Omega FMA 1500 инструкция обслуживания

www .omega.com e-mail: info@omega.com U ser ’ s Guide FMA 1400 and FMA 1500 Mass Flow Meters and Contr ollers Shop online at[...]

Servicing Nor th America: USA: One Omega Drive, Box 4047 ISO 9001 Certified Stamford CT 06907-0047 T el: (203) 359-1660 F AX: (203) 359-7700 e-mail: info@omega.com Canada: 976 Bergar Laval (Quebec) H7L 5A1 T el: (514) 856-6928 F AX: (514) 856-6886 e-mail: info@omega.ca For immediate technical or application assistance: USA and Canada: Sales Service[...]

T ABLE OF CONTENTS 1. UNP ACKING THE FMA 1400/1500 MASS FLOW METER................ 1.1 Inspect Package for External Damage......................................... 1.2 Unpack the Mass Flow Meter/Controller ....................................... 1.3 Returning Merchandise for Repair ............................................... 2. INST ALLA TION..[...]

7.3 Linearity Adjustment...................................................................... 7.3.1 Connections and Initial Warm Up........................................... 7.3.2 ZERO Adjustment................................................................. 7.3.3 25% Flow Adjustment............................................................. [...]

TRADEMARKS Buna 7 is a registered trademark of DuPont Dow Elastometers. Kalrez 7 is a registered trademark of DuPont Dow Elastomers. Neoprene 7 is a registered trademark of DuPont. Omega ® -is a registered trademark of Omega Engineering, Inc. VCR 7 is a registered trademark of Crawford Fitting Co. V iton 7 is a registered trademark of Dupont Dow E[...]

1 1. UNP ACKING THE FMA 1400/1500 MASS FLOW METER AND CONTROLLER 1.1 Inspect Package for External Damage Remov e the P acking List and v erify that you hav e received all equipment. If you hav e any questions about the shipment, please call the Omega 7 Customer Ser vice Depar tment at 1-800-622-2378 or (203) 359-1660. Y our FMA 1400/1500 Mass Flo w[...]

2 It is also pref erable to install the FMA 1400/1500 transducer in a stab le environment, free of frequent and sudden temperature changes, high moisture , and drafts. Prior to connecting gas lines inspect all par ts of the piping system including fer- rules and fittings for dust or other contaminants . Be sure to obser v e the direction of gas flo[...]

FIGURE 2-1, WIRING DIAGRAM FOR FMA 1400/1500 TRANSDUCERS FIGURE 2-3, FMA 1400/1500 15 PIN "D" CONNECTOR CONFIGURA TION 3 PIN FUNCTION 1 Chassis Ground 2 Common, Signal Ground For Pin 3 3 0-5 VDC Flow Signal 4 +15 VDC Power Supply 5 (-) 4-20 mA Flow Signal (optional) 6 +7 VDC for Local Set Point 7 (unassigned) 8 TTL Valve Off Control (FMA [...]

Important notes: In general, "D" Connector numbering patterns are standardized. There are, how- e ver , some connectors with nonconforming patter ns and the numbering sequence on your mating connector ma y or ma y not coincide with the numbering sequence shown in our pin configuration tab le abov e. It is imperativ e that you match the ap[...]

4. SPECIFICA TIONS FLOW MEDIUM: Please note that FMA 1400/1500 Mass Flow Meters and Controllers for ranges up to and above 10 L/min are designed to work with clean gases only . Never tr y to meter or control flow rates of liquids with any FMA 1500's or FMA 1400's. CALIBRA TIONS: Per formed at standard conditions [14.7 psia (1.01 bars) and[...]

Omega 7 makes no expressed or implied guarantees of corrosion resistance of mass flow meters as pertains to different flow media reacting with components of meters. It is the customers' sole responsibility to select the model suitable for a particular gas based on the fluid contacting (wetted) materials offered in the different models. INLET A[...]

A TTITUDE SENSITIVITY: 1% shift for a 90 degree rotation from horizontal to vertical; standard calibration is in horizontal position. OUTPUT SIGNALS: Linear 0-5 VDC (2000 Ω minimum load impedance); 4-20 mA optional (50-500 Ω loop resistance); 20 mV peak to peak max noise. COMMAND SIGNAL: 0-5 VDC (200K Ω input impedance). TRANSDUCER INPUT POWE[...]

FLOW RANGES T ABLE I FMA 1500/1400 FOR RANGES UP TO 10 L/MIN LOW FLOW MASS FLOW METER/CONTROLLERS* T ABLE II FMA 1500/1400 FOR RANGES ABOVE 10 L/MIN MEDIUM FLOW MASS FLOW METER/CONTROLLERS* T ABLE III FMA 1500/1400 FOR RANGES ABOVE 10 L/MIN HIGH FLOW MASS FLOW METER/CONTROLLERS* *Flow rates are stated for Nitrogen at STP conditions [i.e. 70 F F (21[...]

T ABLE IV PRESSURE DROPS T ABLE V APPROXIMA TE WEIGHTS 5. OPERA TING INSTRUCTIONS 5.1 Preparation and W arm Up It is assumed that the Mass Flow Meter or Controller has been correctly installed and thoroughly leak tested as described in section 2. Make sure the flow source is OFF . Po wer up the transducer using y our own pow er supply (or tur n the[...]

10 During initial powering of the FMA 1400/1500 transducer , the flow output signal will be indicating a higher than usual output. This is indication that the FMA 1400/1500 trans- ducer has not yet attained it's minim um operating temperature. This condition will automatically cancel within a f ew minutes and the transducer should e ventually [...]

age is a linear representation of 0 to 100% of the full scale mass flow rate . Response time to set point changes are 1 second (FMA 1400 f or ranges up to 10 L/min) and 2 seconds (FMA 1400 f or ranges abov e 10 L/min) to within 2% of the final flow o ver 25 to 100% of full scale. On pin 6 of the FMA 1400 transducer is a regulated and constant +5VDC[...]

utilizing +15VDC valv e configuration, connecting the TEST pin 12 on 15-pin "D" connectors) to ground will fully open the v alve . For FMA 1400's with a +30VDC valv e configuration, connecting the TEST pin to +15VDC will fully open the valv e. 6. MAINTENANCE 6.1 Introduction It is impor tant that the Mass Flow Meter/Controller is use[...]

13 6.2.2 FMA 1400/1500 for ranges up to 10 L/min Unscrew the inlet compression fitting of meter . Note that the Restrictor Flow Element (RFE) is connected to the inlet fitting. Carefully disassemble the RFE from the inlet connection. The 50 micron filter screen will now become visib le. Push the screen out through the inlet fitting. Clean or replac[...]

14 Contact Omega 7 f or optional sealing mater ials av ailable . Set the FMA 1400 into PURGE mode, and attempt to flush through with a clean, filtered, and neutral gas such as nitrogen. [Another option for fully opening the valv e is to remo v e the plastic cap on top of the v alv e , and turn the set screw coun- terclockwise until it stops . See s[...]

FIGURE 7-1, CALIBRA TION POTENTIOMETER LOCA TIONS 7.2 Calibration of FMA 1500 Mass Flow Meters All adjustments in this section are made from the outside of the meter , there is no need to disassemble an y par t of the instr ument. FMA 1500 Mass Flow Meters ma y be field recalibrated/chec ked f or the same range the y were originally factory calibra[...]

7.2.2 ZERO Adjustment Shut off the flow of gas into the Mass Flo w Meter . T o ensure that no seepage or leak occurs into the meter , it is good practice to temporarily disconnect the gas source. Using the multimeter and the insulated screwdriver , adjust the ZERO potentiometer [R29] through the access window f or 0 VDC (or 4 mA respectiv ely) at z[...]

7.3.2 ZERO Adjustment Shut off the flow of gas into the Mass Flo w Meter . T o ensure that no seepage or leak occurs into the meter , it is good practice to temporarily disconnect the gas source. Using the multimeter and the insulated scre wdriver , adjust the ZERO potentiometer [R29] through the access window f or 0 VDC (or 4 mA respectiv ely) at [...]

 the transducer . The unit will now act as a mass flow meter . CA UTION: If the v alve is left in the A UTO (control) or OPEN mode f or an e xtended per iod of time, it ma y become war m or e ven hot to the touch. Use care in av oiding direct contact with the valv e during operation. F ollow steps outlined in section 7.2 and 7.3, then continue w[...]

T ABLE VI FMA 1400 SOLENOID VAL VE ORIFICE SELECTION T ABLE 8. TROUBLESHOOTING 8.1 Common Conditions Y our Mass Flow Meter/Controller was thoroughly chec ked at n umerous quality control points during and after manufacturing and assemb ly operations. It was cal- ibrated in accordance to y our desired flow and pressure conditions f or a giv en gas o[...]

8.2 T roubleshooting Guide 20 REMEDY check connection of power supply disconnect FMA 1400/1500 transducer from power supply; remove the short- ing condition or check polarities; fuse resets automatically disconnect power cord from AC supply; remove and inspect fuses at AC power input connector of FMA14PD Series; replace as necessary REMOVE CAUSE OF[...]

21 REMEDY locate and correct return to factory for replacement return to factory for replacement locate and repair use matched calibration see K factor tables in APPENDIX 2 locate and correct return to factory for replacement flush clean or disassemble to remove impediments flush clean or disassemble to remove impediments or return to factory for r[...]

F or best results it is recommended that instr uments are returned to the factory f or ser vicing. See section 1.3 f or retur n procedures. 8.3 T echnical Assistance Omega 7 Engineering will provide technical assistance ov er the phone to qualified repair personnel. Please call our Flow Depar tment (800) 872-9436 e xtension 2298. 22 Q O = Q a = Q r[...]

APPENDIX 1 COMPONENTS DIAGRAMS 23 FMA 1500 METERING PC BOARD (ALSO INCORPORA TED IN FMA 1400) FMA 1400 CONTROL PC BOARD[...]

24 APPENDIX 2 GAS F ACTOR T ABLE (“K” FACTORS) 1.162 1.293 1.787 .760 1.782 3.478 5.227 3.025 7.130 11.18 7.803 6.108 6.644 2.413 2.593 2.503 2.503 2.503 1.964 3.397 1.250 6.860 3.926 2.945 2.680 3.163 4.125 3.858 5.326 6.892 4.660 2.322 2.742 1.877 1.799 1.235 Acetylene C 2 H 2 Air Allene (Propadiene) C 3 H 4 Ammonia NH 3 Argon Ar Arsine AsH 3[...]

25 ACTUAL GAS K Factor Relative to N 2 Cp [Cal/g] Density [g/I] Dibromodifluoromethane CBr 2 F 2 Dichlorodifluoromethane (Freon-12) CCl 2 F 2 Dichlofluoromethane (Freon-21) CHCl 2 F Dichloromethylsilane (CH 3 ) 2 SiCl 2 Dichlorosilane SiH 2 Cl 2 Dichlorotetrafluoroethane (Freon-114) C 2 Cl 2 F 4 1,1-Difluoroethylene (Freon-1132A) C 2 H 2 F 2 Dimeth[...]

26 Actual Gas K Factor Relative to N 2 Cp [Cal/g] Density [g/I] Hydrogen Fluoride HF Hydrogen Iodide HI Hydrogen Selenide H 2 Se Hydrogen Sulfide H 2 S Iodine Pentafluoride IF 5 Isobutane CH(CH 3 ) 3 Isobutylene C 4 H 6 Krypton Kr Methane CH 4 Methanol CH 3 Methyl Acetylene C 3 H 4 Methyl Bromide CH 2 Br Methyl Chloride CH 3 Cl Methyl Fluoride CH 3[...]

27 .30 .35 .40 .5982 .284 .3482 .69 .2635 .3883 .5096 .3237 .3287 .3278 .2031 .0608 .2691 .32 .2792 .2541 .1961 .4616 .48 1.44 Actual Gas K Factor Relative to N 2 Cp [Cal/g] Density [g/I] Phosphorous T richloride PCl 3 Propane C 3 H 8 Propylene C 3 H 6 Silane SiH 4 Silicon T etrachloride SiCl 4 Silicon T etrafluoride SiF 4 Sulfur Dioxide SO 2 Sulfu[...]

APPENDIX 3 DIMENSIONAL DRA WINGS FMA 1500 FOR RANGES UP TO 10 L/MIN MASS FLOW METER NO TES: Omega 7 reser ves the right to change designs and dimensions at its sole discretion at any time without notice . F or cer tified dimensions please contact Omega 7 . 28[...]

FMA 1500 FOR RANGES ABOVE 10 L/MIN MASS FLOW CONTROLLER NO TES: Omega 7 reser ves the right to change designs and dimensions at its sole discretion at any time without notice . F or cer tified dimensions please contact Omega 7 . 29[...]

FMA 1400 RANGES UP TO 10 L/MIN MASS FLOW CONTROLLER NO TES: Omega 7 reser ves the right to change designs and dimensions at its sole discretion at any time without notice . F or cer tified dimensions please contact Omega 7 . 30[...]

FMA 1400 RANGES ABOVE 10 L/MIN MASS FLOW CONTROLLER NO TES: Omega 7 reser ves the right to change designs and dimensions at its sole discretion at any time without notice . F or cer tified dimensions please contact Omega 7 . 31[...]

NOTES: 32[...]

NOTES: 33[...]

W ARRANTY / DISCLAIMER OMEGA ENGINEERING, INC. warrants this unit to be free of def ects in materials and workmanship for a period of 13 months from date of purchase. OMEGA’s W arranty adds an additional one (1) month grace period to the nor mal one (1) year pr oduct warranty to cover handling and shipping time . This ensures that OMEGA’ s cust[...]

Where Do I Find Ever ything I Need for Pr ocess Measurement and Control? O M EGA…Of Course! Shop online at www .omega.com TEMPERA TURE 5 Thermocouple, R TD & Thermistor Probes, Connectors, Panels & Assemblies 5 W ire: Thermocouple, R TD & Thermistor 5 Calibrators & Ice Point References 5 Recorders, Contr ollers & Process Monit[...]