E5252A and the E5255 A. • “Channel List and Ch an nel Configuration ” • “Connect ion Rule” • “Connection Sequ ence” •“ B i a s[...]

5- 6 Agilent E 5250A User ’ s G uide, Ed ition 9 Controll ing the E5250 A Switch Control B asics Channel List and Channel Configuration Some SCPI comm ands require the channel _list parameter , which determines the relays to close/open in the E5252A or the E5255 A to conn ect/disconnect the d esired channels. The following f igure show s the basi[...]

Agilent E5250A Us er ’s Guide, Edition 9 5- 7 Control ling the E52 50A Switch Con trol Basics T able 5-2 Card Number In the chann el_list , you can specify mu ltiple channels by using comma (,) or co lon (:) as follows : Comma: use between each specified cha nnel as in following examples: • (@10101,10102,10103) means 1 0101, 1010 2 and 1010 3. [...]

5- 8 Agilent E 5250A User ’ s G uide, Ed ition 9 Controll ing the E5250 A Switch Control B asics Channel Configu ration The E5250A al lows the fol lowing two chan nel configurat ion mode s. The way to specify the channel _list depen ds on the channe l configur ation mode. Y ou can set the channel confi gu rati on b y us ing th e [:RO UT] :FU NC c[...]

Agilent E5250A Us er ’s Guide, Edition 9 5- 9 Control ling the E52 50A Switch Con trol Basics Connection Rule Connection rule is used to specify if an input or output port can have multiple connections, and i t is specified by th e [:ROUT e]:CONNection:RULE command described in Chapter 7. For each card installed in the E5250A (fo r auto configura[...]

5- 10 Agilent E5250 A User ’s Guide, Edit ion 9 Controll ing the E5250 A Switch Control B asics Connection Sequence NOTE This is only for cards that are set to the Single Route connection rule. Refer to “Connection R ule” on page 5 -9. Connection se quence specifies the open/close sequ ence of the relays when changi ng from an exis ting conne[...]

Agilent E5250A Us er ’s Guide, Edition 9 5- 1 1 Control ling the E52 50A Switch Con trol Basics Bias Mode NOTE Connection r ule cannot be specified fo r the input Bias Po rt, which can always be connected to multiple output po rts. Connection sequ ence (to connect input Bias Port to output ports) is always Break-Before-Mak e. Bias Por t and Coupl[...]

5- 12 Agilent E5250 A User ’s Guide, Edit ion 9 Controll ing the E5250 A Switch Control B asics Figur e 5-2 Examp le of Bias Mode Figure 5-2 s hows an example. Input port 2 is the input Bias Port. When th e Bias Mode is turned ON, all bias enabled out put port s (that are no t connected to other input ports) are conn ected to the input Bi as Port[...]

Agilent E5250A Us er ’s Guide, Edition 9 5- 1 3 Control ling the E52 50A Switch Con trol Basics Couple Port NOTE This function is available only for the E5252A. Bias Por t and Couple P ort cannot be s et to the same port number . This function is used for making Kelvin connections. Couple port allows synchronized co nnection of two adjacent in pu[...]

5- 14 Agilent E5250 A User ’s Guide, Edit ion 9 Controll ing the E5250 A Switch Control B asics The two output p orts are determined by the channel_list parameter o f the :ROUT:CLOS command, a nd the lower outpu t port number i s always od d. So, when you execute :ROUT:CLOS or :ROUT:OPEN command for the couple port, four relays operate synchron o[...]

Agilent E5250A Us er ’s Guide, Edition 9 5- 1 5 Control ling the E52 50A Switch Con trol Basics E5252A Channel Li st This secti on describes how to def ine the channel_list specifically for the E5252A. For the basic s yntax of the channel _list , see “Ch annel List and Ch annel Config uration” on page 5-6. Normal C onfiguration Mode T o speci[...]

5- 16 Agilent E5250 A User ’s Guide, Edit ion 9 Controll ing the E5250 A Switch Control B asics Figur e 5-4 E5252A C hannel Num ber in Normal Co nfig. Mode Input Por t No. Output P ort (Outp ut Port N o.) 0201 0202 0203 0204 0205 0206 0207 0208 0209 0210 021 1 0212 0101 0102 0103 0104 0105 0106 0107 0108 0109 01 10 0 111 01 12 01 12 11 10 09 08 0[...]

Agilent E5250A Us er ’s Guide, Edition 9 5- 1 7 Control ling the E52 50A Switch Con trol Basics Auto Conf igurat ion Mod e T o use this mod e, the E5252 A must be installed in the E5250 A slots co ntinuous ly from sl ot1 (slo ts 1,2; o r slots 1 ,2,3; or slots 1, 2,3,4). T o specify a chann el, you us e five digit s as shown i n T able 5-6. T abl[...]

5- 18 Agilent E5250 A User ’s Guide, Edit ion 9 Controll ing the E5250 A Switch Control B asics Figur e 5-5 E5252A C hannel Num ber in Auto Co nfig. Mode (ex ample for 10 × 48 matrix) Input Por t No. Output P ort (Outp ut Port N o.) 0201 0202 0 203 0204 0205 0206 0101 0102 0 103 0104 0105 0106 01 06 05 04 03 02 SMU2 CV1 CV2 HF2 SMU1 HF1 SMU6 SMU[...]

Agilent E5250A Us er ’s Guide, Edition 9 5- 1 9 Control ling the E52 50A Switch Con trol Basics E5255A Channel Li st This secti on describes how to def ine the channel_list specifically for the E5255A. For the basi c syntax of channel _list parameter , see “Channel List and Channe l Config uration” on page 5-6. Normal C onfiguration Mode T o [...]

5- 20 Agilent E5250 A User ’s Guide, Edit ion 9 Controll ing the E5250 A Switch Control B asics Card Number: One digit: 1 to 4. E5250A slot number in which card is installed. Channel Numb er: Four digi ts: XX Y Y . • XX: inpu t port nu mber (depends on the block n umber). 01, 02, or 03 for IV Input Port Numb er . 51, 52, or 53 for BIAS Inpu t P[...]

Agilent E5250A Us er ’s Guide, Edition 9 5- 2 1 Control ling the E52 50A Switch Con trol Basics Auto Conf igurat ion Mod e T o use this mod e, the E5255 A must be installed in the E5250 A slots co ntinuous ly from slot 1 (slot s 1,2; or s lots 1,2, 3; or slots 1,2,3,4). T o specify a channel, u se five digit s as sh ow n i n T ab le 5- 8 , T able[...]

5- 22 Agilent E5250 A User ’s Guide, Edit ion 9 Controll ing the E5250 A Switch Control B asics In the Au to Configurati on mode, you can omit any zer os at begin ning of chann el. For example, channel 00101 can be expressed by 101. Figure 5 -7, T able 5-9 and F igu re 5-8 show examples o f t he Ch annel Numb er . In this example, four E5255As ar[...]

Agilent E5250A Us er ’s Guide, Edition 9 5- 2 3 Control ling the E52 50A Switch Con trol Basics T able 5-9 Example IV Input Connection and Channel Number Slo t No. Block No. IV Input to One Channel: 5 digit s Configura tion Card Number (first 1 digit ) Channel Numb er: 4 dig it s Input Port No. (ne xt 2 d i gits ) Output Port No. (last 2 dig its)[...]

5- 24 Agilent E5250 A User ’s Guide, Edit ion 9 Controll ing the E5250 A Switch Control B asics Figur e 5-8 Example for E5255A Chan nel Number in Auto Config. Mode XXXX : C hannel Num ber Made from Cards in Sl ot #1 and #2. Block #1 to 3 of each card shoul d be connected in seri es. Made from Block #1 of Cards in Sl ot #3 and #4. Block #1 of each[...]

Agilent E5250A Us er ’s Guide, Edition 9 5- 2 5 Control ling the E52 50A Usin g Virtual F ront Pane l Util ity Using V irtual Fr ont Panel Utility The V irtu al Fro nt P anel (VFP ) Utility is a control program for the E5250A. The VFP utility runs on Agilent 4155/4156 Semiconductor Parameter Analyzer's built-in IBASIC co ntroller . Y ou can [...]

5- 26 Agilent E5250 A User ’s Guide, Edit ion 9 Controll ing the E5250 A Using Virtual Fr ont P anel Ut ility Functions of Vi rtual F r ont Panel Utility The V irtu al Fro nt Panel (VFP) utility is used to create the E5250A setup data and interactiv ely (from the 41 55/4156) mak e channel con nections on the E5250A plug-in cards. The VFP utility [...]

Agilent E5250A Us er ’s Guide, Edition 9 5- 2 7 Control ling the E52 50A Usin g Virtual F ront Pane l Util ity Requir ements The following are required to execute the V irtual Fro nt Pa nel (VFP ) Utility . S tarting the V irtual Front Panel Utility 1. Befor e turning on t he E5250A an d the 4155/ 4156 Semicon ductor Paramet er Analyzer , connect[...]

5- 28 Agilent E5250 A User ’s Guide, Edit ion 9 Controll ing the E5250 A Using Virtual Fr ont P anel Ut ility The follo wing softk eys are display ed on righ t side of the 4155/4156 screen. Confirming the E5250A Card Co nfigurations Select SHOW CONFIG softk ey . SHOW CONFIGURA TION MENU is displaye d on the 4155/415 6 to show which card is instal[...]

Agilent E5250A Us er ’s Guide, Edition 9 5- 2 9 Control ling the E52 50A Usin g Virtual F ront Pane l Util ity Changing the VFP Setup Mode Select the SETUP MODE softkey . The di splay show s th e presen t setup condit i ons : Channel C onfiguratio n mode: NORMAL or AUTO Model Number of each card: E5252 A or E5255A Bias Mode state of each card: ON[...]

5- 30 Agilent E5250 A User ’s Guide, Edit ion 9 Controll ing the E5250 A Using Virtual Fr ont P anel Ut ility Figur e 5-9 Examp le of SETUP M ODE MENU Agile nt E5250 A Virtua l Front Panel Ut ility ** SETU P MODE MEN U ** CONFIG MOD E : NO RM AL BIAS S TATE BIAS PORT CARD1 [E 52 52 ] OF F 10 CARD2 [E 52 52 ] OF F 10 CARD3 [E 52 55 ] OF F -- CARD4[...]

Agilent E5250A Us er ’s Guide, Edition 9 5- 3 1 Control ling the E52 50A Usin g Virtual F ront Pane l Util ity Defining Label s for the E5250A Input Ports Y ou can define labels to use f or the input ports o f each row in the MEMOR Y SETUP P ANEL. Select the DEFINE LABEL softkey . The DEFINE LABEL MENU and following softke ys ar e di sp laye d : [...]

5- 32 Agilent E5250 A User ’s Guide, Edit ion 9 Controll ing the E5250 A Using Virtual Fr ont P anel Ut ility T o define labels for the E5255A bias input ports Select the CARD n INP UT so ftkey (n=1 to 4). The fol low ing softkeys are di sp la yed: Select the B IASn LABEL so ftkey (n=1 to 3 ). The followin g message is di splayed: Input La be l N[...]

Agilent E5250A Us er ’s Guide, Edition 9 5- 3 3 Control ling the E52 50A Usin g Virtual F ront Pane l Util ity Making Connections and Changing the Setu p Data Select SETUP MEMOR Y so ftkey . The E5250A is initial ly set to connections of setup memory 1, then SETUP MEMOR Y MENU and following s oftkeys are disp layed . Cu rrent Setup Memor y indica[...]

5- 34 Agilent E5250 A User ’s Guide, Edit ion 9 Controll ing the E5250 A Using Virtual Fr ont P anel Ut ility Figur e 5-1 1 Examp le of SETU P MEMOR Y MENU Agile nt E5250 A Virtua l Front Panel Ut ility ** SETU P MEMORY MENU ** Curren t Se tu p Me mo ry : 1 Setup: Com ment Setu p: C omme nt 1 : Open All 13 : Open All 2 : MOSFET 1 14 : Open All 3 [...]

Agilent E5250A Us er ’s Guide, Edition 9 5- 3 5 Control ling the E52 50A Usin g Virtual F ront Pane l Util ity T o dele te a se tup me mory Select the DELETE SETUP softkey . Th e following mes sage is displayed. Input se tu p me mo ry num be r to be de le te d? ENT ER to ca nc el . T y pe the setu p mem ory number to delete, then press the Enter [...]

5- 36 Agilent E5250 A User ’s Guide, Edit ion 9 Controll ing the E5250 A Using Virtual Fr ont P anel Ut ility T o modify th e settings i n Current Setup Memory Select MODIFY SETUP softkey . MEMOR Y SETUP P ANEL appears as shown in examples i n Figure 5-12 t o Figure 5-14 , and softkey s shown af ter Figure 5-1 4 appear . One setup memory is used [...]

Agilent E5250A Us er ’s Guide, Edition 9 5- 3 7 Control ling the E52 50A Usin g Virtual F ront Pane l Util ity Figur e 5-13 Memory Setup Panel for th e E5255A in Normal Config. (2 X 24 multiplexer) Agile nt E5250 A Virtua l Front Panel Ut ility ** MEMOR Y SE TU P PA NE L ** Curren t Setup Me mory : 1 Comme nt : MOS CAP Card Nu mb er : 1 Input 12 [...]

5- 38 Agilent E5250 A User ’s Guide, Edit ion 9 Controll ing the E5250 A Using Virtual Fr ont P anel Ut ility Y ou can define labels to use f or the input ports o f each row in the MEMOR Y SETUP P ANEL. Refer to “Defi ning Labels f or the E5250A I nput Ports” on p age 5-31. The fo llow i ng sof t ke ys ar e disp layed for M E MOR Y SET U P P [...]

Agilent E5250A Us er ’s Guide, Edition 9 5- 3 9 Control ling the E52 50A Usin g Virtual F ront Pane l Util ity T o ente r a comment f or the set up memory Select the C OMMENT softkey . The follo wing message is displayed: Input co mmen t for th is setup m emor y. (Ma x 20 char) T ype desired comment (max imum 20 characters), th en press the Enter[...]

5- 40 Agilent E5250 A User ’s Guide, Edit ion 9 Controll ing the E5250 A Using Virtual Fr ont P anel Ut ility Softke y Menu 1 : NOTE Moving t he Cursor Move the cursor b y using the UP , DOWN, RIGHT , LEFT softkeys . Do not use arrow k eys on the 41 55/4156 front panel . Softkey Descript ion OPEN/ CLOSE Changes the relay s tate (open or clos e) o[...]

Agilent E5250A Us er ’s Guide, Edition 9 5- 4 1 Control ling the E52 50A Usin g Virtual F ront Pane l Util ity Softke y Menu 2 : For the following conditions, the following softkeys are displayed by selecting the MORE softkey on Softkey Menu 1. Cursor points to row of normal input port or to row of input Bias P ort with Bias Mode OFF . Softke y M[...]

5- 42 Agilent E5250 A User ’s Guide, Edit ion 9 Controll ing the E5250 A Using Virtual Fr ont P anel Ut ility Saving/Loading the Se tup Data Select the SA VE/LOAD softkey . The following softkeys are displaye d : T o save setu p data to diskette Select the SA V E FILE softkey . The following message is dis played: Input Sa ve fil e na me T y pe t[...]

6 Pr ogramming the E5250A[...]

6- 2 Agilent E 5250A User ’ s G uide, Ed ition 9 Progra mming the E5 250A Stan dard Command s for Program mable Instruments (S CPI) is a un iversal programming language f or electronic te st and measu rement instrumen ts, and based on IEEE 48 8.1 and IEEE48 8.2. This chapter descr ibes how to create progr ams that contain SCPI commands to control[...]

Agilent E5250A Us er ’s Guide, Edition 9 6- 3 Programmi ng the E52 50A SCPI Prog ra mming Bas i cs SCPI Pr ogramming Basics This section descr ibes the structur e of SCPI commands, an d the basics of using an program that contains S CPI commands to control the E5250A and ru ns on HP BASIC: • “SCPI Command Hier archy” • “Contro lling E5 [...]

6- 4 Agilent E 5250A User ’ s G uide, Ed ition 9 Progra mming the E5 250A SCPI Progr amming B asics SCPI Command Hierarchy The SCPI commands use a hierarchical structure for s ubsystem comman ds similar to a file system. For ex ample, in :ROUT:CONN:RULE comman d, the hierarchy is as follows: ROUT root CONN sub- level 1 RULE sub-level 2 The colon [...]

Agilent E5250A Us er ’s Guide, Edition 9 6- 5 Programmi ng the E52 50A SCPI Prog ra mming Bas i cs Controlling E5250A by Us ing HP BASIC 1. Assign I/O path for control ling the E52 50A by usi ng the ASSI GN command. In the following example, the select code of the external comp uter is 7 and GPIB address of the E5250A i s 22. 10 ASSIG N @H p5 25 [...]

6- 6 Agilent E 5250A User ’ s G uide, Ed ition 9 Progra mming the E5 250A Creating a Co ntrol Pr ogram Cr eat ing a Contr ol Pr ogram This secti on explains ho w to create a control pr ogram for the E 5250A. The control program basi cally consis ts of the foll owing six par ts: • “De fini ng Ch anne l Con fig ura t i on Mo de ” • “Defin[...]

Agilent E5250A Us er ’s Guide, Edition 9 6- 7 Programmi ng the E52 50A Creating a Control Pr ogra m T able 6-1 Programming Sum ma ry For details about these parameters, refer to Chapter 5 and Chapter 7. CAUTION Bias Por t and Couple P ort cannot be s et for the s ame input port nu mber . Description Command Default Setting 1 Defines Channel Conf [...]

6- 8 Agilent E 5250A User ’ s G uide, Ed ition 9 Progra mming the E5 250A Creating a Co ntrol Pr ogram Defining Channel Configur ation Mode Following commands are used to set the Channel Con fi gur atio n mode. Fo r details , refer to “Channel List and Channel Configuratio n” on page 5- 6. Example: 100 OUTPUT @Hp5250;":ROUT:FUNC NCON&quo[...]

Agilent E5250A Us er ’s Guide, Edition 9 6- 9 Programmi ng the E52 50A Creating a Control Pr ogra m Defining Conne ction Sequenc e Following commands are used to spec if y the Connection Seq uence. For details, refer to “Con nection Sequence” on page 5-10. Example: 100 OUTPUT @Hp5250;":ROUT:CONN:SEQ ALL,BBM" 110 ! Sets all cards to [...]

6- 10 Agilent E5250 A User ’s Guide, Edit ion 9 Progra mming the E5 250A Creating a Co ntrol Pr ogram Using Bias Mode If you u se the Bias Mode, followin g comman ds are available. For details, refer to “Bias Mod e” on page 5-11. • Selects in put port to be input Bia s Port on speci fied card (fo r E5252A only ). • Bias enables the ou tpu[...]

Agilent E5250A Us er ’s Guide, Edition 9 6- 1 1 Programmi ng the E52 50A Creating a Control Pr ogra m Using Coupl e Port (for E5252A onl y) If you us e Couple P ort, the followi ng comm ands are available. For details, refer to “Coupl e Port” on pag e 5-13. • Sets up the cou ple ports for specified card . Y ou can sp ecify multiple inpu t_p[...]

6- 12 Agilent E5250 A User ’s Guide, Edit ion 9 Progra mming the E5 250A Creating a Co ntrol Pr ogram Controlling Relay Sw itchin g Following commands are used to contro l relay switching . For details of channel_list , see “C hannel List an d Channel Co nfiguration” on page 5-6 . Example: 100 OUTPUT @Hp5250;":ROUT:CLOS (@10101,10202)&qu[...]

Agilent E5250A Us er ’s Guide, Edition 9 6- 1 3 Programmi ng the E52 50A Program ming E xamples Pr ogramming Examples This section prov ides examples of control p rograms for the E 5250A. The programs are written in the HP BASIC language, and can be executed without any modifications. B ut the program examp l es do not include inst rum ent contro[...]

6- 14 Agilent E5250 A User ’s Guide, Edit ion 9 Progra mming the E5 250A Progra mming Example s Channel Cr eation Example The following exa mple is a typical control pro gram for the E5250 A with the E5252A , which conn ects instru ment output to DUT as shown in Figure 6-1. Bias Mode and Couple Port are not used in this example. Figur e 6-1 MOSF [...]

Agilent E5250A Us er ’s Guide, Edition 9 6- 1 5 Programmi ng the E52 50A Program ming E xamples Program List: 10 ! Exam pl e: Cre at in g Co nn ec ti on Cha nn el s 20 ! 30 INTE GER Comple te 40 DIM Chan nel$[1 00] 50 ! (Gat e, Dra in , Su bs tr at e, Sou rc e) 60 Chan nel$ ="(@ 10101, 1020 2,10 303,10 404) " ! Chan nels to Cre ate 70 ![...]

6- 16 Agilent E5250 A User ’s Guide, Edit ion 9 Progra mming the E5 250A Progra mming Example s Bias Mode Example The following exa mple shows how to use Bi as Mode for the E5255A. Figur e 6-2 Examp le of Bias Mode Required Conditions: This program assumes the followin g conditions. E5250A In stal led Cards: • Slot 1: E5255A • Slot 2 to 4: no[...]

Agilent E5250A Us er ’s Guide, Edition 9 6- 1 7 Programmi ng the E52 50A Program ming E xamples Program List: 10 ! Example: Using Bias Mode 20 ! 30 INTEGER Complete 40 DIM Channel$[100] 50 Channel$="(@10101:10108)" 60 ! 70 ! Put Instrument I nitialization Routine here. 80 ! 90 ASSIGN @Hp5250 TO 722 100 OUTPUT @Hp5250;"*RST" 11[...]

6- 18 Agilent E5250 A User ’s Guide, Edit ion 9 Progra mming the E5 250A Progra mming Example s 160 ! 170 ! Put Bias Source Control Routine here. 180 ! 190 OUTPUT @Hp5250;":ROUT:CLOS "&Chann el$ 200 OUTPUT @Hp5250;"*OPC?" 210 ENTER @Hp5250;Complete 220 ! 230 ! Put Measurement Routine here 240 ! 250 OUTPUT @Hp5250;":RO[...]

Agilent E5250A Us er ’s Guide, Edition 9 6- 1 9 Programmi ng the E52 50A Program ming E xamples Couple Port Example The following exa mple shows how to use the Co uple Port. This function is available only for the E5252A. Figur e 6-3 Exampl e of Couple Po rt Required Conditions: This program assumes the followin g conditions. E5250A In stal led C[...]

6- 20 Agilent E5250 A User ’s Guide, Edit ion 9 Progra mming the E5 250A Progra mming Example s Program List: 10 ! Example: Using Couple Port 20 ! 30 INTEGER Complete 40 DIM Channel$[100] 50 ! (Substrate,Gate,Drain,Source) 60 Channel$="(@101,202,303,505)" 70 ! 80 ! Put Instrument I nitialize Routine here 90 ! 100 ASSIGN @Hp5250 TO 722 1[...]

Agilent E5250A Us er ’s Guide, Edition 9 6- 2 1 Programmi ng the E52 50A Program ming E xamples 150 OUTPUT @Hp5250;":ROUT:COUP:PORT AL L,'3,5'" 160 OUTPUT @Hp5250;":ROUT:COUP:STAT AL L,ON" 170 ! 180 OUTPUT @Hp5250;":ROUT:CLOS "&Chann el$ 190 OUTPUT @Hp5250;"*OPC?" 200 ENTER @Hp5250;Complete 21[...]

6- 22 Agilent E5250 A User ’s Guide, Edit ion 9 Progra mming the E5 250A Using the VFP Data Upl oad Libr ary Using the VFP D ata Upload Librar y This secti on introduces and explains how to use th e VFP Data Upload Li brary: • “VFP Data U pload Library” • “Programm ing Example” • “Bef ore Exe cut ing Y ou r Pr ogr am” • “Err[...]

Agilent E5250A Us er ’s Guide, Edition 9 6- 2 3 Programmi ng the E52 50A Using t he VFP D ata Upload L ibrary VFP Data U pload Libra ry VFP Data Upload Library is an subprogram library used for loading data (that was made and saved by the V i rtual Front Panel utility) to your program. The library contains the followi ng four su bprograms. The li[...]

6- 24 Agilent E5250 A User ’s Guide, Edit ion 9 Progra mming the E5 250A Using the VFP Data Upl oad Libr ary Connect_vfp subpr ogram Makes relay con nections based on data from the specified Setup Memor y . Data from all 24 S etup Memories w as loaded by t he Load_vf p_data subp rogram. Syntax: Connect_vfp( Setup_data $ , Setu p_num ) Parame ters[...]

Agilent E5250A Us er ’s Guide, Edition 9 6- 2 5 Programmi ng the E52 50A Using t he VFP D ata Upload L ibrary Programming Example The following pr ogram is an example f o r using the VFP Data Upload Library . 10 ! Exam pl e fo r us in g VF P Da ta Upl oa d Li br ar y 20 ! 30 COM /Vfp _com_d ata/ Mat48 _dat a$[1 4000] 40 DIM Comm ent$[2 0] 50 Ad d[...]

6- 26 Agilent E5250 A User ’s Guide, Edit ion 9 Progra mming the E5 250A Using the VFP Data Upl oad Libr ary Befor e Executing Y our Pr ogram Before execu ting a program that uses subprograms from the VFP Data Upload Library , do the follo win g: 1. L ink t he l ibra ry t o you r pro gra m: Link the library as shown in the following example. The [...]

Agilent E5250A Us er ’s Guide, Edition 9 6- 2 7 Programmi ng the E52 50A Using t he VFP D ata Upload L ibrary Err or Messages If any error related to the VFP Data Upload Library occurs in your program, one of following error messages is displayed, and the program is paused . • Cannot configure for AUTO. Normal mode used. Cannot use the data for[...]

6- 28 Agilent E5250 A User ’s Guide, Edit ion 9 Progra mming the E5 250A Using the Capacitance Comp ensation Routine Usi ng th e C apa citan ce Co mpensa tion Routi ne This section introd uces and explains h ow to use the Capacitance Compensation Routine. • “Capacitance Compens ation Routine” • “Requi red Co ndition s” • “Programm[...]

Agilent E5250A Us er ’s Guide, Edition 9 6- 2 9 Programmi ng the E52 50A Using th e Capacitance Compensat ion Rou tine Capacitance Compen sation Routine This rout ine is an su bprogram us ed to compens ate for cap acitance measurement error caus ed by th e E5250A with the E5252 A matrix card installed. The subpr ogram is used with Agilent 428 4A [...]

6- 30 Agilent E5250 A User ’s Guide, Edit ion 9 Progra mming the E5 250A Using the Capacitance Comp ensation Routine Requir ed Conditions This subprogram requires the following conditions: • Setting of the 4284A: Option Required: 4284A-006 Fr equency: 1 kHz t o 1 MH z. Measur em ent Function: Cp -G . Connection to E525 0A: Use Agilent 16048D/E [...]

Agilent E5250A Us er ’s Guide, Edition 9 6- 3 1 Programmi ng the E52 50A Using th e Capacitance Compensat ion Rou tine 1. Measure R, L, C o f your cable using the 4 284A. Measurement setup is as follows: 2. Overwrite the R , L, C data i n the program lin es listed belo w . The data must be in per meter values . Original program defines initial da[...]

6- 32 Agilent E5250 A User ’s Guide, Edit ion 9 Progra mming the E5 250A Using the Capacitance Comp ensation Routine Programming Example The following pr ogram is an example f or using the capacitance compensation subpr ogra m: 100 ! Examp le of Capacitanc e Comp ensati on 110 ! 120 Fre q=1.E+ 6 ! MEASUR EMENT FREQUE NCY: 1MH z 130 L1 =1.5 ! E 52[...]

7 Command Refer ence[...]

7- 2 Agilent E 5250A User ’ s G uide, Ed ition 9 Command Re ference Thi s ch apte r desc rib es th e fo llow ing f or Agil ent E525 0A: • SCPI commands available to control the E5250 A via GPIB interface. SCPI is a universal progr amming language for electronic test and measurement instrume nts, and is ba sed on IEEE 488 .1 and IEEE 48 8.2. SCP[...]

Agilent E5250A Us er ’s Guide, Edition 9 7- 3 Command Referenc e T extual Notation for Subsystem Com mands CAPIT AL LETTE RS Capital letters are the minimally required letters of the command head er . Lowercase letters are the long for m (complete s pelling), whic h you can omi t if desired . For example, for :SYST em:CC ONfig?, y ou only need to[...]

7- 4 Agilent E 5250A User ’ s G uide, Ed ition 9 Command Re ference Common Com mands for E5250A Common Commands This secti on describes common comman ds and queries, w hich are comman ds defined by IEEE 4 88.2 . The following table s hows some common co mmands that are suppor t ed for the E5250A . Common Comm ands for E5250A Mnemon ic Nam e *CLS [...]

Agilent E5250A Us er ’s Guide, Edition 9 7- 5 Command Referenc e *CLS *CLS This command clears the Status Byte R egister , the Standard Event S tatus Register , and the Error Queue. This command does not clear the enable registers. Refer to “Stat us Report ing Str ucture” on page 7-48. Also, thi s command stops the mo nitoring of pending oper[...]

7- 6 Agilent E 5250A User ’ s G uide, Ed ition 9 Command Re ference *ESE The following table shows the bits of th e Stand ard Event St atus Register and bina ry-w ei ghte d decimal value of each bit. Example The following four lines enable the same bit (CME bit): OUTPUT @Hp5250;"*ESE 32" usi ng decim a l nume ric OUTPUT @Hp5250;"*E[...]

Agilent E5250A Us er ’s Guide, Edition 9 7- 7 Command Referenc e *ESR ? *ESR? This query comm and returns the pres ent contents of the S tandard Even t Status Regis ter . Syntax *ESR? Quer y re sponse re g i s t e r <newline><^END> Semantics The follo wing table shows the bits of th e Standa rd Event Status Register , and the bina ry-[...]

7- 8 Agilent E 5250A User ’ s G uide, Ed ition 9 Command Re ference *IDN? *IDN? This query command ret urns the ID of your E5250A. Syntax *IDN? Quer y re sponse HEWLETT -P ACKARD, model ,0, r evision <newline><^END> Example DIM A$[50] OUTPUT @Hp5250;"*IDN?" ENTER @Hp5250;A$ PRINT A$ An example resu lt of above program is: HE[...]

Agilent E5250A Us er ’s Guide, Edition 9 7- 9 Command Referenc e *OPC *OPC This command starts to monitor pending operations, and sets/clears the Operation Complete (OPC) b it in the Standard Event St atus Register as follows: • If there is no pending operation, sets the OPC bit to 1. • If there are any pending operations, sets the OPC bit to[...]

7- 10 Agilent E5250 A User ’s Guide, Edit ion 9 Command Re ference *RST *RST This command performs an i nstrument res et. Stat us after *RS T is shown below: Chan ne l Config u r ati o n : Normal Co nfig Mode Connection Rule: Free Connection Sequ ence: Br eak Be fore M ake Bias Mo de: Off Bias Po rt: • E5252 A : 10 • E5255 A: None Bias E nabl[...]

Agilent E5250A Us er ’s Guide, Edition 9 7- 1 1 Command Referenc e *SRE *SRE This command sets the Service Request "Enable" Register b its. 1 enables, 0 masks. Syntax *SRE enable_numbe r Quer y re sponse enable_number <newline><^END> Semantics The Service Request "Enable" Register consists of 8 bits: Bit0 to Bit7. [...]

7- 12 Agilent E5250 A User ’s Guide, Edit ion 9 Command Re ference *SRE Example The following four lines enable the same bits (bit 4 and 5): OUTPUT @Hp5250;"*SRE 48" usi ng d ecima l nume ric OUTPUT @Hp5250;"*SRE #B110000" using bin ar y nu meri c OUTPUT @Hp5250;"*SRE #Q60" using o ctal num eric OUTPUT @Hp5250;"[...]

Agilent E5250A Us er ’s Guide, Edition 9 7- 1 3 Command Referenc e *STB? *STB? This query comm and reads the S t atus Byte Register (reads Master Sum mary Status bit, not Reque st for Service Message). For bit6, this command reads MSS, not Request for Service (RQS). Refer to “S tatu s Reportin g Str ucture” on page 7-48. Syntax *STB? Quer y r[...]

7- 14 Agilent E5250 A User ’s Guide, Edit ion 9 Command Re ference *TST? *TST? This query command executes an in ternal self-test, then returns th e result. After this command execu tion, the E5250A b ecomes same status as after *RST comma nd execution. Syntax *TST? Quer y re sponse test_result <newline><^END> Example OUTPUT @Hp5250;&[...]

Agilent E5250A Us er ’s Guide, Edition 9 7- 1 5 Command Referenc e :DIAGnosti c Command Tr ee :DIAGnostic Subsystem The :DIAGnostic sub system has com mands fo r execu ting the s elf-tes t function . For more info, see C hapter 3. NOTE The :DIAG nostic subs ystem commands ignore th e E5250A chann el configurati on mode. Fo r :DIAG commands t hat [...]

7- 16 Agilent E5250 A User ’s Guide, Edit ion 9 Command Re ference :DIAGnosti c:TEST :CA RD:CLEar :DIAGnostic:TEST :CARD:CLEar This command clears the relay test result (pass/f ail result) of the s pecified card. Syntax :DIAGnostic:TEST:CARD:CLEar car d_numb er Example OUTPUT @Hp5250;":DIAG:TEST:CARD:CLE 1" :DIAGnostic:TEST :CARD[:EXECu[...]

Agilent E5250A Us er ’s Guide, Edition 9 7- 1 7 Command Referenc e :DIAGnostic :TEST :CARD:ST A T e ? :DIAGnostic:TEST :CARD:ST A T e? This command retur ns the most recent relay test r esult for the specified card. Syntax :DIAGnostic:TEST:CARD:STATe? car d_numbe r Quer y re sponse test_result <newline><^END> 1 : Fail 0 : Pass -1 : No[...]

7- 18 Agilent E5250 A User ’s Guide, Edit ion 9 Command Re ference :DIAGnosti c:TEST :FRAMe[:EXECu te]? :DIAGnostic:TEST :FRAMe[:EXECute]? This command execu tes the specified E5250A test, then returns the test result. For more info, see C hapter 3. After :DIAG:TEST:FRAM:EXEC CONT execution , the E5250A status becomes same as after *RST command e[...]

Agilent E5250A Us er ’s Guide, Edition 9 7- 1 9 Command Referenc e :DIAGno stic:TEST :FRAMe:S T A T e ? :DIAG nos tic :TES T :FRA Me: ST A T e? This command returns the most recent test result (pass/fa il) of the specified E5250A test. Syntax :DIAGnostic:TEST:FRAMe:STATe? CONTroller | FPANel Quer y re sponse test_result <newline><^END>[...]

7- 20 Agilent E5250 A User ’s Guide, Edit ion 9 Command Re ference :ROUT e Command Tree :ROUT e Su bsystem The :ROUT e subsys tem has command s for contro lling the signal rou ting. " Open a channel ": op ens relays to disconnec t the channel (th at is, disco nnects inp ut port f rom ou tp ut port ) . " Close a chan nel ": clo[...]

Agilent E5250A Us er ’s Guide, Edition 9 7- 2 1 Command Referenc e :ROUT e Command T ree Parameter values: card_number : Auto Config Mode: 0 Normal Co nfig Mode: 1 | 2 | 3 | 4 channel_list : Refer to Ch apter 5. state : ON | OFF | 0 | 1 rule : FREE | SROU channel_config : ACON | NCON sequence : NSEQ | BBM | MBBR Command Parameter [:ROUT e] :CONNe[...]

7- 22 Agilent E5250 A User ’s Guide, Edit ion 9 Command Re ference [:ROUT e]:BIAS:C HANnel: DISable:CA RD [:ROUT e]:BIAS:CHANnel:DISable:CARD This command bias disabl es all output ports of the specified card. When Bias Mode is ON, this command open s relays to d isconnect the in put Bias Port from all output ports. Refer to "ROUT e:BIAS:ST [...]

Agilent E5250A Us er ’s Guide, Edition 9 7- 2 3 Command Referenc e [:ROUT e]:BIAS :CHANnel:DISabl e[:LIST] ? [:ROUT e]:BIAS:CHANnel:DISable[:LIST]? This query comm and returns 0 or 1 for each channel specified by chan nel_list , in same order as specified by channel_list . 1 : channel is bias disa bled, 0 : channel is bias enabled. Syntax [:ROUTe[...]

7- 24 Agilent E5250 A User ’s Guide, Edit ion 9 Command Re ference [:ROUT e]:BIAS:C HANnel: ENABle:C ARD [:ROUT e]:BIAS:CHANnel:ENABle:CARD This command bias enables all output ports of the specified card. When Bias Mode is ON, this command closes relays to connect the input Bias Port to all output ports that are not already con nected (by :ROUT [...]

Agilent E5250A Us er ’s Guide, Edition 9 7- 2 5 Command Referenc e [:ROUT e]:BIAS:CHA Nnel:ENAB le[:LIST] [:ROUT e]:BIAS:CHANnel:ENABle[:LIST] This command bias enables the output ports sp ecified by channel_list . When Bias Mode is ON, this command closes relays to connect the input Bias Port to the output p orts specified by chann el_list . Ref[...]

7- 26 Agilent E5250 A User ’s Guide, Edit ion 9 Command Re ference [:ROUT e]:BIAS:C HANnel: ENABle[: LIST]? [:ROUT e]:BIAS:CHANnel:ENABle[:LIST]? This query comm and returns 0 or 1 for each channel specified by chan nel_list , in same order as specified by channel_list . 0 : channel is bias disa bled, 1 : channel is bias enabled. Syntax [:ROUTe]:[...]

Agilent E5250A Us er ’s Guide, Edition 9 7- 2 7 Command Referenc e [:ROUT e ]:BIAS:P ORT [:ROUT e]:BIAS:POR T NOTE This command app lies only to the E52 52A card. For the E5255 A card, the input Bias Port can not be selected, and is always the built-in Bi as Po rt. The Bias P ort and Coup le Port cann ot be set to same por t number . This command[...]

7- 28 Agilent E5250 A User ’s Guide, Edit ion 9 Command Re ference [:ROUT e]:BIAS:PO RT? [:ROUT e]:BIAS:POR T? NOTE This command app lies only to th e E5252A card. For the E5255 A card, the input Bias Port can not be selected, and is always the built-in Bi as Po rt. This query comm and returns the inpu t Bias Port number for the specified card. S[...]

Agilent E5250A Us er ’s Guide, Edition 9 7- 2 9 Command Referenc e [:ROUT e ]:BIAS[:S T A T e ] [:ROUT e]:BIAS[:ST A T e] This command con trols the Bias Mode fo r the specified card. For details, refer to "Bias Mode" in Chapter 5. When Bias Mode is ON, the i nput Bias Port is c onnected to all bias en able d output ports that are not c[...]

7- 30 Agilent E5250 A User ’s Guide, Edit ion 9 Command Re ference [:ROUT e]:BIAS[:ST A T e]? [:ROUT e]:BIAS[:ST A T e]? This query comm and returns the Bias Mod e of the specified car d. Syntax [:ROUTe]:BIAS[:STATe]? car d_number Quer y re sponse 0 or 1 <newline><^END> 0 : Bias Mode is OFF 1 : Bias Mode is ON Example OUTPUT @Hp5250;&[...]

Agilent E5250A Us er ’s Guide, Edition 9 7- 3 1 Command Referenc e [:ROUT e]:CLOSe[:LIS T] [:ROUT e]:CLOSe[:LIST] This command con nects the input ports to the o utput ports as specified in channel_list . For so me modes (such as Single Route M ode, Couple Port Mode, and Bi as Mode), more comple x connections may occur . For details , refer to Ch[...]

7- 32 Agilent E5250 A User ’s Guide, Edit ion 9 Command Re ference [:ROUT e]:CONNectio n:RULE [:ROUT e]:CONNection:RULE This command sets the connection ru le (Free or Single Route) for the specified car d. For details, refer to "Connection Rule" in Chapter 5. At *RST , all cards are set to FREE. Syntax [:ROUTe]:CONNection:RULE car d_nu[...]

Agilent E5250A Us er ’s Guide, Edition 9 7- 3 3 Command Referenc e [:ROUT e]:CONNec tion:SEQ uence [:ROUT e]:CONNection:SEQuence This command s pecifies the connection se quen ce mo de, w hic h is t he o p en/c los e sequence of the relays when connectio n route is chang ed from an ex isting connection to a n ew connection. For deta ils, refer to[...]

7- 34 Agilent E5250 A User ’s Guide, Edit ion 9 Command Re ference [:ROUT e]:CONNec tion:SEQue nce? [:ROUT e]:CONNection:SEQuence ? This query comm and returns the conn ection sequence mode o f the specified card. For details, refer to "Connection Sequence" in Chapter 5. Syntax [:ROUTe]:CONNection:SEQuence? car d_numbe r Quer y re spons[...]

Agilent E5250A Us er ’s Guide, Edition 9 7- 3 5 Command Referenc e [:ROUT e]:COUPl e:PORT [:ROUT e]:COUPle:POR T NOTE This command app lies only to the E52 52A card. The Couple Port function is not available fo r the E5255A card. The Bias P ort and Coup le Port cann ot be set to same por t number . This command is used to s et up couple po rts, w[...]

7- 36 Agilent E5250 A User ’s Guide, Edit ion 9 Command Re ference [:ROUT e]:COUPl e:PORT? [:ROUT e]:COUPle:POR T? NOTE This command app lies only to th e E5252A card. This query comm and returns the lower input port nu mber of each coupled pair . For details, refer to "Couple Ports" in Chapte r 5. Syntax [:ROUTe]:COUPle:PORT? car d_num[...]

Agilent E5250A Us er ’s Guide, Edition 9 7- 3 7 Command Referenc e [:ROUT e]:COUPle[:ST A T e] [:ROUT e]:COUPle[:ST A T e] NOTE This command app lies only to the E52 52A card. The Couple Port function is not available fo r the E5255A card. This command controls the Couple Port Mo de for the s pecified card. For details, refer to "Cou ple Por[...]

7- 38 Agilent E5250 A User ’s Guide, Edit ion 9 Command Re ference [:ROUT e]:COUPle[:S T A T e]? [:ROUT e]:COUPle[:ST A T e]? NOTE This command app lies only to th e E5252A card. The Couple Port function is not available fo r the E5255A card. This query comm and returns the Couple Po rt Mode of the specified card. For details, refer to "Coup[...]

Agilent E5250A Us er ’s Guide, Edition 9 7- 3 9 Command Referenc e [:ROUT e]:FUNCtion [:ROUT e]:FUNCtion This command sets the chann el configur ation, which det ermines how you specif y the channel_lis t or car d_number in o ther commands. Fo r details, refer to "Chan nel List and Channel Conf iguration" i n Chapter 5. When configurati[...]

7- 40 Agilent E5250 A User ’s Guide, Edit ion 9 Command Re ference [:ROUT e]:O PEN:CARD [:ROUT e]:OPEN:CARD This command disconnect s all input p orts from all output ports for the specif ied card. Then, if Bias Mode is ON, connects the in put Bias Port to all bias enab led outp u t por ts. For details about t he Bias Mode, refer to ":ROUT e[...]

Agilent E5250A Us er ’s Guide, Edition 9 7- 4 1 Command Referenc e [:ROUT e]:OPEN[:LIST]? [:ROUT e]:OPEN[:LIST]? This query comm and returns 0 or 1 for each channel specified by chan nel_list , in same order as specified by channel_list . 0 : channel is closed ( connected), 1 : channel is opene d (not connected). Syntax [:ROUTe]:OPEN[:LIST]? (@ c[...]

7- 42 Agilent E5250 A User ’s Guide, Edit ion 9 Command Re ference :SYST em Comma nd T ree :SYST em Subsystem The :SYST em subsystem is a collection of functions th at are not related to instrum ent performance. :SYST em Command T r ee Parameter values: card_number : Auto Config Mode: 0 Normal Co nfig Mode: 1 | 2 | 3 | 4 Command Paramet er :SYSTe[...]

Agilent E5250A Us er ’s Guide, Edition 9 7- 4 3 Command Referenc e :SYST em:CC ONfig? :S YST em: CCONf ig? This query command returns t he card configurat ion i nformation . This co mmand has quer y fo rm only . Syntax :SYSTem:CCONfig? card_n umber Quer y re sponse card_configuration <newline><^END> For the E5252A: n o response. Alway[...]

7- 44 Agilent E5250 A User ’s Guide, Edit ion 9 Command Re ference :SYST em:CDESc riptio n? :SYST em:CDEScription? This query comm and returns a des cription of the specified car d. This command has query form only . Syntax :SYSTem:CDEScription? car d_number Quer y re sponse " card_descri ption " <newline><^END> NOTE If desi[...]

Agilent E5250A Us er ’s Guide, Edition 9 7- 4 5 Command Referenc e :SYST e m:CPON :SYST em:CPON This command res ets the specified card to the po wer-on state. If the parameter is ALL , all addressable cards are reset to the power-on state. S tatus after this command is sh own below: Chan ne l Config u r ati o n : No Change Connection Rule: Free [...]

7- 46 Agilent E5250 A User ’s Guide, Edit ion 9 Command Re ference :SYST e m:CTYPe ? :SYST em:CTYPe? This query comm and returns the ID of the specified card. This command has query form only . Syntax :SYSTem:CTYPe? card_n umber Quer y re sponse HEWLETT -P ACKARD, model ,0, r evision <newline><^END> model = E5252A or E5255A r evis ion[...]

Agilent E5250A Us er ’s Guide, Edition 9 7- 4 7 Command Referenc e :SYS T em:E RRor? :SYST em:ERRor? This command read s the error from th e head of the error q ueue and remov es that error from the queue. This command has query form only . Syntax :SYSTem:ERRor? Quer y re sponse err_no ," message " <newline><^END> err_no is [...]

7- 48 Agilent E5250 A User ’s Guide, Edit ion 9 Command Re ference S tatus Rep orting Structure S tatus Report ing S truct ure This section descr ibes the status repo rting structure u sed in the E5250A. Th ese are IEEE 488.2 status structures that can be set and r ead by the SCPI Common Commands as described i n “Common Commands ” on page 7-[...]

Agilent E5250A Us er ’s Guide, Edition 9 7- 4 9 Command Referenc e S tatus Rep ortin g S truct ure Figur e 7-1 S tatus Reporting S tructure of E5250A The above figure shows Service Request Generation. When a condition occurs that requires service, the instrument sets Request Service bit (RQS − bit6) of Stat u s Byte, and sends a Service Request[...]

7- 50 Agilent E5250 A User ’s Guide, Edit ion 9 Command Re ference S tatus By te Regis ter S tatus B yte Register The E5250A S tatus Byte Regi ster contains bits (ESB and MA V) for status summary messages fro m other registers. Th e status of these bits dep ends on the cond ition of the Stand ard Event S tatus R egister and th e Output Qu eue. If[...]

Agilent E5250A Us er ’s Guide, Edition 9 7- 5 1 Command Referenc e S tatus Byte Register In ge nera l, us e ser i al p ol ling (no t *S T B ?) inside interrup t service routines. Use *STB? in other cases (not in interrupt serv ice rout ine) when you want to kn ow the value of S tatus Byte. T able 7-1 S tatus Byte Register of E 5250A Bit Defi niti[...]

7- 52 Agilent E5250 A User ’s Guide, Edit ion 9 Command Re ference Service Request E nable R egister Service Request Enable Regis ter The Service Request Enable Register is an 8-bit register that can be used by the programmer to select which summary m essages in the S tatus Byte Register may cause serv ice requests. R efer to Figure 7-3. Figur e [...]

Agilent E5250A Us er ’s Guide, Edition 9 7- 5 3 Command Referenc e S tandard Event S tatus Reg ister S tandard E vent S tatus Regi ster The St andard Event St atus Register has specific events assigned to specific bits. Refe r to F i gure 7-4 an d T abl e 7- 2. Figur e 7-4 S tandard E vent S tatus Regi ster of E 5250A[...]

7- 54 Agilent E5250 A User ’s Guide, Edit ion 9 Command Re ference S tandard Event S tatus E nable R egister T able 7 -2 S tandard Even t S tatus Regi ster of E525 0A S tandard E vent S tatus En able Register The S tandard Event Status "Enable" Register is an 8-bit regis ter that can be used by the programmer to select which bits of St [...]

Agilent E5250A Us er ’s Guide, Edition 9 7- 5 5 Command Referenc e Output Q ueue Output Qu eue The Output Queue stores response messages until they are read. If an unread message exists, Bit4 (Messag e A vailable − MA V) of the St atus Byte Regist er is set to 1. So, Bit4 is used to synchronize information exchange with the controller . Refer t[...]

7- 56 Agilent E5250 A User ’s Guide, Edit ion 9 Command Re ference Output Q ueue[...]

8 VXI plug &play Driver[...]

8- 2 Agilent E 5250A User ’ s G uide, Ed ition 9 VXIplug& play Driv er This chapter introduces t he VXI plug&play driver available for Agilent E5250A, and consists of the following sections: • “Syst em Requirement s” • “Installing VXIplug&play Driver” • “Driver Functions”[...]

Agilent E5250A Us er ’s Guide, Edition 9 8- 3 VXIplug& play Driv er System Requirem ents System Requirements The following sys tem environments are req uired. •O p e r a t i n g S y s t e m Microsoft W i ndows XP Professional , W indows 2000, W indows NT 4.0, W indows 98, or W indows 95. It must be su pported by t he applicati on developmen[...]

8- 4 Agilent E 5250A User ’ s G uide, Ed ition 9 VXIplug& play Driv er Installing VX Iplug& play Driver Installing VXI plug&play Driver The installation flow is shown below . If you have already installed the GPIB interface card, VISA I/O librar y , and programm ing software on you r PC, skip steps 1 thro ugh 4. 1. Install the GPIB in[...]

Agilent E5250A Us er ’s Guide, Edition 9 8- 5 VXIplug& play Driv er Driver Func tions Driver Functions T able 8-1 lists all the functions for the E5250A. Y ou will see a brief descriptio n of the functions in the table. For the descrip tion, syntax and par ameters of the fun ction, refer to the r eference section following this tab le. The dr[...]

8- 6 Agilent E 5250A User ’ s G uide, Ed ition 9 VXIplug& play Driv er Driver Fun ctions Route Control hpe5250a_closeList Closes the chan nel list. hpe5250a_op enList Opens the channel l ist. hpe5250a_op enCard Opens all output on the card. hpe5250a_closeList_ Q Queries for the channel list status . hpe5250a_op enList_Q hpe5250a_closeCar d_Q [...]

Agilent E5250A Us er ’s Guide, Edition 9 8- 7 VXIplug& play Driv er Driver Func tions hpe5250a_bia sChanCard This func ti on wi ll enab le or dis abl e bias on al l the output ports of the specified card. Syntax V iStatus _VI_FUNC hpe5250a_bi asChanCard( V iSession vi , V iInt16 disable_enabl e, V iInt16 bias_cardn o); Parame ters vi Instrume[...]

8- 8 Agilent E 5250A User ’ s G uide, Ed ition 9 VXIplug& play Driv er Driver Fun ctions hpe5250a_bia sChanList_Q This function will query the instrument for the bias status for the channels given in the list. The parameter ’b iaschan_list’ is an array of integers with each integer rep resenting one channel. Th e las t nu mber of th e ’[...]

Agilent E5250A Us er ’s Guide, Edition 9 8- 9 VXIplug& play Driv er Driver Func tions hpe5250a_bia sPort This function will select which input port is the bias port o n the specified card. For each card, yo u can specify the same or diff erent Bias Port. This fu nction applies only to the E5252A card. Syntax V iStatus _VI_FUNC hpe5250a_bi asP[...]

8- 10 Agilent E5250 A User ’s Guide, Edit ion 9 VXIplug& play Driv er Driver Fun ctions hpe5250a_clo se This function terminates the softwa re conn ection to the instrument and deallo cates system res ources. It is generally a g ood programmi ng habit to close the instrumen t handle wh en the program i s done usi ng the inst rument. Syntax V [...]

Agilent E5250A Us er ’s Guide, Edition 9 8- 1 1 VXIplug& play Driv er Driver Func tions hpe5250a_clo seList This function will conn ect the input ports to the o utput ports specified by t he channel list. The parameter ’closechan_ list’ is an array of integers with each integer representing one channel. The last nu mber of the ’ clo sec[...]

8- 12 Agilent E5250 A User ’s Guide, Edit ion 9 VXIplug& play Driv er Driver Fun ctions hpe5250a_clo seList_Q This function will query the instrument for the channels closed given in the ’closechan_list’. The parameter ’closechan_ list’ is an array of integers w ith each integer representing one channel. The last nu mber of the ’ cl[...]

Agilent E5250A Us er ’s Guide, Edition 9 8- 1 3 VXIplug& play Driv er Driver Func tions hpe5250a_cmdData_ Q This function passes the cmd_str string to the instrumen t. This entry point will wait for a response which may be any data. Y ou specify the cmd_str and s ize parameters, and get r esult[ ]. Syntax V iStatus _VI_FUNC hpe5250a_cm dData_[...]

8- 14 Agilent E5250 A User ’s Guide, Edit ion 9 VXIplug& play Driv er Driver Fun ctions hpe5250a_cmdInt16A rr_Q This funct ion passes the cmd_str st ring to the instr ument. This command ex pects a response t hat is a def ini te arbi trar y block of 16 bi t in teg ers . Y ou sp ecif y th e cmd _s tr and size param eters, and get result[ ] and[...]

Agilent E5250A Us er ’s Guide, Edition 9 8- 1 5 VXIplug& play Driv er Driver Func tions hpe5250a_cmdInt32A rr_Q This funct ion passes the cmd_str st ring to the instr ument. This command ex pects a response t hat is a defin ite arbi trar y block of 32 bi t i n tege rs . Y ou sp ecify t h e cmd _str and size param eters, and get result[ ] and [...]

8- 16 Agilent E5250 A User ’s Guide, Edit ion 9 VXIplug& play Driv er Driver Fun ctions hpe5250a_cmdReal This funct ion passes the cmd_str st ring to the in strument. Thi s entry poin t passes the string in cmd_ str f ollowed by a space and th en the real in valu e. Note that either an Real32 or 64 can be passed as the Real32 will be promoted[...]

Agilent E5250A Us er ’s Guide, Edition 9 8- 1 7 VXIplug& play Driv er Driver Func tions hpe5250a_cmdReal6 4_Q This funct ion passes the cmd_str st ring to the instr ument. This command ex pects a response that can be r eturned as a 64 bit real. Syntax V iStatus _V I_FUNC hp e5250a_cmdReal6 4_Q(V iSession vi, V iStrin g cmd_str , V iPReal64 re[...]

8- 18 Agilent E5250 A User ’s Guide, Edit ion 9 VXIplug& play Driv er Driver Fun ctions hpe5250a_compenC This funct ion compensa tes capacitance/con ductance dat a measured by us ing Agi- lent 4284A C meter , and returns compensa tion results. If you change the compensa- tion data, create the compensation data file, and specify the data file [...]

Agilent E5250A Us er ’s Guide, Edition 9 8- 1 9 VXIplug& play Driv er Driver Func tions hpe5250a_connRuleSeq The function s ets connection rule and co nnection sequence for the specified card. Syntax V iStatus _V I_FUNC hp e5250a_connR uleSeq(V iSession vi, V iInt16 cardno_ruleseq, V iInt16 rule, V iInt16 sequence); Parame ters vi Instrument [...]

8- 20 Agilent E5250 A User ’s Guide, Edit ion 9 VXIplug& play Driv er Driver Fun ctions hpe5250a_couplePo rt This function sets the couple ports which ar e u sed for m aki ng kel vin conn ect ions on the specified card . The specified input port numbe r w il l be co uple d wi t h the next input port and two output por ts. For each car d, y ou[...]

Agilent E5250A Us er ’s Guide, Edition 9 8- 2 1 VXIplug& play Driv er Driver Func tions hpe5250a_coupleS tate This function controls the couple port mode for the specified card. This function applies only to the E5252A card. Syntax V iStatus _V I_FUNC hp e5250a_coupleS tate(V iSessi on vi, V iInt16 couplest at e_card no, V iInt16 coupl e_s ta[...]

8- 22 Agilent E5250 A User ’s Guide, Edit ion 9 VXIplug& play Driv er Driver Fun ctions hpe5250a_error_message This function translates the error return value fr om an instrument driver function to a readable string . Syntax V iStatus _V I_FUNC hp e5250a_error _message(V iSession vi, V iStatus error_num ber , V iChar _VI_F AR messa ge[ ] ); P[...]

Agilent E5250A Us er ’s Guide, Edition 9 8- 2 3 VXIplug& play Driv er Driver Func tions hpe5250a_errorQueryDetect This funct ion enables o r disables autom atic instrument error checking. If automatic error checking is enabled then the driver will query the instrument for an error at the end of each function call. Syntax V iStatus _V I_FUNC h[...]

8- 24 Agilent E5250 A User ’s Guide, Edit ion 9 VXIplug& play Driv er Driver Fun ctions hpe5250a_esr_Q This function returns the contents of the ESR register . The driver returns the equivalent messages (s ee Parameters). Syntax V iStatus _V I_FUNC hp e5250a_esr_ Q(V iSession vi , V iChar _VI_F AR errstr[ ] ); Parame ters vi Instrument ha ndl[...]

Agilent E5250A Us er ’s Guide, Edition 9 8- 2 5 VXIplug& play Driv er Driver Func tions hpe5250a_ini t This function initializes the software connection to the instrument and option ally verifies that instrumen t is in the system. In add ition, it may perform any necessary actions to place the instrument in its reset state. If the hpe52 50a_i[...]

8- 26 Agilent E5250 A User ’s Guide, Edit ion 9 VXIplug& play Driv er Driver Fun ctions hpe5250a_openCard This function will disconnect all input ports from all output ports for the sp ecified card. Then if bias mode is ON, connects the input bias port to all bias enabled output ports. Syntax V iStatus _V I_FUNC hp e5250a_openC ard(V i Sessio[...]

Agilent E5250A Us er ’s Guide, Edition 9 8- 2 7 VXIplug& play Driv er Driver Func tions hpe5250a_openL ist_Q This function will query the instrument for the channels open given in the ’openchan_ l ist’. The parameter ’open chan_list’ is an array of integers with each integer representing one channel. T he last numbe r of the ’ope nc[...]

8- 28 Agilent E5250 A User ’s Guide, Edit ion 9 VXIplug& play Driv er Driver Fun ctions hpe5250a_reset This function p laces the in strument in a defau lt state. Before is suing this fu nction, it may be n ecessary to s end a dev ice clear to en sure t hat the instrum e nt c an execute a reset. A device clear can b e issued by in voking hpe5 [...]

Agilent E5250A Us er ’s Guide, Edition 9 8- 2 9 VXIplug& play Driv er Driver Func tions hpe5250a_sel ectCompenFile This function specifies capacitance/conducta nce compensa tion data file used to compensat e C/G by usi ng hpe5250a_ compenC. Syntax V iStatus _V I_FUNC hp e5250a_select CompenFile(V iSession vi , V iS tring file_n ame); Parame t[...]

8- 30 Agilent E5250 A User ’s Guide, Edit ion 9 VXIplug& play Driv er Driver Fun ctions hpe5250a_sel f_test This function causes the instrument to perform a self-test and returns the result of that self-test. This is used to verify that an instrument is operating properly . A failure may indicate a poten tial hardware problem. Syntax V iStatu[...]

Agilent E5250A Us er ’s Guide, Edition 9 8- 3 1 VXIplug& play Driv er Driver Func tions hpe5250a_testE xec_Q This function executes the controller test, the front panel tes t, or the relay test for the specified card. Y ou must attach th e r ela y te st adap ter b efor e executing the r elay test. The Front Panel test requires the key to be p[...]

8- 32 Agilent E5250 A User ’s Guide, Edit ion 9 VXIplug& play Driv er Driver Fun ctions[...]

9 Executing Sample Pr ograms[...]

9- 2 Agilent E 5250A User ’ s G uide, Ed ition 9 Executin g Sampl e Pro grams This chapt er explains ho w to use the following sam ple programs: • “Vth and Capacitance Measur ement Program” • “HCI Measurement Pr ogram” The sampl e programs are saved in t he E5250A Prog ram Disk (LIF for matted, 3.5-inch diskette) that is furnished wit[...]

Agilent E5250A Us er ’s Guide, Edition 9 9- 3 Executi ng Sample Pro grams Vth and Capacitance Meas urement Progra m Vth and Capacitance Measurement Program This secti on introduces and explains how to use and m odify the Vt h and Capacitance measurement p rogram. This sec tion consists of the following sectio ns : • “Introd uction” • “S[...]

9- 4 Agilent E 5250A User ’ s G uide, Ed ition 9 Executin g Sampl e Pro grams Vth and Ca pacitance Measu reme nt Program T able 9-2 Vth and Capacitance Measurement Flow S tep D escription 1 Initializes the Instruments: 1. Resets the 4155/ 4156. 2. Resets the 428 4A. 3. Resets and initial izes the E5250A. Config uration Mode : NORMAL Bias Mode : O[...]

Agilent E5250A Us er ’s Guide, Edition 9 9- 5 Executi ng Sample Pro grams Vth and Capacitance Meas urement Progra m Vth M easur ement Setup Measurement s etup of the E5250A and 41 55/4156 fo r this program is as follows: • E5250 A/E5252A S etup: • 4155 /4156 Set up: Below is s umm ary of measurement setup s aved in E5252.MES file. For details[...]

9- 6 Agilent E 5250A User ’ s G uide, Ed ition 9 Executin g Sampl e Pro grams Vth and Ca pacitance Measu reme nt Program Display Setup: Also the DA T A V AR IA VLES fields set VTH and BET A. Auto Analysis Setup: *LINE1: [ TANGENT ] line on [ Y1 ] at a point where [ GRAD ] = [ MAX(GRAD) ] -------------------------------------- --------------------[...]

Agilent E5250A Us er ’s Guide, Edition 9 9- 7 Executi ng Sample Pro grams Vth and Capacitance Meas urement Progra m Setting up the Measur ement Environment Before execu ting the program, you need to set up the measur ement environment. T able 9-3 li sts the required equipment. Connect t he E5250A outp ut to Device U nder T est (DUT). For details,[...]

9- 8 Agilent E 5250A User ’ s G uide, Ed ition 9 Executin g Sampl e Pro grams Vth and Ca pacitance Measu reme nt Program Figure 9-1 Vt h and C Measu rement Setup a nd DUT Connect io n T able 9-4 In strument and DU T Connectio n Instrum ent E 5250A DUT T erminal (via Connector Plate) Model No. Measurement Port Input Port Output Port 4155/4156 SMU [...]

Agilent E5250A Us er ’s Guide, Edition 9 9- 9 Executi ng Sample Pro grams Vth and Capacitance Meas urement Progra m Executin g the Pr ogram Before execu ting the program, do the follo wing: 1. Set the GPIB address for each instrument as follows: • 4155 /4156: 71 7 • 4284A: 7 24 • E5250 A: 722 2. T urn on all instrum ents and the comp uter .[...]

9- 10 Agilent E5250 A User ’s Guide, Edit ion 9 Executin g Sampl e Pro grams Vth and Ca pacitance Measu reme nt Program Execute the program as follows: 1. LOAD the Vth and C measurement program as following example. LOAD "P _MAT" 2. Link the Capacitance Compensatio n Routine by using the LOADSUB ALL statement as in following example. LO[...]

Agilent E5250A Us er ’s Guide, Edition 9 9- 1 1 Executi ng Sample Pro grams Vth and Capacitance Meas urement Progra m Modifying the Program This secti on explains how to modi fy the sample program: • “T o change the GPIB Address” • “T o change the header of th e measurement result report” • “T o ou tput the measuremen t report to [...]

9- 12 Agilent E5250 A User ’s Guide, Edit ion 9 Executin g Sampl e Pro grams Vth and Ca pacitance Measu reme nt Program T o output the measurement r eport to printer Y ou can EDIT to change the following parameters in the Init_setti ng subprogram. Printer must be con nected to computer by u sing GPIB cable. The report as shown in example in Figur[...]

Agilent E5250A Us er ’s Guide, Edition 9 9- 1 3 Executi ng Sample Pro grams Vth and Capacitance Meas urement Progra m T o change the Vth m easurement setup Y ou can EDIT the program to ch ange the following parameters in th e "Constant Defi niti on" b lock of th e Meas_vth subprogr am. T o change the E525 0A input po rt/output po rt con[...]

9- 14 Agilent E5250 A User ’s Guide, Edit ion 9 Executin g Sampl e Pro grams Vth and Ca pacitance Measu reme nt Program T o change the capacit ance measurement setup Y ou can EDIT the program to ch ange the following parameters in th e "Constant Defi niti on" b lock of th e Meas_c subprogr am. T o change the E525 0A input po rt/output p[...]

Agilent E5250A Us er ’s Guide, Edition 9 9- 1 5 Executi ng Sample Pro grams Vth and Capacitance Meas urement Progra m T o use the VFP data upload library If you w ant to use yo ur VFP data in the progr am, change the pr ogram as follow s. Before execu ting the program, you need to create the VFP data and save it to a file on diskett e. And you m [...]

9- 16 Agilent E5250 A User ’s Guide, Edit ion 9 Executin g Sampl e Pro grams Vth and Ca pacitance Measu reme nt Program 2. Remove the ex clamation marks from pr ogram lines shown in the following table, and enter the lines. Subprogram Program Line Meas_vth ! COM /Vfp_com_data/ S etup_data$[14000] Meas_vth "Constant Definition " block ! [...]

Agilent E5250A Us er ’s Guide, Edition 9 9- 1 7 Executi ng Sample Pro grams HCI Measur ement Pr ogram HCI M easurement P rogram This section explain s how to use and mo dify the HCI measur ement sample pro gram. This section consists of the following sectio n s: • “Introd uction” • “Adding the Bias Source Control Rou tine” • “Sett[...]

9- 18 Agilent E5250 A User ’s Guide, Edit ion 9 Executin g Sampl e Pro grams HCI Measur ement Pr ogram T able 9-5 HCI Deg radat ion M eas urem ent F low S tep 2. Determ ines S tress Condition This step determines the gate stress voltage ( Vgstr ) from the Ib -Vgs meas urem ent test result. This Vgstr value will be used in step 5. NOTE T est Devic[...]

Agilent E5250A Us er ’s Guide, Edition 9 9- 1 9 Executi ng Sample Pro grams HCI Measur ement Pr ogram S tep 3. Selects devices valid for the HCI test This step judges whether each device is va lid ac cording to the cur rent leak test result. The IGLEAK.MES and IDLEAK.MES files are used t o set up the 415 5/4156 for this st ep. As show n below , 2[...]

9- 20 Agilent E5250 A User ’s Guide, Edit ion 9 Executin g Sampl e Pro grams HCI Measur ement Pr ogram Use r Func tio n Set up: Display Setup: Also the DA T A V AR IA VLES fields set Vtext and Idlin. Auto Analy sis Funct i on: *LINE1: [ GRAD ] line on [ Y1 ] at a point where [V G ]=[5 ] [] Gradient: [ 0 ] -------------------------------------- --[...]

Agilent E5250A Us er ’s Guide, Edition 9 9- 2 1 Executi ng Sample Pro grams HCI Measur ement Pr ogram S tep 5. Applies stress an d characterizes the parameter s This step p erforms the following: 1. Ap pli es the stress, Vdstr and Vgstr , to t h e va l i d d e vices . Before ru nnin g th e SP_MUX_M pr ogr am, y ou must dete rmin e the Vdstr (drai[...]

9- 22 Agilent E5250 A User ’s Guide, Edit ion 9 Executin g Sampl e Pro grams HCI Measur ement Pr ogram The measurement data is saved to the di skette in disk dr ive connected to the computer with the foll owing file names . • ID XX : Percent change d ata for Idlin • GM XX : Percent change d ata for Gmmax • VTE XX : Relative sh ift data for [...]

Agilent E5250A Us er ’s Guide, Edition 9 9- 2 3 Executi ng Sample Pro grams HCI Measur ement Pr ogram Adding the Bias Sour ce Contro l Routine This sample prog ram requires bi as sources to apply stres s to DUT . So, you must modify t he foll owing bi as sou rce cont rol su bprogr ams t o match y our b ias sources or create new subp rograms. The [...]

9- 24 Agilent E5250 A User ’s Guide, Edit ion 9 Executin g Sampl e Pro grams HCI Measur ement Pr ogram Setting up the Measur ement Environment Before execu ting the program, you need to set up the meas urement environment as follows: 1. Prepare the equipment shown in T able 9- 6, which lists the required equipment to execute the prog ram. 2. For [...]

Agilent E5250A Us er ’s Guide, Edition 9 9- 2 5 Executi ng Sample Pro grams HCI Measur ement Pr ogram Figu re 9-3 In tern al Co nne c tions an d DIP SW Sett ings for E5 255 As T able 9-7 E5250A Input/O ut put Connection 4155/ 4156 Measurement Port E5250A Input Port E5255A Output P ort DUT SMU 1 SMU INPUT 1 Output 1 to 24 (SLOT 1) Gate SMU 3 SMU I[...]

9- 26 Agilent E5250 A User ’s Guide, Edit ion 9 Executin g Sampl e Pro grams HCI Measur ement Pr ogram Figure 9-4 DC HCI Degrad ation T e st Equip ment Connections NOTE Device used to Determine S tress Conditions HCI test program (SP_MUX _M) uses Dev ice1 above to det ermine stre ss voltages ( Vdstr and Vgstr ). So, du ring the prog ram, you are [...]

Agilent E5250A Us er ’s Guide, Edition 9 9- 2 7 Executi ng Sample Pro grams HCI Measur ement Pr ogram Executin g the Pr ogram Y ou should have alread y added the bi as source contr o l routine and set up t he measurement en vironment as desc ribe d pre v ious ly . Befo re ru nnin g the pro gr am , do fo l low i ng: 1. Set the GPIB address of inst[...]

9- 28 Agilent E5250 A User ’s Guide, Edit ion 9 Executin g Sampl e Pro grams HCI Measur ement Pr ogram !-- Drai n stre ss vol tage sho uld be d eter mined by I d-Vd c hara ct eristi cs Vdstr= 5 ! Drain st ress v oltage After defining the value, re-store the program. Figure 9-5 Id -Vd s M eas urem e nt Exam ple[...]

Agilent E5250A Us er ’s Guide, Edition 9 9- 2 9 Executi ng Sample Pro grams HCI Measur ement Pr ogram T o Execute HCI T est Program 1. Load the HCI test progr am (SP_MUX in this example) , and pr ess RUN function key . Then the following message is displayed on the computer screen. Enter di re ct or y na me for sav in g da ta . (d ef au lt : te s[...]

9- 30 Agilent E5250 A User ’s Guide, Edit ion 9 Executin g Sampl e Pro grams HCI Measur ement Pr ogram After each interim character ization, the fr actional chang e in a parameter vers us the stres s time is d isplayed o n GRAPHICS page of t he 4155/41 56 as sho wn in Figur e 9-8. After testing, the test result data is s aved to the diskette in t[...]

Agilent E5250A Us er ’s Guide, Edition 9 9- 3 1 Executi ng Sample Pro grams HCI Measur ement Pr ogram Figure 9- 7 Initial/Interim Characterization Example Figu re 9-8 H CI Deg rad at ion T est Resu lt Ex ampl e[...]

9- 32 Agilent E5250 A User ’s Guide, Edit ion 9 Executin g Sampl e Pro grams HCI Measur ement Pr ogram T o Execute Analysis Pr ogram Before running the program, do the following: 1. Insert the E5 250A Program Disk into th e computer's disk drive. 2. Specify the mass storage device (disk drive) the program disk is inserted by using MSI statem[...]

Agilent E5250A Us er ’s Guide, Edition 9 9- 3 3 Executi ng Sample Pro grams HCI Measur ement Pr ogram 3. Select softkey for parameter fo r which you want to extract Tdc . Analysis result and Tdc will be disp layed on the 4155/4156 screen as shown in Figure 9- 9. Then prog ram pauses. During pause, y ou can save these r esults to a 4155/4 156’ s[...]

9- 34 Agilent E5250 A User ’s Guide, Edit ion 9 Executin g Sampl e Pro grams HCI Measur ement Pr ogram NOTE If you don' t want progr am to pause, change t he parameter in SP_MUX_A program to Pause_to_save=0 before you r un the SP_MUX_A program . Th e pro gram automatically extracts Tdc , saves r esult da ta, an d sto ps. 5. All calculated da[...]

Agilent E5250A Us er ’s Guide, Edition 9 9- 3 5 Executi ng Sample Pro grams HCI Measur ement Pr ogram Modifying the Program This secti on explains how to modify the SP_MUX_M samp le program and P A RAM.MES setup file. • “T o change the GPIB address” • “T o change the 4 155/4156 s etup fil e used” • “T o change Vtci extraction cond[...]

9- 36 Agilent E5250 A User ’s Guide, Edit ion 9 Executin g Sampl e Pro grams HCI Measur ement Pr ogram T o change the 4155/4156 setup file used T o change the 4155/41 56's s etup file used for the HCI test program, modify the setting of the setup file and save it as a new setup file. Then change the following parameter in the "Definitio[...]

Agilent E5250A Us er ’s Guide, Edition 9 9- 3 7 Executi ng Sample Pro grams HCI Measur ement Pr ogram T o change Idlin and Gmmax extraction conditio n T o change Gate voltage and Su bstrate voltage required for Idlin and Gmm ax extraction, do follows. 1. GET the P ARAM.MES se tup file by using the 4155/4156 . 2. Change the value of Subs trate vol[...]

9- 38 Agilent E5250 A User ’s Guide, Edit ion 9 Executin g Sampl e Pro grams HCI Measur ement Pr ogram T o change the test limits Each test device is judged to be valid or not by measuring the gate and drain leakage currents. Change the following parameters in "Limits for leakage tests" block. T o specify the data displayed on the 4155/[...]

10 Specifications[...]

10- 2 Agilent E 5250A User ’ s G uide, Ed ition 9 Specifi catio ns This chapter lists specifications, typical data and supplemental data for the Agilent E5250A Low Leak age Switch Mainframe with the Agilent E5252 A 10 × 12 Matrix Switch and the Agilent E525 5A 24 (8 × 3) Channel Multiplexer . This chapter also provid es the supp lemental data w[...]

Agilent E5250A Us er ’s Guide, Edition 9 10- 3 Specif icati ons General Specif icati ons General Specifications T emp erature Range: Operating: 5 ° C to 40 ° C Sto rage: − 40 ° C to 70 ° C Humidity Range: Operating: 5 % to 80 % RH (non- condensing) Sto rage: 5 % to 90 % RH at 6 5 ° C Altitude: Operating: 0 to 2,000 m (6,500 ft) Storag e : [...]

10- 4 Agilent E 5250A User ’ s G uide, Ed ition 9 Specifi catio ns Agilent E5252A 10x1 2 Matrix Switch Agilent E525 2A 10x12 Mat rix Switch Switch Speci fications These are specifications when the E5252A is installed in mainfr ame. In the table, the conditions are as follows: • A : 23 ° C ± 5 ° C, 5 % to 60 % RH • B : 5 ° C to 18 ° C and[...]

Agilent E5250A Us er ’s Guide, Edition 9 10- 5 Specif icati ons Agilent E 5252A 10x12 Mat rix Switc h Ty p i c a l D a t a Offset Curr ent < 0. 1 pA *1 (Low Leakage I-V Port) < 1000 pA *1 (General I-V Port) Channe l Cros st al k Capaci ta nce < 0.3 pF per chan nel Offset V oltage (EMF) at 5 min *2 < 80 μ V (Low Leakage I-V Port) <[...]

10- 6 Agilent E 5250A User ’ s G uide, Ed ition 9 Specifi catio ns Agilent E5255A 24 (8x 3) Channel Multipl exer Agilent E525 5A 24 (8 x3) Channel Multiple xer Switch Speci fications These are specifications when the E5255A is installed in mainfr ame. In the table, the conditions are as follows: • A : 23 ° C ± 5 ° C, 5 % to 60 % RH • B : 5[...]

Agilent E5250A Us er ’s Guide, Edition 9 10- 7 Specif icati ons Agilent E5255 A 24 ( 8x3) Cha nnel M ultipl exer Channe l Cros st al k Capaci ta nce: < 0.4 p F/channel (Low Leakage I-V Port ) < 5 pF/chan nel (Bias Port) Offset V oltage (EMF) at 5 min *2 : < 8 0 μ V (Low Leakage I-V Port) Guard Capacitance (Low Leak age I-V Port) : < [...]

10- 8 Agilent E 5250A User ’ s G uide, Ed ition 9 Specifi catio ns Access ories Accessories The following specifications ar e app lied for the accessories listed b elow . T emp erature Range Operating: 5 ° C to 40 ° C S torage: − 40 ° C to 70 ° C Humidity Range Operating: 5 % to 80 % RH (non- condensi ng) S torage: 5 % to 90 % RH at 65 ° C[...]

Agilent E5250A Us er ’s Guide, Edition 9 10- 9 Specif icati ons Supplem ental Data when used with Agilent 4 155/415 6 Supplemental Data when used with Agilent 4155/415 6 The below d ata shows degradation of A gilent 41 55/4156 when used wi th Low Leakage I-V Port. Iout is output current in A, and Vo u t is output voltage in V . Supplemental Dat a[...]

10- 10 Agilent E5250 A User ’s Guide, Ed ition 9 Specifi catio ns Suppleme ntal Data when used with Agil ent 41 55/4156[...]

1 1 Err or Messages[...]

1 1- 2 Agilent E5250 A User ’s Guide, Edit ion 9 Error Messa ges This chapter lists an d describes th e error messages for Agilent E5250A. An er ror message cons ists of an error n umber and message. There are two types of error messages : • Standa r d SCPI Erro r Me ssa ges Negativ e error numbers ( Command Erro r , Execution Err or , Device-D[...]

Agilent E5250A Us er ’s Guide, Edition 9 1 1- 3 Error Mess a ges S tandard SCPI Error Messa ges S tandard SCPI Erro r Messages Stan dard SCPI error mess ages have negative erro r numbers. The f ollowing are the standard SCPI error messages for the E5250A: Command Error If synt ax of SCPI command is not valid, a -1 XX error occu rs. The error n um[...]

1 1- 4 Agilent E5250 A User ’s Guide, Edit ion 9 Error Messa ges S tandard SCPI Er ror Mess ages - 103 Invalid separator An illegal ch aracter was received when a separator was expected; for example, the semicolon was omitted between multip le commands in a program mes sage. - 104 Data type err or An improper data type was received; for example, [...]

Agilent E5250A Us er ’s Guide, Edition 9 1 1- 5 Error Mess a ges S tandard SCPI Error Messa ges - 120 Numeric data error An error was detected in a numeric parameter (including the non-decimal numeric types). This error message is r eported when the E5250A canno t determine the more specific er rors - 121 th rough - 128. - 121 Invalid character i[...]

1 1- 6 Agilent E5250 A User ’s Guide, Edit ion 9 Error Messa ges S tandard SCPI Er ror Mess ages - 148 Character data not allowed A character parameter is not allowed for this position. - 150 S trin g data erro r An error was detected in a s tring parameter . This error is reported if the E5250A cann ot determine a more specific error - 151 and -[...]

Agilent E5250A Us er ’s Guide, Edition 9 1 1- 7 Error Mess a ges S tandard SCPI Error Messa ges Execution Err or If syntax of a SCPI command header and param eter is valid, but the comman d cannot be executed due to some cond ition of t he E5250A, a -2 XX error occurs. The error numb er and message are placed in the error queu e, and bit4 of the [...]

1 1- 8 Agilent E5250 A User ’s Guide, Edit ion 9 Error Messa ges S tandard SCPI Er ror Mess ages Device-Dependent E rrors -3 XX errors indicate that an E5250A operat ion did not properly co mplete, possib ly due to an abn orm al har dware or firmware con dition. These negative codes are SCPI defined. For the device-dependent positive error codes,[...]

Agilent E5250A Us er ’s Guide, Edition 9 1 1- 9 Error Mess a ges S tandard SCPI Error Messa ges Query Err ors If the out put queue con trol of the E5 250A detects one of following problems, a -4 XX error occurs:. • An attempt was made t o read data from the output queue when no output data is present or pending. • Data in the output q ueue ha[...]

1 1- 1 0 Agilent E5250 A User ’s Guide, Ed ition 9 Error Messa ges E5250 A Speci fic Err or Mes sages E5250A Specific Error Messages These are the E525 0A-specific errors that ar e not defined by SCPI. Th ese errors indicate t hat an E5250A op eration di d not proper ly complete du e to card, channel , port, or mo de errors. For the SCPI defined [...]

Agilent E5250A Us er ’s Guide, Edition 9 1 1- 1 1 Error Mess a ges E5250 A Speci fic E rror Mes sages E5250A Channel R elated Err ors Error Number Error Messag e and Description 2000 Invalid card number W rong card number is specified in card number or channel list parameter . Make sure card is properly ins talled in the correct E5250A slot . 200[...]

1 1- 1 2 Agilent E5250 A User ’s Guide, Ed ition 9 Error Messa ges E5250 A Speci fic Err or Mes sages E5250A Ca rd/Mode/Po rt Related Errors Err or Number E rror Message and Description 3000 Card0 initia liza tion fail The E5250A may be defective. Contact your nearest Agilent T echnologies service center . 3001 Card1 initia liza tion fail The E52[...]

Agilent E5250A Us er ’s Guide, Edition 9 1 1 - 13 Error Mess a ges E5250 A Speci fic E rror Mes sages 3013 Canno t con nect multipl e chan nels in SROUT e mode Incorrect channel list for Singl e connection ru le. For Single connection rule, an input port cannot be c onnected to multiple output ports, and an output port cannot be connected t o mul[...]

1 1- 1 4 Agilent E5250 A User ’s Guide, Ed ition 9 Error Messa ges E5250 A Speci fic Err or Mes sages[...]

12 SCPI Com mand Summary[...]

12- 2 Agilent E 5250A User ’ s G uide, Ed ition 9 SCPI Comm and Su mmary This chapter is a quick reference for the SCPI subsystem commands available for Agilent E5250A. The comm ands are in alph abetical order . For details about these commands, see Chapter 7. For how to specify th e channel_list param eter , see Chapter 5. T extual Notation for [...]

Agilent E5250A Us er ’s Guide, Edition 9 12- 3 SCPI Comm and Sum mary Comm and Descriptio n :DIAG:TEST:CARD:CLE ca r d_num ber Clears re lay test result (pass/fail) of specified c ard. car d_numb e r : 1 , 2 , 3 , 4 , or ALL :DIAG:TEST:CARD[:EXEC]? card_number Executes relay t est, then returns result: 1 : fail car d exists, 0 : pas s car d_numb [...]

12- 4 Agilent E 5250A User ’ s G uide, Ed ition 9 SCPI Comm and Su mmary [ :ROUT ] :BIAS:CHAN:ENAB:CARD car d _number Bi as en ables all ch annels in the spe cified card . car d_numb e r : For Auto Config mode : 0 or ALL For Normal Config mode: 1 , 2 , 3 , 4 , or ALL [:ROUT]:BIAS:CHAN:ENAB[:LIST] (@ channel_li st ) Bias enabl es t he specifi ed c[...]

Agilent E5250A Us er ’s Guide, Edition 9 12- 5 SCPI Comm and Sum mary [: ROUT ] :CLOS:CARD? ca r d_numb er Returns channel_list of all closed channe ls for th e specified ca rd. "Close d cha nnel" me ans an input port connec ted to a n outp ut port. car d_numb e r : For Auto Config mode : 0 For Normal Config mode: 1 , 2 , 3 , or 4 [ :RO[...]

12- 6 Agilent E 5250A User ’ s G uide, Ed ition 9 SCPI Comm and Su mmary [ :ROUT ] :CONN:SEQ? car d_n umber Returns the connection s sequenc e mode of the specified ca rd: NSEQ : No-S equenc e mo de BBM : Break-Before-Make mo de MBBR : Mak e-Before -Bre ak mode. car d_numb e r : For Auto Config mode : 0 For Normal Config mode: 1 , 2 , 3 , 4 [ :RO[...]

Agilent E5250A Us er ’s Guide, Edition 9 12- 7 SCPI Comm and Sum mary [ :ROUT ] :COUP [ :STAT]? ca r d_num ber Returns Couple Mode of s pecified card. 0 : Couple M ode is OFF 1 : Couple M ode is ON. car d_numb e r : For Auto Config mode : 0 For Normal Config mode: 1 , 2 , 3 , 4 [ :ROUT ] :FUNC channel_ conf ig Sets the ch ann el conf ig uration m[...]

12- 8 Agilent E 5250A User ’ s G uide, Ed ition 9 SCPI Comm and Su mmary :SYST:CDES? car d_numb er Returns a de scription of the specified c ard: mode l numbe r an d input/ ou tp ut po r t info . car d_numb e r : For Auto Config mode : 0 For Normal Config mode: 1 , 2 , 3 , or 4 :SYST:CPON car d_numb er Resets t he spec ified card to the power-on [...]