Seiko Instruments MT-17E-003-D manuale d’uso

MT-17E-003-D Seiko Instruments Inc. Dec. 2001 Copyright 2001 Seiko Instruments I nc. All right s reserv ed. Printed in Japan. STP-H600/H1000 Series Turbomolecular Pump INSTRUCT ION MANUAL (Third Edition-d) Read through the Safety Prec autions of this Manual carefully before using the STP pump. Keep this Manual in a place where y ou can quickly acce[...]

STP-H600/H1000 Ser ies Instruction Manual SAFETY PRECAUTIONS The Safety Precautions in t his Manual const it u te guidelines t o prot ect operat ors, t he STP pump and its peripheral equipment. To avoid personal injury and prev ent product and/or peripheral equipment damage, observe the Safety Precautions as w ell as t he general safety rules (y ou[...]

STP-H600/H1000 Ser ies Instruction Manual WA RNIN G ◇ Check the properties of the gas to be used, re ferring to the Material Safety Dat a Sheet (MSDS) you obtain from the gas supplier. Follow any and all safety precaut ions and/ or recommendations instructed by the gas supplier. Take appropriate measures specified in the MSDS to prevent a problem[...]

STP-H600/H1000 Ser ies Instruction Manual C A U TI O N ◇ NEVER use any gas that is not specified as usable in t his M anual. The use of such gas may corrode the STP pump and damage it. ◇ A hazardous liv e v oltage may exist at connect or/ t erminal that marked . DO NOT touch t he t erminal. Doing so may result in electr ic shock. W hen operatin[...]

STP-H600/H1000 Ser ies Instruction Manual C A U TI O N ◇ DO NOT put foreign objects int o t he STP pump. Doing so may result in product damage. ◇ NEVER turn OFF t he primary pow er (DO NOT sw it ch the breaker “OFF” ) w h ile t he STP pump is rotating. Doing so may result in product damage. ◇ Perform investigations into probable causes an[...]

STP-H600/H1000 Ser ies Instruction Manual INTRODUCTION Thank you very much for pu rchasing Seiko Instruments’s turbomolecular pump. The turbomolecular pump is designed to be inst alled in the vacuum equipment in to exhaust gases from it. This manual covers all items necessary to ensure safe installation, operat ion and maintenance of the followin[...]

STP-H600/H1000 Ser ies Instruction Manual PRECAUTIONS 1) No part of this manual may be reproduced in any form by any means without prior written perm ission from Seiko Instrument s. 2) Seiko Instrument s pursues a policy of continuing improvem ent in design and performance of this product. The right is, th erefore, reserved to vary specifications a[...]

STP-H600/H1000 Ser ies Instruction Manual LIMITED WARRANTY This WARRANTY applies to t he customer t o whom S eiko Instrument s has delivered this product. 1. WARRANTY PERI OD: Seiko Instrument s warrants this prod uct against defects for a period of two (2) years from the date of delivery or during the period specified in the agreement made by and [...]

STP-H600/H1000 Ser ies Instruction Manual indication (“W ARNING” message) on the LCD display; 16) Overhaul and replacement of maintenance parts; 4. SPARE PARTS : ● Fuse and air cooling fan for control unit ● Touch down bearing ● Heater 8[...]

STP-H600/H1000 Ser ies Instruction Manual TABLE OF CONTENTS SAFETY PRECAUTION INTRODUCTION LIMIT ED W A RRANTY 1 Precautions for Safe Operation of the STP Pump ..................................... 1-1 1.1 Usable Gases ............................................................................................................ 1-1 1.2 Maintenance Pr[...]

STP-H600/H1000 Ser ies Instruction Manual 5.5.4 Starting the STP Pu mp af ter Stopping ......................................................... 5- 3 5.5.5 Powering OFF .............................................................................................. 5-4 5.6 Remote Operation .............................................................[...]

STP-H600/H1000 Ser ies Instruction Manual 12 Maintenance and In spection .................................................................... 12-1 12.1 Replacing the Internal Battery ................................................................................. 12-1 12.2 Inspecting the Ai r Cooling Fan ...........................................[...]

STP-H600/H1000 Ser ies Instruction Manual TABLES Table 3.1 T ightening to rque of bolt ....................................................................................... 3-8 Table 3.2 Max imum Torque pr edicted and Recom mended s ecuring bolt fo r inlet por t flange ................................................. 3-9 Table 3.3 Num ber of Cla[...]

STP-H600/H1000 Ser ies Instruction Manual FIGURES Figure 2.1 Exam ple of Li fting the ST P Pum p ......................................................................... 2-1 Figure 3.1 Configuration of the STP Pum p ............................................................................ 3-2 Figure 3.2 Installation of the ST P Pu m p to the Va[...]

STP-H600/H1000 Series Instruction Manual 1 Precautions for Safe Operation of the STP Pump 1.1 Usable Gases Chlorine or fluorine system gases can be used in chemical specific pumps (STP- H600C/H1000C or other models). When you use gases including alkaline metals, but excluding Li, gases including Ga, Hg, In, or Sn, or HBr, contact Seiko Seiki. WA RN[...]

STP-H600/H1000 Series Instruction Manual 1.3 Inspection Precautions Perform inspections of the STP pump and the S TP control unit (check of the air cooling fan and reset of the "BATTERY NG" lamp), followin g Section 12, "Maintenance and Inspection" When performing inspections (check of the ai r cooling fan and reset of the "[...]

STP-H600/H1000 Series Instruction Manual (3) Heavy Product Caution Label This label is affixed to the product with a mass of 20 kg or more. Follow the precautions of Section 2, "Unpacking " so as not to cause any accident during handling. (4) STP Pump Installation Warning Label This label describes installation of the STP pump. Install th[...]

STP-H600/H1000 Series Instruction Manual (6) Connector Caution Label ◇ This label describes lock of the connector. ◇ This label instructs operators to prevent th e connectors from being disconnected while the STP pump is in operation. (7) STP Control Unit Safety Instruction Label This label describes instructions be fore operating the STP contr[...]

STP-H600/H1000 Series Instruction Manual (9) Battery Instruction Label This label instructs operators to replace batteries once a year. The next replacement date of batteries is specified upon delivery of the STP pump. Record the next replacement date (after one year ) of batteries in the blank of the label when replacing them. This label describes[...]

STP-H600/H1000 Series Instruction Manual (12) Hot Surface Warning Label This label instructs operators so as not to touch the hot surface of the STP pump. The use of the baking heater (optional acce ssory) may lead to a considerable rise in temperatures outside the STP pump. This label warns operators so as not to burn hands. (only when using the b[...]

STP-H600/H1000 Ser ies Instruction Manual 2 Unpacking 2.1 Unpacking the STP Pump Check the following bef ore unpacking t he S TP pum p. 1) Check the package for bruises, breakage, wetness, etc. If there is any abnormality/error or it is judg ed necessary to return the product, contact Seiko Se iki. 2) Check the contents of the package. See Section [...]

STP-H600/H1000 Ser ies Instruction Manual 2.2 Unpacking the STP Control Unit Check the following bef ore unpacking t he S TP control unit . 1) Check the package for bruises, breakage, wetness, etc. If there is any abnormality/error or it is judg ed necessary to return the product, contact Seiko Se iki. 2) Check the contents of the package. See Sect[...]

STP-H600/H1000 Ser ies Instruction Manual 3 Installation of the STP pump 3.1 Name and Function of Each Part (1) Inlet Po rt Flange (ICF *1 , VG *2 , ASA , ISO, etc.) l Connected to t he v acuum equipm ent ( at t he hig h v acuum side) . C A U TI O N ◇ A splinter shield is attached t o t he inlet port flange to prev ent foreign particles from fall[...]

STP-H600/H1000 Ser ies Instruction Manual ( 1 ) I nl et Port Flange ( 2 ) Outl et Por t F lange ( 6 ) Cool i ng Wate r Por t ( 6 ) Cooli ng Water Por t ( 3 ) STP Connec t or ( 4 ) Motor Connector ( 5 )P u r g eP o r t ( 7 )E m e r g e n c yV e n t . Val ve ( 8 ) Ground Terminal Opti onal Accessory ( 9 ) Temper at ur e Se nsor Connec t or Figure 3.1[...]

STP-H600/H1000 Ser ies Instruction Manual 3.2 Precautions Before Installation 3.2.1 Operating Environment C A U TI O N ◇ Chlorine or fluorine system gases can be used in chemical specific pumps (type C). W hen you use gases including alka line metals, but excluding Li, gases including Ga, Hg, Sn, or HBr, cont act Seiko Inst ruments. ◇ NEVER use[...]

STP-H600/H1000 Ser ies Instruction Manual 3.2.2 Inst allation Area Leave enough space for the following in additi on to that for the STP p ump: · Space for maintenance and inspection · Space for connecting cables ◇ The minimum bending radius of the STP connection cable is 150 mm (see Figure 16.1, "External Appearance of t he STP Pump"[...]

STP-H600/H1000 Ser ies Instruction Manual 3.3 How to I nst all t he STP Pump Install the ST P pump to the vacu um equipment as shown in Figure 3.2. The STP pump can be ins t al led thr ough t he damper (opt i onal accesso ry) . Pow er Cable To Power Supp ly Con tr ol U ni t Leg Out le t Port Pu mp Dry Pump ,e tc . Vacuu m Valv e In le t Por t Fl an[...]

STP-H600/H1000 Ser ies Instruction Manual NOT I CE ◇ The STP pump cannot be used with the outlet port open t o at mospheric air. Always use t he auxiliar y pump (dry pump or similar one) . ◇ Use an auxiliary pump w it h a pumpi ng speed of 240 L/min or mor e . ◇ Depending upon the ty pe of t he auxiliar y pum p used, oil vapor may cont aminat[...]

STP-H600/H1000 Ser ies Instruction Manual 3.3.2 STP Pump Installation Posit ions The STP pump can be installed vert ically , horizontally, upside- down and slanted. STP Pump Ups i de- down Hor i zon ta l Sla nte d Ver t i ca l Figure 3.3 STP Pump Installation Posit ions When installing the S TP pum p in a horiz o nt al or slant ed posit ion, it is [...]

STP-H600/H1000 Ser ies Instruction Manual 3.3.3 How to Secure t he STP Pump ◇ The STP pump is provided with a high-speed rotor. The worst-case failure may result in a jump in rotational torque leading t o personal in jury or peripheral equipment damage. The method of securing the STP pump w ill depend on t he inst allat ion requirements. Secure t[...]

STP-H600/H1000 Ser ies Instruction Manual 1) When securing the inlet port with bolts Refer to Table 3.2 for torque in pump abn ormality and recommended securing bolts. Secure the inlet port f lange w it h all of t he bolt holes of t he size specif ied in t he Inlet Port Flange Standard. Secure the base with all 8 screw- holes f or leg s or all 8 at[...]

STP-H600/H1000 Ser ies Instruction Manual 2) When securing the inlet po rt fl ange with cl aw clamps Refer to Table 3.2 for rotational torque. When securing the inlet po rt fl ange with on ly the claw clam p, the vacuum equipment can not withstand th e maximum rotational torqu e generated by the worst-case fa ilure. To ma ke the vac uum equi pment [...]

STP-H600/H1000 Ser ies Instruction Manual 3) When installing the damper in the inlet port f lang e Refer to Table 3.2 for rotational torque. In case o f using a d amper, secu re the base wi th all 8 scre w-holes for l egs or all 8 attached legs. Fol low “CAU TION” on p age 3-8 about legs and bolts for securing the base. When the base cannot be [...]

STP-H600/H1000 Ser ies Instruction Manual 3.3.4 Vacuum Piping ◇ DO NOT open the STP pump through t he flange to at mospheric air while t he STP pump is running. If atmospheric air flows into the STP pump, it may not function normally . ◇ Depending upon the ty pe of t he auxiliar y pump used, atmospheric air may rever se flow into the STP pump w[...]

STP-H600/H1000 Ser ies Instruction Manual (1) Piping at t he Inlet Port Flang e Attach the in let port to the hi gh vacuum sid e. Maximum working pressure (Pressure at the inlet port flange applicable continuously) l 67 Pa [0.5 Torr] (for water cooled) l 5.3 Pa [4 × 10 -2 Torr] (for air cooled) l 0.9 Pa [7 × 10 -3 Torr] (for natural air cooled) l[...]

STP-H600/H1000 Ser ies Instruction Manual 3.3.5 Connecting the Emergency Vent . Valve The emergency vent. valve stops the S TP pump by introducing g ases if any abnormality/error occurs in the STP pump. Connect the emergency vent. valve (contain ed in the attached accessories) to the purge port as shown in Figure 3.7. Note that the side of the emer[...]

STP-H600/H1000 Ser ies Instruction Manual Emergenc y Vent . Va lve Filter S id e Pur ge Por t KF10 Dry N 2 Gas or Ot he r Dry N 2 Gas o r O th e r Figure 3.8 Connecting the Purge Port and Emergency Vent . Valv e 3.3.7 Connecting the Gr ound Cable Connect the ground cable (yellow/green) between the ground terminal of the STP pump and the ground term[...]

STP-H600/H1000 Ser ies Instruction Manual 4 Installation of the STP Control Unit 4.1 Name and Function of Each Part 4.1.1 Front Panel (1) "PO W ER O N/OFF" Sw itch (illuminated alt ernat e push but t o n sw it ch, green LED) l Press thi s switch to p ower ON/OFF th e STP pu mp (MANUA L opera tion only). l The POWER ON/OFF b uilt-in lamp l[...]

STP-H600/H1000 Ser ies Instruction Manual (8) " O VER TEMPERATURE" Lamp ( r e d LED ) l Lights whe n any of the fol lowing ab normaliti es occurs: a) When the motor or electromagnet overheats (110 ℃ or higher). b) When the STP connection cable is not connected. (9) " BATTERY O PERATIO N" Lamp (re d LED ) l Lights whil e the po[...]

STP-H600/H1000 Ser ies Instruction Manual (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (11) (12) Figure 4.1 STP Control Unit Front Panel 4-3[...]

STP-H600/H1000 Ser ies Instruction Manual 4.1.2 Rear Panel C A U TI O N ◇ A hazardous liv e v oltage may exist at connect or/ t erminal that marked . DO NOT touch t he t erminal. Doing so may result in electr ic shock. W hen operating connection/disconnection to terminal, alway s power OFF the STP pump (Switch the breaker "OFF"). (13) A[...]

STP-H600/H1000 Ser ies Instruction Manual (22) START/STOP TB6 Terminal Block A maximum voltage : E qual to the in put voltage of this termi nal block. (MAX 250VAC) l For remote control. For details concerning remote control terminal blocks (19) to (22), see Section 8, "Remote Input/Output Si gnal Terminal B locks." (23) "MANUAL/REMOT[...]

STP-H600/H1000 Ser ies Instruction Manual 4.1.3 Inside of the STP Cont rol Unit (25) Inverter l This is a three-p hase transis tor-inverter which starts/s tops the STP p ump. (26) Fuses 3 to 9, 11, and 12 l These fuses protect as follows: F3 and 4: 250 V, 5 A (for control power protection) F5 to 7 : 250 V, 10 A, arc-extinguishing fuses (for I/O TB2[...]

STP-H600/H1000 Ser ies Instruction Manual (25) (26) (30) (27) (28) (29) (30) (31) (32) Figure 4.3 Inside of the STP Cont rol Unit 4-7[...]

STP-H600/H1000 Ser ies Instruction Manual 4.2 Precautions Before Installation 4.2.1 Operating Environment Install the STP control unit in a place meet ing t he f ollow ing requirements: Ambient Temperature 0 ℃ to 40 ℃ Ambient Relat iv e Humidi ty 30 to 95% (no dew condensing) Environmen t l A place free of exposure to direct sunlight. l A place[...]

STP-H600/H1000 Ser ies Instruction Manual 4.2.2 Inst allation Area Leave enough space for the following in a dditi on to that for the STP control unit. · Space for maintenance and inspection · Space for inlet and outl et of air for cooling - Top and side: 5 cm or more - Bottom: 2.4 cm or more (hei ght of the rubber foot) · Space for connecting t[...]

STP-H600/H1000 Ser ies Instruction Manual 4.3 Attaching the STP Cont rol Unit Front Panel to a Rack The dimensions of the S TP control unit f ront pa nel conform to JIS. Therefore, this panel can be attached to any typ e of commercially-available racks. Attach the front p anel unit to th e rack according to the follo wing steps: 1) W hen attaching [...]

STP-H600/H1000 Ser ies Instruction Manual 4.4 Cable Connection 4.4.1 Name and Dimensions of Each Cable φ 40 STP Co n t r o l U n i t S i d e STP P u m p S i d e φ 30 φ 30 STP Connect ion Cab le Moto r Connect ion Cabl e Ground Cab le E merg ency V ent. Valve C able 45 Pin (p in) 41 Pin (socket) 5 Pin (pin) 5P i n( s o c k e t ) φ 22 8P i n ( p [...]

STP-H600/H1000 Ser ies Instruction Manual Y(N [L2] ) blue G(GN D [ ] ) yel low/ green X(L[ L1] ) bro wn 9.8 9.8 φ 54 72. 3 Power Cabl e Crimp-Typ e Terminal Lug (M4 *1 ) 2. 5 mm 2 × 3core (brow n, bl ue, yell ow/green) Power Side STP C ont ro l Uni t Side 3p in (p in ) Plug t ype NEMA L6- 30 (a) wit hout the Power Pl ug (b) w ith the P ow er Plu [...]

STP-H600/H1000 Ser ies Instruction Manual 4.4.2 How to Connect t he Cables C A U TI O N ◇ W hen connecting/disconnecting cables, alway s pow er OFF the STP pump (switch the breaker "OFF"). Failure to do so may result in elect ric shock or product damage. ◇ W ith each connector, align the position of the guide key and insert t he pin v[...]

STP-H600/H1000 Ser ies Instruction Manual 2) Connecting the STP Connect ion Cable Connect the socket side of the STP conne ction cable to the STP connector of the STP pu mp and connect the p in sid e to "P.CON NECT OR CON5A " of the STP control unit. C A U TI O N ◇ Always use t he STP pump, STP control unit and the STP connection cables[...]

STP-H600/H1000 Ser ies Instruction Manual 5) Connecting Primary Pow e r (Primary Side) Cable Connect pow er cable to t h e " AC POWER TB1 " on the STP control unit rear panel as shown in Table 4.1. Table 4.1 Connecting Primary Power Cable TB1 Pin No. Cable Color Remarks 1 [L(L1)] Brown 2 [N(L2)] Blue Single phase 200 to 240 V AC ± 10% 13[...]

STP-H600/H1000 Ser ies Instruction Manual TB1 Mag n i f i ed Primary P ower C able C ab le Fitti n g To ol Gr ound Cab le fo r Cove r TB1 Cov er part : Secur e us ing a t ta ched scr ews Figure 4.8 How to Secure Primary Pow er Cable 4-16[...]

STP-H600/H1000 Ser ies Instruction Manual 5 How to Start/Stop the STP Pump C A U TI O N ◇ NEVER connect or disconnect any cables while the power is O N. ◇ NEVER turn the pr imar y power OFF ( switch the br eaker "O FF" ) w hile the STP pump is in rotation. ◇ DO NOT release the inlet port flange or out let port flange into the atmosp[...]

STP-H600/H1000 Ser ies Instruction Manual 5.3 Start Procedures Start the auxiliary pum p befo re or sim ultaneously w it h st art of t he S TP pum p. Open the vacuum valv e locate d at the out let port f lang e side af t er st art ing t he aux iliary pump. NOT I CE ◇ DO NOT open the v acuum valv e without operat ing t he auxiliar y pump. Doing so[...]

STP-H600/H1000 Ser ies Instruction Manual There are two methods of oper ating the STP pump: MANUAL and REMOTE. Select one which fits y our vacuum equipment. 5.5 Manual Operation Slide the "MANUAL/REMOTE" changeover sw itch on the rear pa nel to "MANUA L." 5.5.1 Powering ON 1) Switch ON the breaker on the rear panel (to prevent i[...]

STP-H600/H1000 Ser ies Instruction Manual 5.5.5 Powering OFF 1) When all of t he " ACCELERATIO N," "NO RMAL OPERATION" and " BRAK E" lamps are off: Press the "POWER ON/OFF" swi tch. The swi tch pops up into the unloc ked position, the magnetic bearing stops, and th e rotor lands (POWER OFF state). The "P[...]

STP-H600/H1000 Ser ies Instruction Manual 5.6 Remote Operation Slide the "MANUAL/REMOTE" changeover switch on the STP control unit rear panel t o "REMO TE." 5.6.1 Powering ON Switch ON the breaker on the STP control unit rear panel, (to prevent incorrect operation, a metal fitti ng is attached to the breaker. Loosen the screw, l[...]

STP-H600/H1000 Ser ies Instruction Manual 5.6.4 Powering OFF When all thr e e ( "ACCELERATION", " NORMAL OPERATIO N" and " BRAKE") lamps are off, switch the breaker OFF on the rear panel. The magnetic bearing stops, and the rotor lands. The POWER ON/OFF switch built-in lamp goes out. C A U TI O N ◇ NEVER switch OFF t[...]

STP-H600/H1000 Ser ies Instruction Manual 6 Safety Functions When an Abnormality /Error Occurs The STP pump is provided wi th safety func ti ons for various abnormalities/errors (See Tables 6.3 and 6.4, "Safety Functions"). For troubleshooting, see Section 6.2, "Restart ing Af t e r Any S afely F unction O perates" and Section 1[...]

STP-H600/H1000 Ser ies Instruction Manual <Operation after a Power Recovery> 1) MANUAL Operation The STP pump continues decelerating even after a p ower recovery. Press the "ST ART" switch to reaccelerate the STP pu mp. 2) REMOTE Oper ation · When the STA RT signal is inpu t to the REMOTE input termi nal at a power recovery to reac[...]

STP-H600/H1000 Ser ies Instruction Manual 6.1.2 Abnormal State of Magnetic Bearing When the magnetic bearing does not function normally due to a breakage of the STP connection cable, disconnection of co nnectors or any abnormality/ error of the STP control circuit, the rotor falls on the tou ch down bearin g. Simultaneously, the emergency vent. val[...]

STP-H600/H1000 Ser ies Instruction Manual 6.1.8 Abnormal Battery Volt age When battery capacity became l ess than operating limit value or there was connection mi stake, there may be the thing th at battery abnormality is detected . When battery abnormality was detected, the STP p ump does not operate even if the STP pump START operation is perform[...]

STP-H600/H1000 Ser ies Instruction Manual 6.2 Restarting after Any Safety Funct ion Operates 1) In cas e of a power fai lure: E stablish a sequen ce so that power can be su pplied to th e STP control unit i mmediately after a power recovery. 2) In case the "F AILURE " lamp lights due to an overload of the inverter (the STP pump continues [...]

STP-H600/H1000 Ser ies Instruction Manual 3) Other Cases After the STP p ump stops th oroughly, po wer OF F, switch th e breaker "OFF" and remove the cause of the abnormality/error. Then, restart the STP pump and check if it operates correctly. NOT I CE ◇ For probable causes and troubleshooting, S ee Section 15, "Troubleshoot ing.&[...]

STP-H600/H1000 Ser ies Instruction Manual 6.3 Operation of the Emergency Vent . Valv e The emergency vent. valve is opened imme diately after an abnormality/error in the magnetic bearing, excessive vibration or any other abnormality/error is found. Gases (dry N 2 gases or other) are introduced through the emergency vent. valve into the STP pump. At[...]

STP-H600/H1000 Seri es Instruction Manual Table 6.3 Safety Funct ions [E.V. used herein is the abbrev iation for Emergency Vent.] Abnormality /Error Operation state of safety functions Lamp indication REM OTE output signal State of the STP pump Probable causes of an abnormality/error Power failure Failure time: 2 seconds or more (for details, refer[...]

STP-H600/H1000 Seri es Instruction Manual Abnormality /Error Operation state of safety functions Lamp indication REM OTE output signal State of the STP pump Probable causes of an abnormality/error Overheating inside the STP pump Temperature of the STP pump motor: 110 ℃ or more "OVER TEMPERATURE" "FAILURE" "ALARM" The[...]

STP-H600/H1000 Ser ies Instruction Manual 7 Gas Suction, Cooling and Baking the STP Pump 7.1 Gas Suction WA RNIN G ◇ W hen sucking gases, they may remain in the STP pump. Intr oduce a purge gas and then exhaust all gasses. Residual gases in the STP pump may cause an accident when t he STP pump is removed. Confirm the characteristics of gases to b[...]

STP-H600/H1000 Ser ies Instruction Manual 7.2 Cooling the STP Pump There are two methods for cooling: Water cooling and Air cooling. When sucking gases, cool the STP pump in a ccordance with the oper ating p ressure range. Also , when pe rforming bak ing, always cool the ST P pump . Select the best one which fits your vacuum equipment. 7.2.1 W ater[...]

STP-H600/H1000 Ser ies Instruction Manual 7.2.2 Air Cooling Method When water cooling is not av ailable, an air cooling unit ( opt ional accessory) can be used . Foll ow the step s belo w: 1) Remove the water cool ing unit (it i s attached with the fou r M8 *1 screws). 2) Attach the ai r cooling unit us ing s crew holes for the water cooling unit. [...]

STP-H600/H1000 Ser ies Instruction Manual 7.3 Baking the STP Pump To attain a lower p ressure in a sh orter time and red uce the exhaust time, bake th e vacuum equipment and S TP pum p. WA RNIN G ◇ The surfaces of the STP pump and its peripheral equi pment w ill become extremely hot w hen per for ming baking. NEVER touch t hem with bare hands. C [...]

STP-H600/H1000 Ser ies Instruction Manual Baki ng Heater C oo lin g W a ter P ort Cooli ng Water Po rt Wa t e r Co o l i n g Un i t (St and ar d Acces sor y ): Used when w ate r coo led A ir C oo lin g Un it (Opti onal Accesso ry) : Used wh en ai r co ol ed Thi s l abel i s att ached to t he baki ng heater . (Opti onal Accesso ry) ・警告 高温?[...]

STP-H600/H1000 Ser ies Instruction Manual 7.3.2 Interlocking the STP Pump Operation w ith Baking Follow the steps below to interlock the STP pump operation with baking (read through Section 8, " Remote Input/Ou tput Signal T erminal Blocks ," then start operation). C A U TI O N ◇ Check the rated voltage of the baking heater before use. [...]

STP-H600/H1000 Ser ies Instruction Manual 8 Remo te Input/Output Signal Terminal Blocks 8.1 I/O T B2 Term inal Block This is a terminal block for a re mote output s ignal. Use it i n accordance with Table 8.1 and Figure 8.1. The terminal block function s in both the MANUAL and REMO TE operations. The screw for the terminal is M3 *1 . Five abbreviat[...]

STP-H600/H1000 Ser ies Instruction Manual Terminal Description (6) (5) N . O OUT FAN Terminal for connecting the air cooling unit. The voltage input to AC. PO WER termi nal ((19)-(20)) is output to thi s terminal when th e STP pump is in acceleration or rated operation. The voltage is cut OFF when the STP pump is under the BRAKE state ( S ee Sectio[...]

STP-H600/H1000 Ser ies Instruction Manual I/ O T B 2 : R e m ote O utput Sign al Te rm inal Bloc k 19 20 1 2 3 4 5 6 7 8 9 10 N. O :N orm al Ope n N.C :N orm al Clos e COM :Co m mon HEATER N . OO U T N . OO U T FAN N . OO U T N . OO U T Term ina l fo r conne ct i ng t he bak ing he at er Term ina l fo r t he aux i l i ar y pum p Ter mina l for t he[...]

STP-H600/H1000 Ser ies Instruction Manual Table 8.2 shows rated contacts for relays CR1 to 4, CR7, and CR10 (S ee Figure 8.1) and CR8 (See Figure 8.4). Table 8.2 Rated Contact s for Relay s CR1 to 4, CR7, CR8 and CR10 Resistance Load (cos φ =1) Induction Load (cos φ =0.4) (L/R=7 ms) Rated Load 250 V AC 10 A 30 V DC 10 A 250 V AC 5A 30 V DC 5A Rat[...]

STP-H600/H1000 Ser ies Instruction Manual 3 4 R.P UM P NO. OUT AC Pow e r Rel ay R.P R.P : Auxi l i ary Pum p Figure 8.2 Exampl e of Connecting I/O TB2 R. Pum p Terminal C A U TI O N ◇ W hen connecting optional power (over 25 V AC or ov er 60 V DC) t o t erminals (1) to (6), (19) and (20), secure the re mote cable using the att ached cable fitt i[...]

STP-H600/H1000 Ser ies Instruction Manual 8.2 D C I/O TB3 T ermin al Bl ock This is a terminal block for a remote inp ut/outp ut s ignal. Us e it in accord ance with T able 8.4 and Figure 8.4. Term inals excluding the HE ATING terminal function in either case of the REMOTE/MANUAL operation. The screw for the terminal is M3 *1 . Four abbreviations a[...]

STP-H600/H1000 Ser ies Instruction Manual DC I / O TB 3 : 1 3 N.O : Norm al Open N.C : N orm al Close IN : Inpu t Terminal O UT : O utput T er min al A uxili ar y p u m p ther m al switch input t ermina l Rota ti on i nhib i t si gnal input t ermina l Baking hea ter con tro l si gnal inpu t te rminal E mergency ven t . val ve open si gnal ou tpu t [...]

STP-H600/H1000 Ser ies Instruction Manual 8.3 START STOP TB5 Terminal Block This is a terminal block for a contact type remo te input signal. Use it in accordance w it h Table 8.5 and Figure 8.5 (See Se ction 5. 6. 2, "Starting/Stopping th e STP Pump"). The terminal block operates only during the REMOTE op eration. The screw for the termi[...]

STP-H600/H1000 Ser ies Instruction Manual 8.4 START/STOP TB6 Terminal Block This is a terminal block for a volt age type remote inp ut signal. Use it in accordance with Tabl e 8.6 and Figure 8.6 (S ee S ection 5. 6. 2, “S tarting/ S t opping the STP Pump") . The terminal block operates on ly during REMOTE ope r at ion. The screw for the term[...]

STP-H600/H1000 Ser ies Instruction Manual 9 Internal Battery Four batteri es (PORTA LAC Series Small-Size d Sealed Lead-Acid Ba tteries, PE12V 2WS : 12V, 2Ah, manufactured by Japan Storage Battery Co., Ltd.) (hereinafter referred to as the internal battery) are in serted into the ST P pu mp for backup d uring a power failure. These are rechargeable[...]

STP-H600/H1000 Ser ies Instruction Manual 10 5 4 3 2 1 0.5 10 20 30 40 Am b ient Te mperatures( ℃ ) Li fe of the Interna l Batte ry (Year) 40 5 ２ Allow able S helf Life of th e Int ernal Battery (M ont h) 50 20 30 10 10 20 30 40 Am b ient Te mperatures( ℃ ) Figure 9.1 Life of the Internal Batt ery Figure 9.2 Allowable Shelf Life of the Intern[...]

STP-H600/H1000 Ser ies Instruction Manual 9.4 BATTERY NG Lamp If battery capacity became les s than operatin g limit value or there was connection mistake, the "BAT TERY NG" lamp on the rear side of the STP control un it front panel (See 9.3, "L ife of the Int e r nal Bat t e r y ) " , the "FAILURE" lam p, and t he &qu[...]

STP-H600/H1000 Ser ies Instruction Manual 9.5 How to Replace the I nt ernal Bat t e ry WA RNIN G ◇ W hen covering the battery case, be sure not to catch the bat t ery cable in the battery case. Failure to do so may shortcircuit the battery and result in a leakage, production of fire or explosion. C A U TI O N ◇ Turn OFF the primary power (Sw it[...]

STP-H600/H1000 Ser ies Instruction Manual 9.5.2 How to Replace t he Bat t ery in the Battery Case 1) Remove front plate (5 ) from battery case (4) b y unscrewing 4 M2 screws. 2) Disconnect battery in ternal connector (6). 3) Remove inside plate(10) from battery case by u nscrewing 4 M2 screws and pull ou t the battery from the case (it can be p ull[...]

STP-H600/H1000 Ser ies Instruction Manual (1) STP Control Unit Front Panel (2) Internal Battery C onnector (3) Ba ttery Case Screw (4) Battery Case (5) Ba ttery Case Front P late (6) Battery Internal C onnector (7) BATTERY NG Lamp (8) RES ET Switc h (9) Battery Instruction Label (10) Battery Case Inside Plate (11) Flat Head Screw (M2) ・注意 ・[...]

STP-H600/H1000 Ser ies Instruction Manual 9.6 How to Dispose of the Int ernal Bat t ery Dispose of or collect worn-out batteries in a ccordance with the guid elines given by each national an d/or local government. If you proc ure batteries, dispose of them in accordance with the gui delines given by the battery manufacturer. C A U TI O N ◇ Pay at[...]

STP-H600/H1000 Ser ies Instruction Manual 10 External Battery C A U TI O N ◇ DO NOT use (an) external bat t eries w hen internal batteries are inserted. Failure to do so may result in product damage or a problem. It could cause a problem, such as product damage. ◇ DO NOT connect bat t eries in parallel. ◇ Replace batteries with new ones befor[...]

STP-H600/H1000 Ser ies Instruction Manual 10.2 Installat ion of the Ext ernal Bat t ery C A U TI O N ◇ Turn OFF the primary power (Sw itch t he breaker "OFF"), before connecting the battery. Failure to do so may result in product damage or a problem due to electr ic shock or short-circuiting of the internal circuit. ◇ After disconnect[...]

STP-H600/H1000 Ser ies Instruction Manual 10.3 How to Charge t he Ext ernal Bat t ery NOT I CE ◇ The battery is charged w hile t he pow er is "ON," regardless of the operation state of the STP pump. The STP control unit is equipped w ith a const ant v o lt ag e ( 55 V) circuit and a const ant current (0.3 A) circuit for charging the bat[...]

STP-H600/H1000 Ser ies Instruction Manual 11 Operation Principle of the STP Pump The STP-H600/H1000 is a series of magnetically -levitated turbomolecul ar pumps, featuring the foll owing: l Oil fr ee l Low vibration l High reliabilit y The STP p ump is confi gured so that rotor blade (1) and stator blade (2) are aligned alternately in the axial dir[...]

STP-H600/H1000 Ser ies Instruction Manual ( 7 ) Tou ch down bea ri ng ( 8 ) Touch dow n beari ng ( 1 ) Rotor blade ( 2 )S t a t o rb l a d e ( 4 ) Radi a l e l ec t romagnet ( 3 ) Radia l sensor ( 3 ) Radial senso r ( 4 ) R adia l electro ma gn et ( 6 ) Axia l el ect rom agnet ( 6 ) Axia l el ect rom agnet ( 5 ) Axial sens or Figure 11.1 Cross Sect[...]

STP-H600/H1000 Ser ies Instruction Manual 12 Maintenance and Inspection C A U TI O N ◇ Stop the STP pump, turn O FF t he primar y power (switch the breaker "OFF") and disconnect the internal batt ery connector before performing maintenance of the STP control unit (batt ery replacement/fuse replacement). Failure to do so may result in an[...]

STP-H600/H1000 Ser ies Instruction Manual 12.3 Replacing the Fuses C A U TI O N ◇ Remove the probable causes of the blown fuse (Ex. a problem with t he remote input signal, etc. ) befor e replacing the fuse. ◇ Always use specified and rated fuses. NOT I CE ◇ If fuses are blown frequently ev en after they are replaced, cont act Seiko Instrumen[...]

STP-H600/H1000 Ser ies Instruction Manual 12.4 Inspecting for Deposit ◇ W hen inspecting for deposit, exhaust gases inside the STP pump thoroughly. Residual gases may cause an accident when remov ing the STP pump. Confirm the characteristics of gas to be used, referring to the Material Safety Data Sheet (MSDS) y ou obt ain from the gas supplier. [...]

STP-H600/H1000 Ser ies Instruction Manual 12.5 Overhaul The recommended maintenance intervals for different process app lications are tabul ated belo w: Process Period Remarks Metal Etch 1 year Ensure that TMS (Temperature Management System) is fitted and operational to prevent accumulation of by-product dep osition in the pump. Other Etch Processe[...]

STP-H600/H1000 Ser ies Instruction Manual 12.6 Transporting for Repair or Overhaul ◇ W hen removing the STP pump from the vacuum equipment, exhaust gases inside the STP pump thoroughly. Residual gases may result in an accident w hen remov ing t he STP pump. Confirm the characteristics of gas to be used, referring to the Material Safety Data Sheet[...]

STP-H600/H1000 Ser ies Instruction Manual 13 Storage 13.1 The STP Pump When the STP pump is left unused ov er t he specif ied period ( m ore t han a f ew m o nt hs) , follow the precautions below: 1) Close the inlet port of the STP pump and vacuum it using an aux iliary pum p. 2) Purge dry N 2 gas or dry air from the p urge port. 3) Close the outle[...]

STP-H600/H1000 Ser ies Instruction Manual 13.2 The STP Control Unit If the STP control unit ( including cables) is not used f o r a long period ( m ore t han a fe w months), foll ow the precautions below: 1) Remove the in ternal battery from the STP control unit (see Section 9, "In ternal Battery"). NOT I CE ◇ Always remov e t he bat t [...]

STP-H600/H1000 Ser ies Instruction Manual 14 Disposal 14.1 The STP Pump Dispose of the STP pump as industrial waste according to the guid elines given by each national and/or local government. WA RNIN G ◇ W hen disposing of the STP pump, exhaust gases inside the STP pump thoroughly. Residual gases may result in an accident w hen disposing of t he[...]

STP-H600/H1000 Ser ies Instruction Manual 14.3 The Battery Dispose of or collect worn-out batteries in a ccordance with the guid elines given by each national an d/or local government. If you proc ure batteries, dispose of them in accordance with the gui delines given by the battery manufacturer. C A U TI O N ◇ Pay att ent ion t o short - circuit[...]

STP-H600/H1000 Ser ies Instruction Manual 15 Troubleshooting If an abn ormality/error i s found when usi ng the STP p ump, check i t and take mea sures in accordan ce with the fol lowing pro cedures. If you cannot trace it or if the STP pump does not function normally after troubleshooting, fill in the necessary info rm at ion in t he " S TP P[...]

STP-H600/H1000 Ser ies Instruction Manual 2) In case the FREE RUN state is not reset af t er t roubleshooting: i. Check the tachometer on the front panel. ii. If the needle is in the red, it m eans t he S TP pump has stopped. Power OFF and swit ch t he break er " O FF. " iii. If the needle is in t he black , t he S TP pum p is rot at ing [...]

STP-H600/H1000 Ser ies Instruction Manual 15.3 Abnormalities W hen Performing The STP Pump Start Operation (When any "Abnormalit y / Error W a rning " lam p lig hts, see Section 15.5 "W hen Any Abnormality/Error Warn ing Lamp Lights.") Table 15.2 Troubleshooting W hen Performing The STP Pump Start Operation No. Symptom Probable [...]

STP-H600/H1000 Ser ies Instruction Manual No. Symptom Probable Causes Countermeasures Referred Section (1) Baking temperature overheat. Set the temperature to 120 ℃ or lo wer. 7.3 (2) Insuffi cient cooling. Al ways coo l durin g baking or gas suction. 7.2 (3) Power failure. Check if power has failed. 6.1.1 (4) Over vibration (5) (vibration 100 m [...]

STP-H600/H1000 Ser ies Instruction Manual 15.5 W hen Any Abnormality/ Error Warning Lam p Lights When any Abnormality / Error W arning lam p light s, check which lamp is being lit and see Table 15.5 for which procedure No. to follow. Then, follow the steps of that procedure No. (shown in Tables 15.6 to 15.8) to remove the problem (for the na mes an[...]

STP-H600/H1000 Ser ies Instruction Manual Table 15.5 Troubleshooting W hen Any of Abnormality/Error Warning Lam p Lights PROCEDU RE No. Lamp Being Lit Probable Causes Countermeasures Referred Section No.1 “OVER TEMPERATURE” “FAILURE” “EMERGENCY OPERATION” (1) Incorrect connection of the STP connection cable. Connect cables correctly. If[...]

STP-H600/H1000 Ser ies Instruction Manual PROCEDU RE No. Lamp Being Lit Probable Causes Countermeasures Referred Section No.4 “FAILURE” (3) Overheating ins ide the STP cont rol unit: 1) Ambient te mperature. 2) Insuffici ent cooling of the STP control unit. 1) Set the ambient temper ature to 40 ° C or lower. 2) Remove obs tacle from the ventil[...]

STP-H600/H1000 Ser ies Instruction Manual PROCEDU RE No. Lamp Being Lit Probable Causes Countermeasures Referred Section No.6 “FAILURE” “BATTERY NG” (inside the fr ont panel) ( “EMERGENCY OPERATION” l am p may light) (1) Insuffici ent charge or deteriorat ion of the battery. 1) Check whet her or not the battery is fully charged. If the [...]

STP-H600/H1000 Ser ies Instruction Manual 16 Specifications and Accessories 16.1 Specifications for the STP Pump Table 16.1 Specifications for the STP Pump Item STP-H600 STP-H1000 Inlet port flange ICF203/VG150/IS O160 ICF253/VG200/IS O200 Flange size *1 Outlet p ort flange KF40 N 2 L/s 600 1000 H e L/s 550 900 Pumping speed N 2 L/s 500 800 N 2 >[...]

STP-H600/H1000 Ser ies Instruction Manual 16.2 16.2 Specifications for the STP Cont rol Unit Table 16.2 Specifications for the STP Control Unit Item Specifications Input voltag e V AC 200 to 240 ± 10% At start: kVA 2.6 Input power Under rated operation: kVA 1.0 to 2.6 Input frequency H z 50/60 ± 2 Input phase Single phase Rated current of main br[...]

STP-H600/H1000 Ser ies Instruction Manual Item Specifications Input/outp ut terminal · AC POWER TB1 (3 pins) · P.CONNECTO R CO N5A ( 45 pins) · INVERTER OUTPUT CON2A ( 5 pins) · LEAK VALVE CON8A ( 8 pins) · I/O TB2 (20 pins) · DC I/O T B3 (10 p ins) · STAR T STOP T B5 (3 pi ns) · START/S TO P TB6 (2 pins) · EXT. BATTERY CON9 ( 2 pins) Inpu[...]

STP-H600/H1000 Ser ies Instruction Manual 16.3 Accessories Table 16.3 Accessories Item Q'ty Remarks STP control unit 1 Primary power cable * 1 1 STP connection cable * 1 1 Motor connection cable * 1 1 Ground cable * 1 1 Inlet port cover 1 Outlet port cover 1 STP connector cover 1 Motor connector cover 1 Leg 8 4 legs are attached to the STP pu [...]

STP-H600/H1000 Ser ies Instruction Manual φ 180 Outl et port f lange KF *1 40 Cooling water port P T *1 (R C) 1/ 4 In let por t f lange F rom v iew in g ar row B φ 203 3 0 ﾟ 3 0 ﾟ 4 5 ﾟ 2 5 ﾟ 1 5 ﾟ 1 5 ﾟ 3 5 ﾟ 147. 5 141. 5 60 φ 2 1 0 30 30 85 φ 208 φ 245 35 50 13 39 80 1 φＢ Ｄ 26 Ｃ Ａ Ｂ Mi n. 270 A B C D 339 258 22 φ 2[...]

STP-H600/H1000 Ser ies Instruction Manual 430 6 10 62 356 62 24.5 50 50 50 24.5 199 543 30 470 3 500 (150) 5 188.6 37 356 37 25 430 25 480 40 34.5 130 34.5 24 35 400 35 30 5.4 416 32 32 480 Ve nti lation port Un i t : m m Ve nti lation port Ve nti lation port Vent il ati on port Vent il ati on port F igu re 16 .2 Ext e rna l Appea ranc e of the STP[...]

STP-H600/H1000 Ser ies Instruction Manual Figur e 16.3 Label Af f ix ing Pos i t i ons for t he STP Pum p ・ CAUTION 非常用電磁バルブ 取付位置 ポンプ使用前に必ず 取付けてください。 E merge ncy val ve installation position Co nne ct the e mer g- ency ventin g valve b efore u se . ・注意 KF10 NW10 Valve ・注意 ◇[...]

STP-H600/H1000 Ser ies Instruction Manual ・注意 ・ CAUTI ON ◇バッテリーは１年毎に交換し てく ださい。 ◇内部バッテリーと外部バッテ リー を同時に使用しないでくださ い。 ◇ Change batter ies every year . ◇ Do not u se external batter ies in com binat ion with internal batt eries . 次回交?[...]

STP-H600/H1000 Ser ies Instruction Manual A IR COO L I NG UNI T VOL TS A C V SEI K O SEI K I MADE IN JAPAN Baking H eater Air Co ol ing Unit Fi gure 16.5 Label Af f ix i ng Posi t ions f or the Spe c ia l Accessory ・警告 高温部 やけどします。 触らないでく ださい 。 ・ WARN I N G Hot s ur fac e . Can burn hands . Do not t ou[...]

STP PUMP PROBLEM CHECK SHEET Contact your nearest Seiko Seiki ’s office shown in the rear cov er. To : Com pany Name : D a t e : C o n t a c t N a m e : T E L . N u m b e r : F A X . N u m b e r : A d d r e s s : F r o m : C u s t o m e r N a m e : D a t e : P e r s o n i n c h a r g e : T E L . N u m b e r : F A X . N u m b e r : A d d r e s s :[...]

UNIT CONVER SION TABLE Length m cm mm i nc h 1 100 1.00x10 3 39.4 0.01 1 10.0 0.394 1x10 -3 0.10 1 39.4x10 -3 25.4x10 -3 2.54 25.4 1 Mass g kg lb. 1 1.00x 10 -3 2.20x10 -5 1x10 3 1 2.20 454 0.454 1 Pressure Pa Torr kgf /cm 2 1 7.50x 10 -3 1.02x10 -5 133 1 1.36x10 -3 9.81 x 10 4 736 1[...]

Sales Office (Japan) Seiko Instruments Inc. Vacuum Innov at iv e Products Sales Department 1-8 Nakase, Mihama-ku, Chiba-shi, Chiba 261-8507 JAPAN Telephone: <Vacuum Innovat iv e Products Sales Department, Direct > Domestic 043-211-1401 International + 81-43-211-1401 Facsimile: Dom estic 043-211-8075 International + 81-43-211-8075 Manufacturer[...]