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Sierra 860 manual

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  • Page 1

    Serie s 830/84 0/860 In struction Man ual Tab le of Con tent s IM-83 /84/86 -H 0-1 Sierra Series 830/840/860 Side-Tra k ™ and Auto- T rak ™ Mass Flow Mete rs and C ontrollers Instruction Manual Part Num ber IM -8 3/84/86 Rev ision G .1 - 2-0 6 5 Harris Court, Bu il ding L Monte rey, CA 939 40 (831) 373-0200 ( 800) 866- 0200 Fax ( 831) 373- 4402[...]

  • Page 2

    Tab le of Con tent s Series 83 0/840/8 60 I n struction Man ual 0-2 IM-83 /84/86 -H Customer Notice Sierra Ins truments , Inc . is no t l iable for any d ama ge or pers onal injury , w hatso - ever , resu lt ing from the use of Sier ra Ins trumen ts s tandar d mass f low me ters or contro llers for oxygen g as. You are respo nsib le for d etermin i[...]

  • Page 3

    Serie s 830/84 0/860 In struction Man ual Tab le of Con tent s IM-83 /84/86 -H 0-3 Rev ision F change s: Ad d w ir ing des ignations for 15-pin an d 2 0-pin conn ectors. Correct units on page A-1 , Exa mple 1 .[...]

  • Page 4

    Tab le of Con tent s Series 83 0/840/8 60 I n struction Man ual 0-4 IM-83 /84/86 -H T ab le of Contents Chapter 1 Int roduction Int rod uc tio n.............................................................................. 1 -1 Us ing th is M an ua l...............................................................1-1 Saf et y In fo rmati on..........[...]

  • Page 5

    Serie s 830/84 0/860 In struction Man ual Tab le of Con tent s IM-83 /84/86 -H 0-5 El ec tromagnetic Valves - Low and Medium Flow ... .... ... .... 4- 8 Ele ct rom ag ne tic Valv es - High Flow.................................. 4-9 Mo to r-Op e rat ed Ro ta ry V alve s ........................................ 4-11 Val ve Ad jus tmen t .............[...]

  • Page 6

    Tab le of Con tent s Series 83 0/840/8 60 I n struction Man ual 0-6 IM-83 /84/86 -H List of T a bles 2-1 . Re comme nded Wi re G auge s .......................................... 2-4[...]

  • Page 7

    Serie s 830/84 0/860 In struction Man ual Tab le of Con tent s IM-83 /84/86 -H 0-7 W ar nings and Ca utions Warnin g! Fol l o w Nationa l Electr i c Code or you r local code safe ty p ractices when w iring or conne cting t h i s un it to a po wer source . On ly qua l ified personne l should ins t a ll and wire the trans ducer . Warnin g! Alway s re[...]

  • Page 8

    Serie s 830/84 0/860 In struction Man ual Cha pter 1 In trodu ction IM-83 /84/86 -H 1-1 Chapt er 1 Introduc tion Sierra’s S ide- Trak ™ and Auto-Trak ™ mass flow mete rs and con- trollers are des igned to accurately measure and con trol f lows of process gas es. This instruction manual covers the insta llation, op- eration and m aintena nce o[...]

  • Page 9

    Cha pter 1 In trodu ction Serie s 830/84 0/860 In struction Man ual 1-2 IM-83 /84/86 -H Throughout this manual, we use the wor d trans ducer as a ge- neric term to r ep r es ent all Side-Trak and Auto-Tra k mass flow meters and controller s .[...]

  • Page 10

    Serie s 830/84 0/860 In struction Man ual Cha pter 1 In trodu ction IM-83 /84/86 -H 1-3 Safety Infor ma tion Caution and warning s tatements are used througho ut this book to draw your attent i on to import ant info rmation. Warnin g! Cautio n! This s t atemen t appears with infor mation tha t is importan t to pro tect people and equip ment from da[...]

  • Page 11

    Cha pter 1 In trodu ction Serie s 830/84 0/860 In struction Man ual 1-4 IM-83 /84/86 -H The Ser ies 80 0 Flow S ensing Princ iple The operating p rinciple of Sierra’s Side-Trak and Auto-Trak flow meters and controller s is based on heat transfer and the first law of thermodynamics. Duri ng operation proces s gas enters the instru- ment’s flow b[...]

  • Page 12

    Serie s 830/84 0/860 In struction Man ual Cha pter 1 In trodu ction IM-83 /84/86 -H 1-5 Figu re 1-3. Se nsor Temp eratu re Di st ribu tion Figures 1-2 and 1-3 show the mass flow th r ough the sensor tube as inversely proporti onal to the temperature d if ferenc e of the coils. The coils are legs of a bridge circuit with an output volt age in direct[...]

  • Page 13

    Serie s 830/84 0/860 In struction Man ual Cha pter 2 In stalla t ion IM-83 /84/86 -H 2-1 Chapt er 2 Installat ion Quick- Insta llati o n Instr uct ions F or 830/84 0 L, M and H Mete rs An d C ontroll ers 1. NEV ER TE ST FO R LEAK S WI TH LI Q U I D LE AK D ETEC TO R . If liquid s eeps into th e electr onics or th e s ensor c ompart ment be low, the[...]

  • Page 14

    Cha pter 2 In stalla t ion Series 83 0/840/8 60 In struc tion Ma nual 2-2 IM-83 /84/86 -H Installa tion O verview Side-Tr ak ™ and Auto-Trak ™ transducers are supplied with either compression, VCO, VCR or NP T process connections. To ensure a succe ssful ins tallation, inlet and outlet tubing shou ld be in a clean state prior to plumbing the tr[...]

  • Page 15

    Serie s 830/84 0/860 In struction Man ual Cha pter 2 In stalla t ion IM-83 /84/86 -H 2-3 Installi ng the T r ans ducer Follow the insta llation instructions that are applicable to your trans- ducer’s process connection. For all NP T and 1/2-inch size fittings, see the piping r ec ommendations given on page 2-3. Before use, all plumbing should be [...]

  • Page 16

    Cha pter 2 In stalla t ion Series 83 0/840/8 60 In struc tion Ma nual 2-4 IM-83 /84/86 -H VCR Fitting s 1. Position the transducer with the flow direction arrow pointing downstream in the di r ection of flow . 2. Install new was hers compatible with the gas to be used. (Do not mix o r intercha nge parts of tube fittings made by diff erent manufactu[...]

  • Page 17

    Serie s 830/84 0/860 In struction Man ual Cha pter 2 In stalla t ion IM-83 /84/86 -H 2-5 Wiring t he T r ansduc er Side-Tr ak and Auto-Trak trans ducers require a +1 5, 0 , –15 VDC power supply and a r ea dout device. Additionally, controll ers require a s et point input (0- 5 VDC standard, 4-20 mA optional). Transduce rs are connected to the pow[...]

  • Page 18

    Cha pter 2 In stalla t ion Series 83 0/840/8 60 In struc tion Ma nual 2-6 IM-83 /84/86 -H Tab le 2-1. R ecomm ende d Wire Gaug es[...]

  • Page 19

    Serie s 830/84 0/860 In struction Man ual Cha pter 2 In stalla t ion IM-83 /84/86 -H 2-7 Wiring Trans ducers with 2 0-Pin Card-Edg e C onnectors Input Power Connections Figu re 2-2. Input Po we r Con ne c tion s (20-P in Con ne c tor) Output Signal Connections Standard output for all t r ans ducers is a 0-5 VDC signa l, which di - rectly corr es po[...]

  • Page 20

    Cha pter 2 In stalla t ion Series 83 0/840/8 60 In struc tion Ma nual 2-8 IM-83 /84/86 -H Inpu t Sign al Co nnec ti on s (Con trolle rs Onl y) The 0- 5 VDC (4- 20 mA optional) set point comma nd input signal allows you to s et the flow to any desired value wit hin the r ange of the controller. The set point input s ignal is a direct linear represen[...]

  • Page 21

    Serie s 830/84 0/860 In struction Man ual Cha pter 2 In stalla t ion IM-83 /84/86 -H 2-9 Valve Purge and Valve Off Connec tions (Cont rol lers Only) Depending on the valve vol t age , connect as shown below. COM Purge On Off Open collector output Valve Off On Off 1 2 3 4 5 6 7 8 9 10 A B C D E F G H I J 15 Volt Valve Figu re 2-6. Valve Purge and Va[...]

  • Page 22

    Cha pter 2 In stalla t ion Series 83 0/840/8 60 In struc tion Ma nual 2-10 IM-83 /84/86 -H Figu re 2-8. 20 -Pin Co nne ctor Pin De signation s Note: P rior to 2001, sierr a supplied separate cables for controllers and meters . These are now combined into one style for 830/840 devices and one style for 860M/C.[...]

  • Page 23

    Serie s 830/84 0/860 In struction Man ual Cha pter 2 In stalla t ion IM-83 /84/86 -H 2-11 Wiring Trans ducers with 1 5-Pin D-Connecto rs Input Power Connect i ons Figu red 2-9 . Inpu t Pow er (15-Pin D-Conn ecto r) Note: Use separate, dedicated wires for pins 9 and 10 to the power su ppl y com- mon on meters and pins 9,10 and 3 on controllers. Outp[...]

  • Page 24

    Cha pter 2 In stalla t ion Series 83 0/840/8 60 In struc tion Ma nual 2-12 IM-83 /84/86 -H Input Si gnal Connect i ons (Controllers Only) A 0-5 VDC (4-20 mA optional) set point command input signal al- lows you to s et the flow to any desired value within the range of the controller. The set point input s ignal is a direct linear represen- tation o[...]

  • Page 25

    Serie s 830/84 0/860 In struction Man ual Cha pter 2 In stalla t ion IM-83 /84/86 -H 2-13 Valve Purge and Valve Off Connec tions (Cont rol lers Only) Depending on the valve vol t age , connect as shown below. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Purge On Off Open collector output Valve Off On Off 15 Volt Valve COM Figu re 2-13 . Valve Purge and Va l[...]

  • Page 26

    Cha pter 2 In stalla t ion Series 83 0/840/8 60 In struc tion Ma nual 2-14 IM-83 /84/86 -H Figu re 2-15 . 15-P in D-Co nnec tor Pin A ssignm en ts Note: P rior to 2001, Sierr a supplied separate cables for contro ller s and meters. These are now combined into one style for 830/840 devices and one style for 860M/C[...]

  • Page 27

    Serie s 830/84 0/860 In struction Man ual Cha pter 2 In stalla t ion IM-83 /84/86 -H 2-15 Motor-Oper a ted Va lve Circular 1 0-Pin Conne c tor Figu re 2-16 . Motor -Opera ted Ro tary Val ve Conn ecto r (10 - Pin Conn ector) Notes: 1. Both pin 2 and 4 should be conne cted to the power supply common via separate, dedicated wires to assure no ground l[...]

  • Page 28

    Serie s 830/84 0/860 In struction Man ual Cha pter 3 O perat ion IM-83 /84/86 -H 3-1 Chapt er 3 Operation This chapter covers t rans ducer operation and contr oller features available on Sierr a ’ s Side-Trak ™ and Auto-Trak ™ models. For more inf o r mation on the advanced digital RS-485 commands available on Auto-Trak t rans ducers, refer t[...]

  • Page 29

    Cha pter 3 O perat ion Serie s 830/84 0/860 In struction Man ual 3-2 IM-83 /84/86 -H Mass F low Co ntroll er Operati on Electromagnet ic V a lve Co ntrollers When the transducer is installed and the system has undergone a complete leak check: 1. Make sure the set point is zero before apply ing po wer. If the set point input is not conne cted to som[...]

  • Page 30

    Serie s 830/84 0/860 In struction Man ual Cha pter 3 O perat ion IM-83 /84/86 -H 3-3 Motor-Oper a ted Rotary Valve C ontroll ers When the transducer is installed and the system has undergone a complete leak check: 1. Make sure the valve set point is zero before applying power. 2. Apply power . Allow thirty m inu tes of warm -up time. ( When power i[...]

  • Page 31

    Cha pter 3 O perat ion Serie s 830/84 0/860 In struction Man ual 3-4 IM-83 /84/86 -H Mass F low Co ntroll er Feature s Over-Range a nd Co ld S ensor Lockout Circuit Side-Tr ak M odels incorporate an over - range circuit which disables the output s ignal when the sens or is heating to its normal operating range, or if an over flow condition exis ts.[...]

  • Page 32

    Serie s 830/84 0/860 In struction Man ual Cha pter 3 O perat ion IM-83 /84/86 -H 3-5 On-Off Contro l and Soft Sta rt Option On-off cont rol is provided for all models equipped with an elec- tromagnetic valve. This f eatu r e is available by connecting a man- ual on-off switch to the transducer connector as shown in Chapter 2 . Certain processes can[...]

  • Page 33

    Cha pter 3 O perat ion Serie s 830/84 0/860 In struction Man ual 3-6 IM-83 /84/86 -H Valve Purg e Funct ion Electromagnetic valves are driven with either 15 or 30 volts de- pending on the range and p r es sure. In general , unit s below 10 slpm have the 15 vol t valve. When the pur ge function occ urs, electro- magnetic valves are driven fully open[...]

  • Page 34

    Serie s 830/84 0/860 In struction Man ual Cha pter 3 O perat ion IM-83 /84/86 -H 3-7 terial Saf ety Data Sheet m us t be enclose d with t he unit upon it s r e- turn.[...]

  • Page 35

    Serie s 830/84 0/860 In struction Man ual Cha pter 4 M aintena nce IM-83 /84/86 -H 4-1 Chapt er 4 Mainten ance Side-Tr ak ™ and Auto-Trak ™ transducers es sentially r equire no scheduled maintenance other than periodic flow path cleaning if the gas is dirty. If an in-line filter is used, the fil te r i ng element should be periodically be repla[...]

  • Page 36

    Cha pter 4 M aintena nce Series 83 0/840/8 60 In struc tion Ma nual 4-2 IM-83 /84/86 -H Figu re 4-1. Lo w F low T r ansdu cer LFE C lean ing Low Flow Transducers: The L F E is acce ssed by unscrewing the main inl et fitting and re- moving it fr om the flow body. The LFE is screwed into the inlet fitting, which has been specially machined for this p[...]

  • Page 37

    Serie s 830/84 0/860 In struction Man ual Cha pter 4 M aintena nce IM-83 /84/86 -H 4-3 Figu re 4-2. Me diu m Flow Tran sducer LFE Cle aning Medium Flow Transducers: In the medium flow body, the LFE ass embly consists of the honey- comb laminar flow element, inlet screen, 0. 63 inch long standoff, two ranging was hers, 2-1/4 inch long 4-40 screw a n[...]

  • Page 38

    Cha pter 4 M aintena nce Series 83 0/840/8 60 In struc tion Ma nual 4-4 IM-83 /84/86 -H Figu re 4-3. H igh Flo w Tra nsdu c e r LFE Cleanin g High Flow Transducers: The high flow LFE is similar to the honeycomb ele ment use d in the medium fl ow body but larger in di ame ter. The high flow body con- sists of four parts: inlet tube, inlet cap, main [...]

  • Page 39

    Serie s 830/84 0/860 In struction Man ual Cha pter 4 M aintena nce IM-83 /84/86 -H 4-5 Figu re 4-4. NP T Tra nsdu cer LFE Clea ning NPT-Type Transducers: The NPT f low body is comprise d of a sta inless steel pipe ter mi - nated on either end by an end cap sealed with an O-ring. T he end caps are held in plac e by four tie rods which run the length[...]

  • Page 40

    Cha pter 4 M aintena nce Series 83 0/840/8 60 In struc tion Ma nual 4-6 IM-83 /84/86 -H Sensor Maint enance The sensor tube is s traight and has a relatively large , 0.031 inch ID, which makes inspection and cleaning easy. Sensor mainte- nance consis ts of: • inspecting and cleaning the sensor flow path • checking the sensor for p roper electri[...]

  • Page 41

    Serie s 830/84 0/860 In struction Man ual Cha pter 4 M aintena nce IM-83 /84/86 -H 4-7 Sen sor Elec trica l Tes t To check the elec trical integrity of the sens or windings: 1. Remove the unit from the system. 2. Remove the two 4-40 Phillips head s crews located on top of the electronics enclosure and slide the enclosure up and off. Use a nut dri v[...]

  • Page 42

    Cha pter 4 M aintena nce Series 83 0/840/8 60 In struc tion Ma nual 4-8 IM-83 /84/86 -H Valve Maint enance Electromagnetic valves may require spring-tension adjustments for various reasons (See Valve Adjust Pr ocedure ) . No maintenance is required under normal operating conditions other than an occa- sional cleaning. Use of certain corrosive gases[...]

  • Page 43

    Serie s 830/84 0/860 In struction Man ual Cha pter 4 M aintena nce IM-83 /84/86 -H 4-9 4. The s mall circuit board may be separated from the main board to ease removal of the coil. To separate, first remove the plastic #4 mounting sc rew located in the center of the main circuit board and caref ully pull the two boards apart. Remove the f our 4-40 [...]

  • Page 44

    Cha pter 4 M aintena nce Series 83 0/840/8 60 In struc tion Ma nual 4-10 IM-83 /84/86 -H 3. Unscrew the coil cove r with a 11/16 inch wrench. Remove the coil and coil enclos ure. Note the location of any wa shers or space rs for re-assembly. 4. The s mall circuit board may be separated from the main board to ease removal of the coil. To separate, f[...]

  • Page 45

    Serie s 830/84 0/860 In struction Man ual Cha pter 4 M aintena nce IM-83 /84/86 -H 4-11 Motor-Oper a ted Rotary Valves The electronic compone nts in the Model 840 moto rized valve f low controllers requir e no maintenance with the exception of the motor, which requires r epla cement when its se rvice lif e h as ended. This will be evidenced by “h[...]

  • Page 46

    Cha pter 4 M aintena nce Series 83 0/840/8 60 In struc tion Ma nual 4-12 IM-83 /84/86 -H 840 L, M and H ser ies Valve Adjustm en t Procedure The Si er r a 840 L, M and H (low, medium or high-flow units) con - trol the flow with a proportional electromagnetic valve that is set up for certain p r oce ss conditions. Variables, whic h affect their op- [...]

  • Page 47

    Serie s 830/84 0/860 In struction Man ual Cha pter 4 M aintena nce IM-83 /84/86 -H 4-13 the no-leak conditi on) . Now, adjust this screw cloc kwise one quar- ter tur n pas t this point, tigh t en the locknut and replace the cap. Apply power and tes t the controller for proper operation. (Quick fi x for oscillation). If your un i t is experien cing [...]

  • Page 48

    Cha pter 4 M aintena nce Series 83 0/840/8 60 In struc tion Ma nual 4-14 IM-83 /84/86 -H slowly, 1/8 turn at a ti me and observe until the desired voltage is obtained. 4. Now apply a 5% se tpoint signal and con fi rm that the voltage does not drop below 11 volts on the 30-volt circuit or 6 volts on the 15- volt circuit. Go back and forth between th[...]

  • Page 49

    Serie s 830/84 0/860 In struction Man ual Cha pter 4 M aintena nce IM-83 /84/86 -H 4-15 T ran sduce r Cali bration Calibration of Sierr a’s flow meters and controllers requires a cali- bration standard of at leas t equal accuracy and prefe rably an order of magnitude o f at least four times better than the trans ducer. S i- erra’s Cal-Bench Aut[...]

  • Page 50

    Serie s 830/84 0/860 In struction Man ual Cha pter 5 T rouble shooting IM-83 /84/86 -H 5-1 Chapt er 5 T roublesh ooting This chapter i s provided to help locate the caus e of a transduce r failure. It is not intended to be an all inclusive repair m anua l. In the case of major repairs, the unit should be returned to the fac- tory f o r service. Con[...]

  • Page 51

    Cha pter 5 T rouble shooting Serie s 830 /840/86 0 In struc ti on Man ual 5-2 IM-83 /84/86 -H Flow M eters a nd Flow Control lers w ith Electro magne tic V al ves Problem Possib le Cause Soluti o n No ou tput Clogged sensor PCB d efective Inlet fil t er scree n clogg ed Clean or r eplac e sens or Rep air or rep lace PCB Clean or r eplac e scree n U[...]

  • Page 52

    Serie s 830/84 0/860 In struction Man ual Cha pter 5 T rouble shooting IM-83 /84/86 -H 5-3 Flow C ontroll ers with Motor-o perate d Rota ry V al ves Problem Possib le Cause Soluti o n Valve “hunts” back a nd fo rth con ti nuou sly Press ure different ial too grea t Motor co upling se t screw s loo se Valve motor failure Red uce pressu re Tighte[...]

  • Page 53

    Cha pter 5 T rouble shooting Serie s 830 /840/86 0 In struc ti on Man ual 5-4 IM-83 /84/86 -H Ret urnin g Equipment to the Fact ory Factory Calib ra tion— All Models Sierra Instr uments maintains a fully-equipped calibration laboratory. All measuring and test equipment used in the calibration of Sierr a transducers are traceable to NI ST Standard[...]

  • Page 54

    Serie s 830/84 0/860 In struction Man ual Cha pter 5 T rouble shooting IM-83 /84/86 -H 5-5 RETURN ADDRESS : Sierra I nstruments, Inc. Attentio n : Fac t ory Servic e Center 5 Harris Court, Buildi n g L Monterey, CA 93940 USA CUSTOMER SERVI CE AND SUPP ORT INFORMAT ION: Email Technical Support: service@sierrainstrume nts.com Email Sales: sales@ sier[...]

  • Page 55

    Serie s 830/84 0/860 In struction Man ual App endix A IM-83 /84/86 -H A-1 Appen dix A Conversion F ormulas an d Gas T ables Conversion of Flow Rate to Other T and P Conditions The f low rate of your transducer is referenced to certain “standard” conditions of t empe rature and pres sure. Unless otherwise specified in your o rder, these standard[...]

  • Page 56

    App endix A Serie s 830/84 0/860 In struction Man ual A-2 IM-83 /84/86 -H 14.7 460 + 100 Q 2 = (10.00) = 3.47 l m 14.7 + 30 460 + 70[...]

  • Page 57

    Serie s 830/84 0/860 In struction Man ual App endix A IM-83 /84/86 -H A-3 Calculating F or a S ingle Gas The f ollowing tables provide K-factors and thermodyna mic prop- erties of gas es commonly used with mass flow m et ers and control- lers. The purpose of these tables is two-fold: 1. Calibrating an “actual” gas with a reference gas. This is [...]

  • Page 58

    App endix A Serie s 830/84 0/860 In struction Man ual A-4 IM-83 /84/86 -H Where: H = The constant amount o f heat applied to t he s ensor tube, m = The mass flow rate of the gas (gm/min) • C ρ = The coeff icient of specific heat of the gas (Cal/gm); C ρ is given in the Table ( at 0°C), ∆ T = T he temperature diff erence betwee n the downstre[...]

  • Page 59

    Serie s 830/84 0/860 In struction Man ual App endix A IM-83 /84/86 -H A-5 For our purposes, we want the ratio of the flow rate, Q 1 , f o r an ac- tual gas to t he flow rate of a reference gas, Q 2 , which will produce the same output volt age in a particular mass flow meter or control- ler. We get th is by combining equations (1) and (5 ): Q 1 /Q [...]

  • Page 60

    App endix A Serie s 830/84 0/860 In struction Man ual A-6 IM-83 /84/86 -H Calculating Dual Gas Mixtur es Equation ( 6 ) is used for gas mixtures, but we must c alculate N/ ρ C p for the mixture . The equivalent values of ρ , C p , and N for a dual gas mixture are given as follows: The equivalent gas density is: m • ! = ( / ) + ( / ) m • 1 T ![...]

  • Page 61

    Serie s 830/84 0/860 In struction Man ual App endix A IM-83 /84/86 -H A-7 Gas T a ble s and K-f actors Actua l Gas Che mical Symb ol K-facto r Relative N2 Cp (Cal/g ) Den sity (g/l) @ 0° C Elastom er O-ring* Valve Seat Ace tylene C 2 H 2 .58 .4036 1.162 Air 1.00 .240 1.293 Allene ( P r opa diene) C 3 H 4 .43 .352 1.787 KR Ammo nia NH 3 .73 .492 .7[...]

  • Page 62

    App endix A Serie s 830/84 0/860 In struction Man ual A-8 IM-83 /84/86 -H Actua l Gas Che mical Symb ol K-facto r Relative N2 Cp (Cal/g ) Den sity (g/l) @ 0° C Elastom er O-ring * Valve Se at Dichlo romethylsilan e (CH 3 ) 2 SiCl 2 .25 .1882 5.758 KR Dichlo rosilane SiH 2 Cl 2 .40 .150 4.506 KR Dichlo rotetrafluoroe than e (Freon-1 14) C 2 Cl 2 F [...]

  • Page 63

    Serie s 830/84 0/860 In struction Man ual App endix A IM-83 /84/86 -H A-9 Actua l Gas Che mical Symb ol K-facto r Relative N2 Cp (Cal/g ) Den sity (g/l) @ 0° C Elastom er O-ring * Valve Se at Methy l Merca ptan CH 3 SH .52 .2459 2.146 KR Methy l Tr ichlorosilan e (CH 3 ) S iCl 3 .25 .164 6.669 KR Molyb denu m Hexafluo ri de MoF 6 .21 .1373 9.366 K[...]

  • Page 64

    Serie s 830/84 0/860 In struction Man ual App endix B Spec if ica tion s IM-83 /84/86 -H B-1 Appen dix B Product S pecif ications Operating Sp ecifications Gases All clean g ases ; specify w he n or d ering Mass Flo w Rates 0 to 10 scc m to 0 to 56 00 s l pm; fl ow ranges sp ecified are for an equi va- lent flow of n itrogen a t 7 6 0 m m Hg and 21[...]

  • Page 65

    App endix B Spec if ica tion s Series 83 0/840 / 860 In struction Man ual B-2 IM-83 /84/86 -H 840/860C (h igh) ...... 100 a nd 200 s lm: + 15 VDC @ 8 0 mA, 1.2 watts and - 15 VDC @ 760 m A, 1 1 .4 wa tts; 300, 400 and 500 sl m : +1 5 VDC @ 830 mA, 12. 5 watts and -15 VDC @ 7 60 mA , 11.4 watts 840 (NPT)........... ..... +15 VDC @ 230 mA, 3.5 w a tt[...]

  • Page 66

    Serie s 830/84 0/860 In struction Man ual App endix B Spec if ica tion s IM-83 /84/86 -H B-3 Control Range 840/860C ........ ....... ..2 to 100% of fu ll s cale; valve s huts w hen flow drops below 2% 840 (NPT) ........... .....1 0 to 10 0 % of fu ll sca le Command Signa l 0-5 VDC, 20 m egaoh m s minimum inpu t im pe da n ce 4-20 mA, 250 Ohms maxim[...]

  • Page 67

    App endix B Spec if ica tion s Series 83 0/840 / 860 In struction Man ual B-4 IM-83 /84/86 -H and valve plug s tandard; Neopre n e, 4079 Kal-Rez (or eq uival ent) and other el astomers avai lable on sp e cial order; PFA T e flon v a lve lug available 840 (NPT)........... ....... .... 316 sta inless st eel, Teflon ® va lve set, Viton O-r ings sta n[...]

  • Page 68

    Serie s 830/84 0/860 In struction Man ual App endix B Spec if ica tion s IM-83 /84/86 -H B-5 T ran sduce r Mou nting D imension s All dim ensio ns are inches, millime ters are i n paren t hes es. C ertified d rawing s are avail- able on reque st. Shad ed por tion of d imen si ona l dr awings i nd icates control le r models. Low Flow B ody Flow Ra n[...]

  • Page 69

    App endix B Spec if ica tion s Series 83 0/840 / 860 In struction Man ual B-6 IM-83 /84/86 -H Medium Flow Body Flow Ra nge, slpm 0–15 0–30 0–50, 100 0–100 Process Tubing .25 or .375 (6.4 or 9.5) .25 or .375 (6.4 or 9.5) .25 or .375 (6.4 or 9.5) .375 (9.5) .562-1 8 Thread ( on F low Bod y) Fitting Ty pe Compres sion .25 or .375 VCO (mal e ) [...]

  • Page 70

    Serie s 830/84 0/860 In struction Man ual App endix B Spec if ica tion s IM-83 /84/86 -H B-7 High Flow B ody Flow Ra nge, slpm 0–100 0–200 0–300 0–400 0–500 Process Tubing .375 or .50 (9.5 or 12.7) .375 or .50 (9.5 or 1 2 .7) .50 (12.7) .50 (12.7) .50 (12.7) .75-16 Threa d (on Flow Body ) Fitting Ty pe Compres sion .375 or .50 VCO (mal e [...]

  • Page 71

    App endix B Spec if ica tion s Series 83 0/840 / 860 In struction Man ual B-8 IM-83 /84/86 -H[...]

  • Page 72

    Serie s 830/84 0/860 In struction Man ual App endix B Spec if ica tion s IM-83 /84/86 -H B-9 NPT Flow B ody 830 Flow Rang e, slpm 0–50 0–100 0–200 Inlet FNPT 1-inch 1.5-inch 2-inch Outlet FNPT 1-inch 1.5-inch 2-inch Dim. D 4.95 (125.7) 5.95 (151.1) 7.95 (201.9) Dim. H 10.72 (272.3) 11.72 (297.7) 13.78 (350.0) Dim. H2 8.25 (209.6) 8.75 (222.3)[...]

  • Page 73

    App endix B Spec if ica tion s Series 83 0/840 / 860 In struction Man ual B-10 IM-83 /84/86 -H NPT Flow B ody 840 Flow Rang e, slpm 0–50 0–100 0–200 Inlet FNPT 1-inch 1.5-inch 2-inch Outlet FNPT 3/4-inch 3/4-inch 1.5-inch Dim. A 2.92 (74.2) 4.30 (109. 2) 6.64 (168. 7) Dim. B 1.0 (25. 4 ) 1.88 (47.8) 2.87 (72.9) Dim. C 2.25 (57.2) 1.37 (34.8) [...]

  • Page 74

    Serie s 830/84 0/860 In struction Man ual App endix B Spec if ica tion s IM-83 /84/86 -H B-11[...]