Teledyne 2002 manuale d’uso

Model 2002 page 1 MODEL 2002 MODEL 2002 MODEL 2002 MODEL 2002 MODEL 2002 V V V V V A A A A A CUUM G CUUM G CUUM G CUUM G CUUM G A A A A A UGE UGE UGE UGE UGE INSTRUMENTS TELEDYNE HASTINGS INSTRUCTION MANUAL[...]

page 2 Model 2002 Manual Print History Manual Print History Manual Print History Manual Print History Manual Print History The print histor y shown belo w lists the printing dates of all revisions and addenda created for this manual. The revision lev el letter increases alphabetically as the manual undergoes subse- quent updates . Addenda, which ar[...]

Model 2002 page 3 T T T T T able of Contents able of Contents able of Contents able of Contents able of Contents 1.0 1.0 1.0 1.0 1.0 GENERAL INFORMA GENERAL INFORMA GENERAL INFORMA GENERAL INFORMA GENERAL INFORMA TION TION TION TION TION ................................................................... ............................................[...]

page 4 Model 2002 7.0 7.0 7.0 7.0 7.0 RELA RELA RELA RELA RELA Y INTERF Y INTERF Y INTERF Y INTERF Y INTERF A A A A A CE OPTION BO CE OPTION BO CE OPTION BO CE OPTION BO CE OPTION BO ARD ARD ARD ARD ARD .............................................. .............................................. .............................................. ......[...]

Model 2002 page 5 General Information SECTION 1 The Model 2002 is a wide range vacuum measuring instr ument consisting of a digital microproces- sor-based display unit, a miniature, rugged, thin film based sensing element tha t measures from below 1x10 -4 up to 100 T orr, a piezoresistive sensor tha t measures from 1 to 1000 T orr, EEPR OM (Electr [...]

page 6 Model 2002 1.3 Model 2002 Control Unit The Model 2002 control unit consists of the pow er supply , Pirani resistance bridge control, signal processing and display circuitry . The user interf ace consists of a flat panel displa y with smooth operat- ing tactile s witches and large green LED dig its (0.56" /14.2mm). The pressure is displa[...]

Model 2002 page 7 SECTION 2 Installation This section is designed to assist in getting a new pressure gauge into operation as quickly and easily as possible. Please read the following instructions thoroughly before installing the instr u- ment. 2.1 Receiving Inspection Carefully unpack the Hastings Model 2002 Instrument (par t # HPM-2002), transduc[...]

page 8 Model 2002 2.3 T ransducer Installation The transducer may be installed in an y orientation. Although the transducer is r ugged and will perform well in man y harsh environments, the tube should be installed in a clean and careful manner. The tube is configured with the v acuum fitting requested. If your vacuum en vironment is highly contami[...]

Model 2002 page 9 Front Panel Operation SECTION 3 3.1 Overall Functional Description The front panel of the control unit is shown in Figure 3.1. The four circular blue buttons are used for the selection of display readout and the input of data. The g reen data field displays the data as determined by mode selection. The MODE s witch toggles the con[...]

page 10 Model 2002 All six modes of the Model 2002 hav e features which can be accessed and modified after b ypassing the front panel interlock. The interlock is in place to prevent the accidental corruption of the instrument’ s configuration and calibration. The interlock is b ypassed using the following steps: 1. Place the instr ument in one of[...]

Model 2002 page 11 abov e, press the ZERO s witch to display the decima tion ratio (filtering). The larger the ratio , the longer the response time. EEPR EEPR EEPR EEPR EEPR OM Calibra OM Calibra OM Calibra OM Calibra OM Calibra tion Restora tion Restora tion Restora tion Restora tion Restora tion tion tion tion tion There are interlocks built into[...]

page 12 Model 2002 Maintainance and Repair 4-3 the pow er level of the tube and adjust the proper coefficient for pressure lev el of the adjustment. The CAL MODE presupposes tha t the operator is applying a known pressure of the correct gas composition (see GAS MODE). The factor y calibration points are 800 T orr, 7 T orr, and <1e-6 T orr. The u[...]

Model 2002 page 13 back to the orig inal displayed v alue upon restar ting. Place the Model 2002 back in the R UN mode to store all of the current calibration coefficients in permanent memor y . T o perform a full calibration on the Model 2002 system, fir st use the Zero Coefficient Adjust- ment Procedure. Follow ed by the Midrange Coefficient Adju[...]

page 14 Model 2002 5. Press and release the MODE switch as necessar y to return the 2002 to the RUN mode and store the coefficients to permanent memor y . Atmosphere Coefficient Atmosphere Coefficient Atmosphere Coefficient Atmosphere Coefficient Atmosphere Coefficient Adjustment Adjustment Adjustment Adjustment Adjustment If a reference high press[...]

Model 2002 page 15 Note: F actor y calibration is perf or med using nitrog en only . Display ed pressure mea- surements using other g ases are based on established g as ther mal conductivity data. 3.6 UNITS Mode The Model 2002 can display the measured pressure in different pressure units, T orr, mbar or P ascal. T o switch between these units press[...]

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Model 2002 page 17 Rear Panel Description SECTION 4 A schematic of the rear panel of the Model 2002 control unit is shown in Figure 4.2 ( Rear P anel Figure). The transducer is connected to the control unit via an female 9-pin “D” connector on the rear panel. An I/O cable can be connected via a male 9-pin “D” connector on the rear panel. Th[...]

page 18 Model 2002 If the analog output voltage is being used in a data aquisition system, the following formulas can be used to calculate pressure. EXP = I NT ( 2* V) - 6 M ANT = 1 + 1 8 *V- 9* ( EXP + 9) P res su re (T o rr) = M an t x 1 0 EXP Therefore, Note that the INT function simply returns to the first digit in a number. examples: INT (2.56[...]

Model 2002 page 19 4.3 4.3 4.3 4.3 4.3 TTL Outputs TTL Outputs TTL Outputs TTL Outputs TTL Outputs TTL outputs are pro vided for process control. High and Low set points are entered on the front panel (see Section 3.4) and TTL signals are generated on the I/O cable in the following manner: 1) When the pressure as indicated b y the Model 2002 is abo[...]

page 20 Model 2002 Figure 4.2 SENSOR CONNECTO R Pin# Connection 1 Sensor 2 Bridge (sense) 3 Bridge-Power 4 Reference 5 Common 6 Common (sense) 7 N/C 8 N/C I/O CONNECTO R Pin# Connection 1 Analog Output 2 Analog Common 3 High Setpoint 4 Low Setpoint 5 Digital Common 6 Remote Zero 7 +5V Model 2002 Rear Panel Detail 4.4 P ow er Entr y Module The A C p[...]

Model 2002 page 21 Theory of Operation SECTION 5 The Model 2002 transducer is comprised of two v ery different sensor s which provide a span of measurement extending from 1000 T or r down to less than 1x10 -4 T orr. The piezoresistive device is a direct force sensor which provides pressure indication from 1000 T orr down to less than 1 T orr. The t[...]

page 22 Model 2002 dV dT 0 0 dV 1 dT V 1 S dS dT therefore K R L R L dV dT P ( SdV d T VdS dT ) 0 Figure 5.2 shows a typical schematic of a B implanted Wheatstone bridge network in a Si dia- phragm inv er ted box type geometr y . The inside of the box is ev acuated during anodic bonding to a Pyrex substrate. The membrane has maximum deflection at a[...]

Model 2002 page 23 Figure 5.2 Pressure Diaphragm Diffused br idge resistors Backing surface or restrainer View A-A E S e 1 e 2 Ground Ground Diffused bridge resistor s A-A[...]

page 24 Model 2002 5.2 Pirani Sensor Figure 5.3a shows a thin film Pt resistiv e element on a one micron thick Si 3 N 4 continuous mem- brane surrounded by a thin film Pt reference resistor on a Si substrate. The membrane is hea ted to a constant 8 0 C abov e ambient tempera ture that is monitored b y the substrate resistor . The membrane resistor [...]

Model 2002 page 25 Figure 5.3b Silicon lid x Membrane Silicon base TO-8 header T emperature compensation resistor (Pt) Silicon nitr ide membrane Heated sensor resistor (Pt) Silicon substrate Figure 5.3a Figure 5.3c Silicon lid Silicon base Membrane Er Es Eg Es Er Au[...]

page 26 Model 2002 This radiation loss is also independent of the thermal conductivity of the gas. It is somewhat dependent upon the absolute temperature of R s and the ambient temperature, but since ∆ T is kept to less than 20°C, this loss is only appro ximately 10% of E s . If ambient changes are small compared to the absolute values of the te[...]

Model 2002 page 27 M odel 2002 Dual Sensor Vacuum G auge 1.0E -05 1.0E -04 1.0E -03 1.0E -02 1.0E -01 1.0E + 00 1.0E + 01 1.0E + 02 1.0E + 03 1.0E -05 1.0E -04 1.0E -03 1.0E -02 1.0E -01 1.0E + 00 1.0E + 01 1.0E + 02 1.0E +03 P re s s ure ( To rr) Zeroed Se nsor Output (Arbit rary Units) Pi r a n i Pi e z o Figure 5.4[...]

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Model 2002 page 29 Communications Option Board SECTION 6 Both RS-232 and RS-485 communication interface boards are a vailable as an option for the Model 2002. The communication option boards allow da ta to be output to a host computer with the appropiate interface. Connection to the RS-232 or RS-485 communication interface boards are via a 9 pin D-[...]

page 30 Model 2002 6.2 Interf ace Connector Pin Assignments for RS-232 Note: an alter nate method of connecting to a 2 wire bus is to leave the interface configured for full duplex and exter nally connect pins 2 and 3 to the(+) bus and pins 4 and 8 to the (-) bus. 6.3 Operation of the Serial Interf ace Communication with the serial interface of the[...]

Model 2002 page 31 RS-485 address (the address is displa (the address is displa (the address is displa (the address is displa (the address is displa y y y y y ed in it’ ed in it’ ed in it’ ed in it’ ed in it’ s decimal for s decimal for s decimal for s decimal for s decimal for m) m) m) m) m). Use the UP or DO WN switch to modify the addr[...]

page 32 Model 2002 T ransmit Selected Units U<CR> T orr<CR> T ransmit Software V er sion# V<CR> Hastings Instr uments - Model 2002 V ersion 1.60 - (07-02-2002)<CR> P P P P P arameter Modifica arameter Modifica arameter Modifica arameter Modifica arameter Modifica tion Commands tion Commands tion Commands tion Commands tion C[...]

Model 2002 page 33 Set Full Scale Calibration CF={m.d}E{e}<CR> 5.12e+2 to 1.023e+3 T or r 6.83e+2 to 1.365e+3 mbar 6.83e+4 to 1.365e+5 Pascal Set Midpoint Calibration CM={m.d}E{e}<CR> 4.00e+0 to 7.999e+0 T or r 5.34e+0 to 1.066e+1 mbar 5.34e+2 to 1.066e+3 Pascal Set Lowpoint Calibration CL={m.d}E{e}<CR> 0 to 1.249e-1 T or r 0 to 1[...]

page 34 Model 2002 Device Status When requested to transmit its status the Model 2002 responds with a fiv e digit number which is explained in the following: dig dig dig dig dig it#: it#: it#: it#: it#: 1 1 1 1 1 2 2 2 2 2 3 3 3 3 3 4 4 4 4 4 5 5 5 5 5 Serial Receiv er Overflo w = 4 Main Board EEPR OM Error = 2 Probe EEPR OM (an y) Error = 1 Probe [...]

Model 2002 page 35 Relay Interface Option Board SECTION 7 The relay interface board is a vailable as an option for the Model 2002. Additionally , rela ys may be added to either the Digital option Board (RS-232 or RS-485) or to the Analog option Board (0-10 V olts or 4-20mA). In either case the relays opera te independently of the other options. The[...]

page 36 Model 2002 7.2 Relay Connector Pin Assignment 7.3 Operation[...]

Model 2002 page 37 4-20 mA Interface Option Board SECTION 8 The Relay option board in the Model 2002 operates off of the setpoints defined b y the user and programed into the Model 2002 microprocessor. F or more informa tion about configuring these setpoints refer to Section 3 of this manual. The 4-20 mA interface board is av ailable as an option f[...]

page 38 Model 2002 8.2 Operation The 4-20 mA output option board provides dual channel current output linearly propor tional to the HPM 2002’ s pressure reading. The first channel cor responds to the higher pressure range (0- 1024 T or r). The second channel cor responds to the low er pressure range (0-1000mT orr). The equations below giv e the o[...]

Model 2002 page 39 0-10V Interface Option Board SECTION 9 The 0-10 V interface board is available as an option for the Model 2002. This board provides dual voltage channels linearly proportional to the HPM 2002’ s pressure reading. Please note that use of the Model 2002 with this option requires a CPU with firmware version 1.6 or later for proper[...]

page 40 Model 2002 The 0-10V output option board, provides voltage outputs propor tional to the HPM-2002 pressure reading. The fir st channel cor responds to the higher-pressure range (0-1024) T or r). The second channel cor rresponds to the lower pressure range (0-1000mT or r). The equa tion below gives the output voltage for a given pressure. V(c[...]

Model 2002 page 41 Symptom: Symptom: Symptom: Symptom: Symptom: P ow er on - No display activity . Action: Action: Action: Action: Action: 1. Che ck for proper A C voltage a t the outlet. 2. Ensure that the AC po wer cord connector s are firmly seated in their sockets . (at the outlet and at the instrument.) 3. Check the fuse. a) Remov e the pow er[...]

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Model 2002 page 43 W arranty and Repair SECTION 1 1 11.1 W arranty Repair P olicy Hastings Instruments war rants this product for a per iod of one year from the da te of shipment to be free from defects in material and workmanship . This warranty does not apply to defects or failures resulting from unauthorized modification, misuse or mishandling o[...]

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Model 2002 page 45 Diagrams and Drawings SECTION 1 1[...]

page 46 Model 2002 Mini Confla Mini Confla Mini Confla Mini Confla Mini Confla t t t t t tm tm tm tm tm (HPM-2002-03) (HPM-2002-03) (HPM-2002-03) (HPM-2002-03) (HPM-2002-03) KF-16 (HPM-2002-05) KF-16 (HPM-2002-05) KF-16 (HPM-2002-05) KF-16 (HPM-2002-05) KF-16 (HPM-2002-05) KF-25 (HPM-2002-06) KF-25 (HPM-2002-06) KF-25 (HPM-2002-06) KF-25 (HPM-2002-[...]

Model 2002 page 47 1/8" NPT (HPM-2002-01) 1/8" NPT (HPM-2002-01) 1/8" NPT (HPM-2002-01) 1/8" NPT (HPM-2002-01) 1/8" NPT (HPM-2002-01) 1/2" O 1/2" O 1/2" O 1/2" O 1/2" O .D .D .D .D .D . . . . . Smooth Smooth Smooth Smooth Smooth T T T T T ube (HPM-2002-07) ube (HPM-2002-07) ube (HPM-2002-07) ube (HP[...]

page 48 Model 2002 3.62" 92mm P P P P P anel Cut-Out Dimensions anel Cut-Out Dimensions anel Cut-Out Dimensions anel Cut-Out Dimensions anel Cut-Out Dimensions Model 2002 Out- Model 2002 Out- Model 2002 Out- Model 2002 Out- Model 2002 Out- line Dimensions line Dimensions line Dimensions line Dimensions line Dimensions 3.54" 90mm 6.75"[...]

Model 2002 page 49 NEOPRENE GASKET (optional) P P P P P anel Mounting anel Mounting anel Mounting anel Mounting anel Mounting Mounting Clip Mounting Clip Mounting Clip Mounting Clip Mounting Clip Attachment Attachment Attachment Attachment Attachment Deep Mounting Location Shallow Mounting Location[...]

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